SMC Corporation of America
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Upper and lower setting limit of user setting Analogue output Settable range during measurement range communication error or idling (Range) (Lwr_Lmt) (Upr_Lmt) (Fault_MA) (Idle_MA) 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V 0.00 to +10.50 V 0..5 V 0.00 to + 5.22 V +0.03 to +5.25 V 0.00 to +5.25 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V +0.75 to +5.25 V 0..20 mA 0.00 to +20.90 mA +0.10 to

Individual spacer ZR1-R1-2 V PV X X Vacuum port Rc 1/8 V port PD + + + + + + X X V X PV 70.5 SMC 16.5 X PD 12 V V (Pitch) 33 35.5 (Pitch) 33 35.5 EXH PD PV PS 13-3-31 31 Vacuum pad connection V port Series ZR Vacuum pad connection V port Ejector System Manifold Nozzle Dia./1.8, 2.0 mm Common exhaust EXH port Common ejector air supply PV port Common pilot valve air supply PS port Common vacuum

) 2 0 V() 3 24 V() 4 0 V() 5 FE (2)EX600-ED3PWR IN7/8 5 1 0 V() 2 0 V() 3 FE 4 24 V() 5 24 V() (3)EX600-ED4PWR INM12 4 A code PWR OUTM12 5 A code 1 24 V() 1 24 V() 2 24 V() 2 24 V() 3 0 V() 3 0 V() 4 0 V() 4 0 V() 5 (4)EX600-ED5PWR INM12 4 A code PWR OUTM12 5 A code 1 24 V() 1 24 V() 2 0 V() 2 0 V() 3 24 V() 3 24 V() 4 0 V() 4 0 V() 5 -29No.EX-OMN0027CN-D 2 SI IP67 -30No.EX-OMN0027CN-D

(Voltage input: 1 to 5 V/Current input: 4 to 20 mA) Pressure switch/Flow switch can be displayed. B A is displayed for 1 V (or 4 mA). B is displayed for 5 V (or 20 mA). The range can be set as required. Display Select NPN or PNP A NPN PNP Voltage input 1 V 5 V Current input 4 mA 20 mA Analog output of 0 to 10 V is also available.

as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 73 Circulating Fluid Temperature Controller

JIS B2401 -4D-P28 JIS B2401 -4D-V85 AL-130H-V AL-129H-V AL-131H-V JIS B2401 -4D-P42 JIS B2401 -4D-V100 Hexagon socket head cap screw FH990AL-133H-V Relief valve AL-132H-V AL-134H-V Phosphoric ester JIS B2401 -4D-P60 JIS B2401 -4D-V120 Companion flange AL-135H-V AL-135H-V e Seal (O-ring) Case AL-136H-V AL-136H-V JIS B2401 -4D-P90 JIS B2401 -4D-V150 w O-ring AL-137H-V AL-137H-V FH991JIS B2401

H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.

H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.

Type Electrical entry Applicable load Load voltage Lead wire length (m) Indicator light Auto switch model Lead wire type Applicable size Wiring (Output) 5 (Z) DC AC 0.5 (Nil) 3 (L) None (N) 90 Parallel cord 5 V,12 V 5 V,12 V,24 V 5 V,12 V, 100 V 5 V,12 V, 24 V,100 V IC circuit Reed switch No Heavy-duty cord 90A 97 Parallel cord 2-wire 93A 100 V For 10 and 15 T99 Relay, 24 V Grommet

G59W G5PW K59W G5BA G59F 100 V Relay, PLC Grommet Reed switch Solid state switch PLC 100 V, 200 V Yes Relay, PLC 12 V PLC 24 V 2-wire 100 V Relay, PLC 200 V DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 24 V 5 V, 12 V Grommet 5 V, 12 V 12 V 100 V, 200 V 2-wire 3-wire (NPN) IC circuit Terminal conduit 12 V 2-wire Relay, PLC

G59W G5PW K59W G5BA G59F 100 V Relay, PLC Grommet Reed switch Solid state switch PLC 100 V, 200 V Yes Relay, PLC 12 V PLC 24 V 2-wire 100 V Relay, PLC 200 V DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 24 V 5 V, 12 V Grommet 5 V, 12 V 12 V 100 V, 200 V 2-wire 3-wire (NPN) IC circuit Terminal conduit 12 V 2-wire Relay, PLC

(10V/10pulse) CCW CCW 10[V] 10[V] 10[pulse] 10[pulse] 0 0 10[pulse] 10[pulse] 10[V] 10[V] CW CW A (124) (10V/1Mpulse) B (124) (10V/10Mpulse) CCW CCW 10[V] 10[V] 1M[pulse] 10M[pulse] 0 0 1M[pulse] 10M[pulse] 10[V] 10[V] CW CW 5 25 5 C (124) (10V/100Mpulse) D (3) CCW 10[V] 8[V] 100M[pulse] 0 100M[pulse] 400[V] 0 10[V] CW E 2(45) CCW 8[V] 0 8[V] CW 1. 2. () 3. 400V8V/800V 4. 5.

Connection of driver and servo motor The servo motor power supply terminals (U, V, W) of the driver should match in phase with the power input terminals (U, V, W) of the servo motor. Driver Servo amplifier Servo motor U U V V M W W The power supplied to the driver should not be connected to the servo motor power supply terminals (U, V, W).

-16 XL(A, C, H) [V]-25 XLD [V]-25 XL(F, G) [V]-16 XL(F, G) [V]-25 XLD [V]-40 XL [V]-40 XLD [V]-50 XL [V]-50 XLD [V]-63 XL [V]-63 XLD [V]-80 XL [V]-80 Construction No.

V V V V V V V 8E V V V V V V V V V V 11E V V V V V V V V V V 15E1 V V V V V V V V V V 1 When multiple options are combined, indicate symbols in alphabetical order.

1 to 5 V, 0 to 5 V 0 to 20 mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

1 to 5 V, 0 to 5 V 0 to 20 mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

PLC 100 V, 200 V Yes Yes 12 V Terminal conduit PLC 24 V 2-wire 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V 24 V Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) 2-wire 5 V, 12 V Terminal conduit 12 V Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.02 to 0.2 MPa V V V 1 0.02 to 0.4 MPa V V V 2 0.02 to 0.8 MPa V V V + ARM ARP e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR-A IR-A IR r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + IRV VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH t Port size SRP a