XLG Series

: SUS304) Valve seal (maintenance part) Body(material: A6063) C D C E E (KF Flange) Fn J H B G A Unit: mm A Model A B C D E Fn G H J XLG-16 40 110 38 1 30 17 40 26 XLG-25 50 120 48 1 12 40 26 39 27.5 XLG-40 65 171 66 2 11 55 41 63 36 10 XL*-OMI0010-E 4-2Size 50,63,80,100,160 C E D C E E (KF Flange) (K Flange) Fn Fd J K H B A G A Unit: mm Model A B C D E Fn Fd G H J K XLG-50-1 70 183 80 31

High Vacuum L Type Valve

Construction / Operation Retainer 1 Coil assembly (maintenance service part) Control power supply 2 Core assembly (maintenance service part) Armature assembly (maintenance service part) Cover 6 4 5 Core O-ring external seal (maintenance service part) 31 Bonnet O-ring external seal (maintenance service part) 32 7 Spring 8 Bellows 9 Valve Body 1 0 Armature assembly includes (7), (8), and (9

10-my3m-e

MY3B25-16A-Stroke MY3B40-16AStroke MY3B63-16AStroke Polyamide Dust seal band 10 MY3B16-16BStroke MY3B25-16BStroke MY3B40-16B-Stroke MY3B63-16BStroke 1 Stainless steel 15 Tubing gasket RMB-16 RMB-25 RMB-40 RMB-63 2 NBR 16 Piston seal RMY-16 RMY-25 RMY-40 RMY-63 2 NBR KA00020 KA00048 KA00156 KA00036 O-ring 28 4 NBR (6.2 x 3 x 1.6) (10.5 x 8.5 x 1) KA00309 KA00309 KA00320 KA00402 O-ring 31

Compact Guide Cylinder

H 12 42 29 7 6 80 89 18 25 4.5 5 26 58 16 46 33 7 6 88 98 22 32 5.5 5 30 64 20 53 37 8 8 102 112 24 38 5.5 6 36 83 25 53.5 37.5 9 7 114 126 30 40 6.6 6 42 93 32 59.5 37.5 10 12 138 154 34 50 9 9 48 112 40 66 44 10 12 146 162 40 60 9 9 54 120 50 72 44 12 16 178 198 46 65 11 10 64 148 63 77 49 12 16 192 212 58 75 11 10 78 162 80 96.5 56.5 16 24 238 262 54 90 13.5 16 91.5 202 100 116 66 19 31

10

mounting hole) 2 4 3 34 1 Dimensions of auto switch mounting groove (Enlarged view) 4 x M4 x 0.7 thread depth 8 (Mounting thread) +0.025 3H9 0 depth 3 +0.043 18H9 0 depth 1.5 4 M5 x 0.8 (Finger opening port) 4 x M5 x 0.8 (Piston rod and rack screw) Auto switch mounting groove (4 locations)1 M5 x 0.8 (Finger closing port) H 44 18.2 5.5 0.5 9 12.5 8 7 6 18 Width across flats 8 (4 locations) 15 31

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

Bottom through hole dia. 4.2 (Mounting hole) 45 2 x M5 x 0.8 thread depth 10 (Mounting thread) 35 23 26 27 36 18 23 7 2 21H9 +0.052 depth 3 0 +0.2 +0.1 12 16 36 26 4 x M4 x 0.7 thread depth 5 M5 x 0.8 (Finger closing port) (Thread for mounting attachment) Auto Switch Mounting Groove Dimensions 41 30 12 18 4 4 5 M5 x 0.8 (Finger opening port) 20 9 6.45 6 MHW2-20D1 Right angle finger type 31

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

DO 41 30 12 18 S 204 4 5 M5 x 0.8 (Finger operating port) 20 9 6.45 6 MHW2-20D1 Right angle finger type 31 15 10 11 14 5 28 16 41 4-M4 x 0.7 (Thread for mounting attachment) 12-10-19 19 Series MHW2 Dimensions MHW2-25D Flat finger type (Standard) 24 2-M6 x 1 thread depth 10 (Mounting hole) 20 4-M6 x 1 thread depth 12 (Mounting thread) Bottom through hole dia. 5.1 (Mounting hole) 69 51 40 27

ML2B

RZQ MI W S Stroke Adjusting Unit CEP1 With shock absorber: CE1 ML2B Bore size S Stroke L CE2 TT h ML2B EB FF EA Stroke adjusting unit C J G5-S CV ED MVGQ CC TA FA (Absorber stroke) RB FB FC J Shock absorber Cushion needle EC DFH -X EY 20Data (mm) TT Max. 16.5 Max. 20 Max. 25 TA 7 12 12 FH 12 16 16 FF 6 6 6 FC 13 17 17 FB 33 43 43 FA 46.7 67.3 67.3 EY 53.5 67 81.5 EC 6.5 8.5 9.5 EB 20 25 31

Clean Gas Filter

to Order Precision filtration for compressed air, nitrogen, etc. used in the semiconductor process SFB 30 02 0 Clean gas filter (Straight type) Port size PTFE membrane with high reliability Port size Rc, NPT, TSJ, UOJ 1/4 02 Symbol Filtration 0.01 m (Filtering efficiency 99.99%) Model type Symbol Type Disposable (Narrow size) Bracket is included as a standard. 30 Disposable (Long size) 31

SL5200

Vespel is a registered trademark of DuPont. 31 Regulator Pressure Gauges Guide For AP/SL/AZ series (Installed before shipment 1) / Order separately) Model Specifications Installation unit gauge port Pressurerange Unit Regulator Code 2) Part number 3) Lower mount Select compatible materials of construction for the gas Gas -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30

Copper-free Actuators

Dual rod cylinder Series CXS CXSM Standard 3.7-1 SCXSl Standard CXSL Slide unit double rod style Series CX2 Refer to the catalog sheet With adjusting bolt CX2l SCX2l With shock absorber 20-CX2l Slide unit with built-in shock absorber/Series CXWM (Slide bearing) With adjusting bolt 20-CXWM SCXWl 3.6-6 With end lock 20-CXWM Slide unit/Series CXWL (Ball bushing) Standard 20-CXWL SCXWl 3.6-31

2–4

Auto Switch Weight Auto switch internal circuits Unit: g D-F9NV D-F9NV D-F9PV D-F9BV Model DC (+) Brown [Red] 0.5 7 7 6 Lead wire length (m) 3 37 37 31 Switch main circuit Switch main circuit Switch main circuit OUT Black [White] 5 61 61 51 DC (-) Blue [Black] Auto Switch Dimensions Unit: mm D-F9V D-F9PV Mounting screw M2.5 x 4 Slotted set screw 4.3 DC (+) Brown [Red] Indicator light 2 OUT

CRJ

Unit: g Model D-F9B D-F9P D-F9N D-F9N Lead wire length 0.5m 6 7 7 Lead wire length 3m 31 37 37 DC (+) Brown [Red] Auto Switch Dimensions Main circuit of switch OUT Black [White] D-F9N, D-F9P, D-F9B DC () Blue [Black] D-F9P DC (+) Brown [Red] Main circuit of switch OUT Black [White] DC () Blue [Black] D-F9B OUT (+) Brown [Red] Main circuit of switch OUT () Blue [Black] 10 2-Color Indication

CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD TB TC D (g6) DD (h9) Rotation A AU B BA BB BC BD BU H Size 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 6.7 10.6 2.2 16.7 23.1 18 20 12 14 5 6 10 15 90, 180 90, 180 W Q S US UW ab M TC TD TA Size Rotation 4.5 17 56 69 65 82 90 180 90 180 10 35 44 6 9 8 15.4 15.5 15 5.5 20 40 50 7 10 9 17.6 16 Dimension AU does not indicate the dimension when shipped

CYV

steel Flat washer Rare earth magnet Magnet B 8 Titanium nitride coating 29 Stainless steel Round head Phillips screw Hexagon socket head cap screw Rolled steel External slider side yoke 9 Electroless nickel plated Stainless steel 30 Aluminum alloy Hold spacer 10 Electroless nickel plated Aluminum alloy Slide table 11 Electroless nickel plated Electroless nickel plated Aluminum alloy Base 31

Dedicated Controller

No designated speed 31 No speed designation with MOVA or MOVI, and no prior speed designation found. No jump destination 32 No label found at the program designated jump destination. Nesting exceeded 33 Sub-routine nesting (calling a sub-routine from another sub-routine) exceeds 14 levels. No return destination 34 No return destination found for the RET command operation.

LG1H

Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 3000 2000 m L1 0 10 20 30 Transfer load m (kg) L2 600 L2 (mm) 400 Mer Rolling Yawing m 200 L2 Mer 10 20 30 0 Transfer load m (kg) m a = 1000 4000 a = 2000 L3 (mm) L3 a = 3000 2000 m Mey a 10 20 30 0 Transfer load m (kg) Refer to page 183 for deflection data. 176 31

Check Valve Series AK 1

Model AKH03-U10/32 AKH03-N01S AKH07-U10/32 AKH07-N01S AKH07-N02S AKH09-N01S AKH09-N02S AKH09-N03S AKH11-N02S AKH11-N03S AKH11-N04S AKH13-N03S AKH13-N04S 8 11.11 10-32 UNF 1/8 10-32 UNF 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 31 31.7 21.2 20.6 22.7 22.9 25 27.7 36 35.5 48.3 40.7 41.2 54 46.5 5 10 10 11 18 16 24 43 47 40 79 87 85 Applicable tubing 5/32 2.8 12.7 2.8 6.5 6.5

Safety Speed Control Valve (SSC Valve) Series ASS 1

D L2 L3 L4 L5 L6 L7 L8 P d h T L1 Model Model ASS10 ASS100 ASS110 2 10 5 20 9 5 20 52 14 4 17 50 XT14-82-3-1 1 8 ASS30 ASS300 ASS310 3.2 12 6 30 12 6 26 73 23 5 16.5 63 XT14-105-5-1 1 4 3 8 , ASS500 ASS500 2.3 14 7 35 13 6 38 99 27 6 30.5 90 XT14-89-2-1 1 2 3 4 , ASS600 ASS600 3.2 14 7 65 14 6 46 116 31 6 26 112 XT14-85-2-1 3 4 1 , AS Meter-in Control Type Meter-out Control Type ASP Mounting

Speed Controller: Standard Type Series AS In-line Type 1

L1 L2 L3 L4 L5 L6 L7 L8 D Model Bore size ASS AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 40 56 30 30 45.5 5 5 5.25 17 23 25 10 11.5 13.2 15.5 17 20.6 54.5 56 68 50 51.5 61 16 20 26 4.5 4.5 5.5 1 4 1 4 ASR Effective thread depth 6 8 3 Dimensions: AS5000 ASF 2-1/4 to 1/2 2-M4 x 0.7 Effective thread depth 7 15-9-31