SMC Corporation of America
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0 Exhaust portr Adjusting springe Upper diaphragmw Upper diaphragm chamberq SIG Lower diaphragmy Lower diaphragm chambert OUT IN1 Springo Valvei Pistonu IN2 171 A IL201/211/220 Series Construction 2 12 IL211 IL201 1 r r e t e !2 !2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !

2 r FGH Pressure gauge e Outlet FQ1 Outlet e FN y EB ES w w Fluid release Component Parts and Seal List Component Parts/Replacement Parts Part No. No. Description Material Qty. Applicable model Note 1) FGFS/L Stainless steel 1 Material No. Description Part No. Qty.

Construction VHS20/30 VHS40/40-06/50 y i u w w t t r q IN OUT OUT IN q e o EXH. EXH. VM Component Parts No.

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

2 w @0 r !0 !9 e i !4 !8 @1 !0 t !3 40 or more MGPWL20 to 63 MGPWA20 to 63 !1!6 MGJ JMGP MGP MGPW MGPW 100 stroke or less MGQ 40 or more !7 MGG MGC MGF Over 100 stroke MGZ MGT Component Parts Component Parts No. Description Material Note Ball bushing Spacer Piston seal Rod seal Gasket A Gasket B No.

Calculation: (Example 1) MUB40-15S(T) Basic weight 0.62 kg RQ (Example 2) MUC50-5S(T) Basic weight 1.06 Additional weight (Mounting bracket) 0.40 1.06 + 0.40 = 1.46 kg MU Construction DSpring return -X B 20Data B section MU25 Spring extend B A A section MU25 Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !

Port size q Seal order no. r Seal order no. t Seal order no.

0 o w !0 o AS-F AS-F w !0 o u r e !3 !1 u u TMH r t r t ASD e !3 e !3 AS q AS-FE !1 !1 i !4 y q q KE i !5 i !5 AS-FG AS-FP AS-FM AS321F-02 Meter-out type AS3201F-02 Meter-in type AS3211F-02 AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

Calculation: (Example 1) MUB40-15S(T) Basic weight 0.62 kg RQ (Example 2) MUC50-5S(T) Basic weight 1.06 Additional weight (Mounting bracket) 0.40 1.06 + 0.40 = 1.46 kg MU Construction DSpring return -X B 20Data B section MU25 Spring extend B A A section MU25 Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !

Note9) Compact 22 Standby power consumption Basic 11 22 when operating [W] Note10) Compact 16 Max. instantaneous power Basic 22 55 consumption [W] Note11) Compact 45 Model LEPS 6 LEPS 10 Stroke [mm] 25 50 25 50 Weight [kg] Basic 0.29 0.35 0.56 0.65 Compact 0.50 0.59 Note 1) Pushing force accuracy is LEPS6: 30% (F.S.), LEPS10: 25%(F.S.).

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 90 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 90 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 90 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 90 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3-Screen High Precision Dig Press Switch, PRESSURE SWITCH, ISE1-6, N59, 90 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 90.00000 lb

Rated Pressure Range: H (-0.1 to 2 MPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 02 [R1/4, (M5, Female Threaded)]

Rated Pressure Range: H (-0.1 to 2 MPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 02 [R1/4, (M5, Female Threaded)]

Rated Pressure Range: H (-0.1 to 2 MPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported)