LVQ

Size 1 2 1 2 3 1 2 1 2 A B C A B A B A B 2 2 3 3 3 4 4 5 5 2 2 2 3 3 4 4 5 5 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 SMC SMC P U Panel mount union Union SMC SMC With reducer Basic size Note) Select the fittings of the same size as the one at the valve side

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

mA), Holding 0.5 VA (5 mA) 100 VAC Start-up 0.55 VA (5 mA), Holding 0.55 VA (7.5 mA) 110 VAC Inrush 1.0 VA(5 mA), Holding 1.0 VA (5 mA) 200 VAC Inrush 1.1 VA (5 mA), Holding 1.1 VA (5 mA) 220 VAC 3 position pressure center Note 1) Note 2) Use dry air to prevent condensation when operating at low temperatures.

Electric Actuator

Cable type 5, 6, 7 Cable length [m] 5, 8 Driver type 5 I/O connector Nil Nil Power supply voltage (V) Compatible drivers Nil Without connector Without cable Without cable H S R 2 5 With connector Nil Without driver Standard cable 2 m 5 m A1 A2 B1 B2 C1 C2 S1 S2 LECSA1-S; LECSA2-S; LECSB1-S; LECSB2-S; LECSC1-S; LECSC2-S; LECSS1-S; LECSS2-S; 100 to 120 200 to 230 100 to 120 200 to 230 100

e-Rodless Actuator

Yes 5 V A93V A93 Grommet 12 V 100 V Relay PLC 24 V 2-wire IC circuit A90V A90 5 V,12 V 100 V or less M9NV M9N 3-wire (NPN) IC circuit 5 V 12 V M9PV M9P 3-wire (PNP) M9BV M9B 12 V 2-wire Relay PLC Yes Grommet 24 V F9NWV F9NW 3-wire (NPN) Diagnostic indication 2-color display IC circuit 5 V 12 V F9PWV F9PW 3-wire (PNP) F9BWV F9BW 2-wire 12 V . . .

EXxx-OMN0037CN

21 79E8 79E8 31208 10 5 20 3CF4 3CF4 15604 5 2.5 10 0 0 0 0 0 0 BCF4 C30C -15604 -5 -2.5 -10 F9E8 8618 -31208 -10 -5 -20 F 8000 -32767 -10.5 -5.25 -21 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB -23No.EX-OMN0037CN-A -24No.EX-OMN0037CN-A EX600-AY A M12 (5 )2 2 M12 (4 ) No. 1 LED 2 () 3 4

rep-modular-e

8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

MGP

Note 2) Do not use MGPL(ball bushing bearing) as a stopper. 30 5 10 20 30 40 50 Transportation speed: u (m/min) 3.17-22 Compact Guide Cylinder Series MGP Construction (With air cushion) Series MGPM Series MGPL MGPM16 to 25 MGPL16 to 25 !6 !5 u !4 q@5 @3 !9!2@5 !1 !7 i @6 !0 r @4 e o t w @7 !0 y CL 16: 25 stroke 20, 25: Under 75 stroke MLGC !8 CNA !

VM

P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Dual pressure is available only on external pilot. 5-6-3 Mechanical Valves Series VM Precautions Be sure to read before handling.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CNG

For details, refer to page 9-15-66. 9-5-22

Electric Actuator Miniature Rod Type Miniature Slide table Type

-5 (Relative) c Attainment point: 5[mm] 0 5 10 15 20 25 Stroke [mm] 25 - Example of step data entry (4) Pushing operation In position a b c d e f g h i j k Step data no.0 : Pushing operation ("Pushing operation" is done during 10mm after it moves from No.

Vacuum Module Series ZX

Solenoid valve rated voltage L C CL CN B (5) Digital vacuum switch unit Light/Surge voltage suppressor None With light/surge voltage suppressor 1 C 0X ZSE3 D 21 3 100 VAC 50/60 Hz 110 VAC 50/60 Hz 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC Applicable to plug connector only. (Connector assembly with rectifier is attached.)

pa

Recommended Valve PA3000 PA5000 VQZ140 (Exhaust center) VQZ240 (Exhaust center) Refer to page 17-5-160 for details. 17-5-153 Series PA Performance Curve: Air Operated Type PA313 Flow Characteristics PA513 Flow Characteristics 50 50 Cycle 7 Hz Cycle 5 Hz Cycle 3 Hz (No change when SUP = 0.2 MPa) Cycle 7 Hz Cycle 5 Hz Cycle 3 Hz (No change when SUP = 0.2 MPa or 0.3 MPa) SUP = 0.5 MPa 40 40

Slide Unit Series CX2/CXWM/CXWL

A73H A80H E76A E73A E80A 3-wire (NPN equivalent) A72 A73 A80 A73C A80C 5 V 12 V 200 V 100 V IC circuit 10 16 20 25 32 16 20 25 32 Grommet CXS Relay, PLC 5 V, 12 V 12 V 100 V or less IC circuit 2-wire 24 V Connector 5 V, 12 V 5 V 12 V 24 V or less 100 V IC circuit 10 3-wire (NPN equivalent) DGrommet Relay, PLC 24 V 2-wire 5 V, 12 V 100 V or less IC circuit -X Solid state auto switches

Air Catch Sensor Series ISA

Centralized wiring type IISA2S-1 IISA2S-2 IISA2S-3 IISA2S-4 IISA2S-5 IISA2S-6 Individual wiring type IISA2P-1 IISA2P-2 IISA2P-3 IISA2P-4 IISA2P-5 IISA2P-6 ISA-5-1 ISA-5-2 ISA-5-3 ISA-5-4 ISA-5-5 ISA-5-6 ISA-5-7 73.0 135.5 173.0 210.5 248.0 285.5 323.0 5.5 35 35 Pressure Gauge for Air Catch Sensor Round pressure gauge Square embedded pressure gauge Connection thread GC3 4 4 AS G36 01 Nil

Slide Unit Series CX2/CXWM/CXWL

A73H A80H E76A E73A E80A 3-wire (NPN equivalent) A72 A73 A80 A73C A80C 5 V 12 V 200 V 100 V IC circuit 10 16 20 25 32 16 20 25 32 Grommet CXS Relay, PLC 5 V, 12 V 12 V 100 V or less IC circuit 2-wire 24 V Connector 5 V, 12 V 5 V 12 V 24 V or less 100 V IC circuit 10 3-wire (NPN equivalent) DGrommet Relay, PLC 24 V 2-wire 5 V, 12 V 100 V or less IC circuit -X Solid state auto switches

LEC-OM034xx

Setting of controller (LEC).18 4. 4 SIEMENS PLC S7 Connection Method .21 5. External connection .23 5. 1 CN4: Power supply connector .23 5. 2 CN3: Bus connector .23 5. 3 CN1: CONT connector.23 5. 4 CN2: PC/TB connector.24 6. CN4: Power supply connector .25 1 - 6.1 Power supply connector.25 6.2 Power line.25 6.3 Wiring of the shutdown circuit.26 Shutdown circuit Example.28 7.

Plate Cylinder

Material: Carbon steel 20 Series MU Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height D-M9 D-M9W D-M9AL D-A9 D-M9V D-M9WV D-M9AVL D-A9V B B A A Hs Hv D-M9 D-M9W D-M9AL D-M9V D-M9WV D-M9AVL D-A9 D-M9V D-M9WV D-M9AVL Size A B A B Hs Hv A B A B Hs Hv 25 5 5 5 5 7.5 27.5 1 1 1 1 32 5 5 5 5 14.5 30 1 1 1 1 40 5.5 5.5 5.5 5.5 16.5 37 1.5 1.5 1.5 1.5 50 7

Series VQ Metal Seal/Rubber Seal Body Ported

SOL.A SOL.A { { { { { { { { 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( + ) ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( + ) 1 station 5 stations SOL.B SOL.B SOL.A SOL.A 2 stations 6 stations SOL.B SOL.B SOL.A SOL.A 3 stations 7 stations SOL.B SOL.B SOL.A SOL.B SOL.A SOL.B 4 stations 8 stations VV5Q14 COM. COM.

Thermo-chiller

Cable size Crimped terminal on the thermo-chiller side Applicable model HRS100-A -20HRS100-W -204 cores x 5.5 mm2 (4 cores x AWG10) (Including grounding cable R5.5-5) R5.5-5 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 30 A M5 HRS150-A -20HRS150-W -2040 A 4 cores x 8 mm2 (4 cores x AWG8) (Including grounding cable R8-5) R8-5 A HRS100-A -40HRS100-W -403-phase 380 to 415 VAC (50/60