PF3A8xxH.eng

(For accumulated increment) FLoW [dtH1]/[dtH2] ON delay time setting [0.00] 0 second or Reset the accumulated flow. (Press the DOWN and SET buttons simultaneously for 1 second or longer) [dtL1]/[dtL2] OFF delay time setting [0.00] 0 second FLoW Accumulated flow error After maintenance is complete, perform appropriate functional inspections and leak tests.

IZ-OMU0031-CN

[F] 2 2 [F 0] 0.4 kV 19 [F 1] OUT1 [F 2] OUT2 20 OUT1+0.2 kV OUT2-0.2 kV 0.04 kV [F 1] OUT1 ON OFF 21 [F 3] 25 mm 22 [F 4] 1 23 [F 5] ON 24 [F 6] OFF 25 [F98] OFF 26 [F99] OFF 27 -18No.IZ*-OMU0031 [F 0] <> [F 0] [F 0] -19No.IZ*-OMU0031 [F 1] OUT1 OUT1 ON OUT1ONOFF <> [F 1] 14 [P_1] [P1H] -20No.IZ*-OMU0031 [H_1] [H1] ON ON OFF OFF [F 1] OUT1 1)((n1H)0.1[kV]) (H1) (H1

Air cooled Thermo-con (Compact type)

The position for the symbol is assigned an ASCII code other than 0 or -. 4 Format error 5 BCC error 6 Overrun error 7 Framing error 8 Parity error HEF002-A6 3-5 Communication Format 3.6 Cautions for Communication Pay attention to the following points for communication.

Air cooled Thermo-con (Compact type)

The position for the symbol is assigned an ASCII code other than 0 or -. 4 Format error 5 BCC error 6 Overrun error 7 Framing error 8 Parity error INR-244-831 3-5 Communication Format 3.6 Cautions for Communication Pay attention to the following points for communication.

HEC-OM-S019

to F (Hex decimal) 0 5 Stop Bit Sets stop bit for communication. 1Bit, 2Bits 1 No.

Return Filter

How to Order FH100 06 0 0 0 P 005 Table1-7 Made to Order Symbol Made to Order Nil None (Standard) Table1-5 Element X0 Non-standard filtration equipped Symbol Element P Paper M Micromesh Note) The non-standard filtration is for micromesh elements only.

Parallel Type Air Gripper

2 +0.043 MHZ2-16 M40.7 2.1 8 17H9 0 2 +0.043 MHZ2-20 M5 x 0.8 4.3 10 21H9 0 3 +0.052 MHZ2-25 M61 7.3 12 26H9 0 3.5 +0.052 MHZ2-32 M61 7.9 13 34H9 0 4 +0.062 MHZ2-40 M81.25 17.7 17 42H9 0 4 +0.062 Use the holes on the body end surface for positioning.

MHx-OMU0057

Nm MHZ2-10 M2.50.45 0.31 MHZ2-16 M30.5 0.59 MHZ2-20 M40.7 1.4 MHZ2-25 M50.8 2.8 MHZ2-32 M61 4.9 MHZ2-40 M81.25 11.8 6 - (Lmm) Nm (mm) (mm) L MHZ2-10 M30.5 0.88 6 11H9 0 2 +0.043 MHZ2-16 M40.7 2.1 8 17H9 +0.043 0 2 MHZ2-20 M50.8 4.3 10 21H9 +0.052 0 3 MHZ2-25 M61 7.3 12 26H9 +0.052 0 3.5 MHZ2-32 M61 7.9 13 34H9 +0.062 0 4 MHZ2-40 M81.25 17.7 17 42H9 +0.062 0 4 Nm Lmm MHZ2-10 M30.5 0.9

Electro-pneumatic proportional valve

Command signal [SIGNAL] The signal is controlled by manual potentiometer or external command signal (0 to 5VDC). The signal is controlled by manual potentiometer or external command signal (0 to 5VDC). Since input impedance is 100k, the current required for external command signal is not more than 0.05mA.

SI unit for AS-Interface

The address at shipment from the factory is 0.

Space Saving Vacuum Ejector Vacuum Pump System

(It is set to RESET state when shipped.) up the arrow with 0 to return it to the RESET state (flow from A to P).(It is set to RESET state when shipped.) ( ) ( ) 19 - Doc. no.

Precision Regulator

Description Materials Bonnet Aluminum die-cast Nozzle diaphragm assembly Aluminum, Weather resistant NBR Seal HNBR Seal NBR Diaphragm spacer Polyacetal Supply diaphragm Weather resistant NBR Exhaust diaphragm assembly Aluminum, Weather resistant NBR Valve assembly Aluminum, stainless steel, HNBR Body Aluminum die-cast Grease: lithium grease -7- How to order IR 0 0 01 BG A 0 1

Digital Flow Switch (Remote type sensor unit)

0.5 With flow adjustment valve 74 0 1: These are the minimum dimensions for bottom entry piping.

Digital Pressure Switch

Connect 0 VDC wire (blue line) directly or as close as possible to 0 VDC terminal of the DC power supply. Environment Do not use the Pressure switch in environment containing corrosive gas, chemicals, sea water, water or vapor, or in a place where there is a possibility of adhesion of those substances to the Pressure switch. It can cause failure or malfunction.

HRX-OM-K003

HRW002-H, H*S: 0, 216LPM 0, 0.54.2GPM Issues an alarm of Return Low Flow WRN if the circulating fluid does not reach the set flow rate. Lift this alarm if the selection is 0.

HEC-OM-R008

If using Ethylene Glycol, refer to the suppliers Material Safety Data Sheet [RET]: Used to fix the value changed by [] key. 0 to F (MSDS) and wear Personal Protective Equipment (PPE) as appropriate. 4 Unit Number (Hex decimal) 0 Press again to return to current temperature indication. 4. Fill the circulating fluid into the reservoir.

Precision Regulator

Description Materials Bonnet Aluminum die-cast Nozzle diaphragm assembly Aluminum, Weather resistant NBR Seal HNBR Seal NBR Diaphragm spacer Polyacetal Supply diaphragm Weather resistant NBR Exhaust diaphragm assembly Aluminum, Weather resistant NBR Valve assembly Aluminum, stainless steel, HNBR Body Aluminum die-cast Grease: lithium grease -8- How to order IR 0 0 02 0 2 BG A

rep-filter-e

0 Support ring Filter case Guide bar o DRAIN Element support Guide bar qHexagon head bolt oPartition-plate Spring wHexagon nut !0Gasket Vibration stop eWasher !1Hexagon head bolt Element holder rCover !2Spring washer !7Element tGasket !3Washer !8Joint yHexagon nut !4Element retainer !9Element guide uSpring washer !5Collar iWasher !

Compact Guide Cylinder

to +1.5 0 mm2 1 Speed with no load.

MLGC

0 !1 !2 No.