111.0 kPa500 kPaPressure sensor: Stainless steel 630, Fitting: Stainless steel 304Fluids do not corrode stainless steel 630 and 304R1/4, NPT1/4, G1/4?, URJ1/4, TSJ1/4, Rc1/8Piping direction: Rear/Bottom12 to 24 VDC ?

111.0 kPa500 kPaPressure sensor: Stainless steel 630, Fitting: Stainless steel 304Fluids do not corrode stainless steel 630 and 304R1/4, NPT1/4, G1/4?, URJ1/4, TSJ1/4, Rc1/8Piping direction: Rear/Bottom12 to 24 VDC ?

111.0 kPa500 kPaPressure sensor: Stainless steel 630, Fitting: Stainless steel 304Fluids do not corrode stainless steel 630 and 304R1/4, NPT1/4, G1/4?, URJ1/4, TSJ1/4, Rc1/8Piping direction: Rear/Bottom12 to 24 VDC ?

0.105 to 1.100 MPa4 MPaPressure sensor: Stainless steel 630, Fitting: Stainless steel 304Fluids do not corrode stainless steel 630 and 304R1/4, NPT1/4, G1/4?, URJ1/4, TSJ1/4, Rc1/8Piping direction: Rear/Bottom12 to 24 VDC ?

0.105 to 1.100 MPa4 MPaPressure sensor: Stainless steel 630, Fitting: Stainless steel 304Fluids do not corrode stainless steel 630 and 304R1/4, NPT1/4, G1/4?, URJ1/4, TSJ1/4, Rc1/8Piping direction: Rear/Bottom12 to 24 VDC ?

Digital Pressure Sensor

Order GS40 X202 Digital Pressure Sensor PSE ZSE4 ISE4 Port size Optional M5 (Female) R(PT)1/8 R(PT)1/4 5m-long lead wire X202 M5 01 02 ZSE5 ISE5 ZSE6 ISE6 Accessories B None Bracket (M5 style only) ZSE3 ISE3 GS PS Specifications ISA Model GS40-M5 GS40-01 GS40-02 ZSE1 ISE1 Air or inert gas Fluid ZSE2 ISE2 3% F.S. or less Hysteresis 3% F.S. (5 to 40 C), 5% F.S. (0 to 60 C) Repeatability ZSP 12

ALB900

Do not set the mist generating pressure differential to exceed 0.2 MPa. Warning PPA 1. Before removing the oil filler plug, loosen it two and half turns to completely release the pressure in the bowl. This will prevent the oil filler plug from flying out.

AU

Do NOT pipe upwards. AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

ZSP1

Hysteresis 0.5 kPa Internal orifice 0.5 0.8 Supply voltage 12 to 24 VDC (Ripple 10% or less) Output type NPN open collector 30 V, 80 mA Indicator light ON: When output is ON.

Air Suction Filter Series ZFA 1

Description Cover Case Gasket/Seal Element Material Zinc die-casted Aluminum die-casted NBR Polyester, ABS AMJ Element size (mm) 43 x 42 x 12 43 x 40 x 22 Applicable filter model Part no. EJ001H-030N EJ101H-030N ZFA100 ZFA200 Misc.

Air Suction Filter With One-touch Fittings Series ZFB 1

Do not use it in a line that is kept pressurized because it could cause the body to break. 13-10-5 3 Series ZFB Dimensions Element Replacement 1. Stop the operation and reduce the internal pressure of the filter to atmospheric pressure. 2.

lPSMt

Reconfiguring the operation mode, as well as the zero and span adjustments, are easy to do in the field. INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ?

lPSMt

Reconfiguring the operation mode, as well as the zero and span adjustments, are easy to do in the field. INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ?

,,: ,.

Relernce torque specilication Table #3 IUT / l0T / lflTF $mies [0T/$AElFtiltn Male Branch Tee: KVT Rsfgrencs torque spocifiction Table #3 -oo Union Tee: KVT 11.4 19. 4.4 16.5 2.2 13.2 20.6 1 7 17.9 26.2 21 Female Branch Tee: KVTF Relerence torcue sDecificalion Table #3 1 0 ml/$lt fiir Bulkhead Connector: l(VE Mounting plat Relorence toroue soecilication Table #4 Bulkhead Union: KVE--OO t-12

NARM Series

7.1 10.6 14.1 17.7 21.2 24.7 NARM1000 NARM2000 134819 13615 13614 16.5 x 13.5 x 1.5 P7 Flow (SCFM) 7 8 9 10 11 13626 13625 13624 23 x 20 x 1.5 P8 Valve Valve spring Brass/NBR Stainless steel POM NBR NBR Pressure Characteristics Valve retainer O-ring O-ring Initial setting Supply pressure: 0.7MPa{7.1kgf/cm2} Secondary pressure: 0.2MPa{2.0kgf/c Flow: .4 SCFM NARM1000 Setting the pressure, do

TKS

Do not insert the tube when the TKS is rotating, as the pawl may be damaged. KG KFG2 MS KKA KP LQ MQR T T IDK 489

Thermo-chiller Series HRZ Fluorinated Fluid Type

Note 4) Thermo-cooler specifications do not have heating capability. Note 5) Capacity of the Thermo-chiller outlet when the circulating fluid temperature is at 20C. Note 6) Required flow for cooling capacity or maintaining the temperature stability. When used below the rated flow, use the individually sold, By-pass piping set (Refer to page 95).

* 1 XSA Series Normal Close High Vacuum Solenoid Valve

DIN terminal without connector (With surge voltage suppressor) Voltage 1 100 VAC 2 200 VAC 3 110 VAC 4 220 VAC 5 24 VDC 6 12 VDC 7 240 VAC 8 48 VAC B 24 VAC J 230 VAC T Terminal (With surge voltage suppressor) TL Terminal with light (With surge voltage suppressor) C Conduit (With surge voltage suppressor) Table: Spacer Part No.

Intrinsically Safe Valve 5 Port Solenoid Valve Single Unit Body Ported Series 53-SY5000/7000/9000 Electrical Entry TT Hazardous Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Electrical Entry L and LL Hazardous Location Class I Division 1

Intrinsically Safe Valve 5 Port Solenoid Valve Series 53-SY5000/7000/9000 Body Ported Electrical Entry L and LL Hazardous Location Class I Division 1 Groups A, B, C, D Electrical Entry TT Hazardous Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Single Unit Warning Do not install in Zone 0 (as defined in IEC 60079-10-1: 2008) or Zone 20 (as defined in IEC 60079-10-2: 2009)

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

Note 9) Panel dimensions.These dimensions do not include possible protrusions such as a breaker handle. Note 10) Weight in the dry state without circulating fluids 108