No more element replacement!

D-DN This catalog is printed on recycled paper with concern for the global environment.

Thermoelectric Bath

5 40 Water 0 GALDEN HT200 35 5 20 90 30 HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products 10 Fluorinert FC-3283 25 15 0 70 20 20 0 10 20 30 40 50 60 70 80 0 20 40 60 80 100 120 140 160 180 Time (minute) Time (minute) Pressure Loss in FacilityWater Circuit The values shown on the performance chart are not guaranteed, but typical.

High Vacuum L Type Valve

H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55

KF

D I.D.

EtherNet/IP TM Compatible Fieldbus System

Position code (Order #1 #4, Port A D) Message code #4 #3 #2 #1 D C B A 0 0 1 0 0 0 0 1 0 0 0 1 Message code 0x2 Product No.1 A port Ex.: Short-circuit or over current error with the first slave of COM A port. Message code and corrective action for diagnostic error are shown below.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

D-F8 has no protrusion from the body's end surface.

MHL2

Thread type Opening/Closing stroke (mm) Cylinder bore Symbol Type 10 20 40 60 16 30 60 80 20 40 80 100 25 50 100 120 32 70 120 160 40 100 160 200 Symbol Nil 10 to 25 M thread Rc NPT G Nil 1 2 TN TF 32 to 40 Double acting Action D Applicable Auto Switch/Refer to pages 761 to 809 for further information on the auto switches.

Floating Joint

Applicable model P215420-07 For JT20 7 Dust cover P215432-07 For JT32 P215440-07 For JT40 Dimensions JT20 to 40 M, P D M E F C G A B H Standard Pneumatic: Up to 0.7 MPa [mm] Model Connection thread M A B C D E F G Width across flats H Maximum thread depth P Weight JT20 M8 x 1.25 19.2 8 11 (25.4) 23 10 13.6 22 9.5 22 g JT32 M10 x 1.25 23 10 13.4 (30.6) 28 12 16.3 27 11.5 38 g JT40 M14 x 1.5

33

0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSE024-A-20/23-(T) [50 Hz] [60 Hz] 3000 3000 Ambient temperature Ambient temperature Cooling capacity [W] Cooling capacity [W] 25C 2500 2500 25C 2000 2000 1500 1500 35C 35C 1000 1000 40C 500 500 40C 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [C] Circulating fluid temperature

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

EXH Diagrams (a) to (d) show the combination with peripherals. 13-5-9

NGIP seies

D-97.D-93A (|& @D D-93A il ! @ D-90 : lnch D-97 Caution. 1) The abovo dimensions may vary in areas whre magnetic Inlerlerence is present. 2) Fo. 14 stroke cylinder, only one aulo switch may be mounted eithgr on the rod end or the cap end. 3) There are two ways to mounl lhe auto swilches as shown in the above ligure.

XLA Series

(KF flange) Fd Fn Heater (option) Auto switch (option) H G B A A Unit: mm Model A B C D E Fn Fd G H XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 10 XL*-OMI0009-E

Digital Flow Switches Series PF2A

Pin description Load is an analog input equipment such as a voltmeter, ammeter. 1 DC(+) PF2A7H-(-M) 68 69 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30 V 80 mA or less OUT1 Load Black H 0 V or Blue 50 msec 50 msec PF2A7H-(-M) 28 29 A B C D E F G H I J Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc1, NPT1, G1 36 M5 x

Compact Guide Cylinder End Lock Type SeriesMGP

Specifications Lock Specifications Lock position Rear, Front Double acting Action 32 40 50 63 Air Fluid Holding force (max.)

CG5-X6011

Mounting X D E C F G L S P Stroke (mm) Bore 40 50 63 80 100 Max Stroke 800 1200 1200 1400 1500 MP1 Double Rear Clevis MP2 Double Detatchable Rear Clevis MP3 Single Rear Clevis MP4 Single Detatchable Rear Clevis MF1 Front Flange MF2 Rear Flange MS1 End Angle MS2 Side Lug MS7 End Lug Cushion N A Rubber Bumper Air Cushion Seal Material R V NBR Viton Bore (mm) mm 40 50 63 80 100 In 1.50 2.00

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

Size Order No. 15 Return plate Aluminum die-cast Painting 8 LE-D-2-1 16 Magnet 21 16 LE-D-2-2 17 Wear ring holder Stainless Size 25,150st only 25 LE-D-2-3 18 Wear ring Resin Size 25,150st only 19 Screw shaft pulley Aluminum alloy Maintenance parts/Grease 20 Motor pulley Aluminum alloy Apply for Grease pack 21 Belt order No. 22 Scraper NBR Piston rod and Guide GR-S-010(10) GR-S-020(20) 23

Miniature Fittings M3, R(PT) 1/8, M5 Series M

L4 L1 L2 L3 M d O.D.

XL-OMY0003

SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5 10 XL-OMY0003 6-2 1 2 b 3 1 2 O 4 a aa b O O

Compact Cylinder with Air Cushion Series RQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order RQ B 32 50 50 32 RDQ B M9BW With auto switch With auto switch Made to Order (Built-in magnet) For details, refer to page 775. Mounting bracket Number of auto

) With auto switch: 10C to 60C (No freezing) Female thread Ambient and fluid temperature Rod end thread Stroke length tolerance Mounting Piston speed +1.0 0 Through-hole 50 to 500 mm/s Standard Stroke Standard stroke (mm) Bore size (mm) 20, 25 32, 40 50, 63 80, 100 15, 20, 25, 30, 40, 50 20, 25, 30, 40, 50, 75, 100 30, 40, 50, 75, 100 40, 50, 75, 100 Made to Order (For details, refer to pages