PFMC.eng

Only air, N2, are applicable. [ 25] 25 L/min (PFMC7501) End stop position Set value [P_1] [ H_1] Hysteresis of OUT1 [ 50] 50 L/min (PFMC7102) Hysteresis [H_1] 225o [ 100] 100 L/min (PFMC7202) Flow [L/min] Do not use the product in a place where static electricity is a problem.

PFxx-OMO0007CN

g 1 0.927= 20L/min 3 420 (1 atm)65R.H. 0 (1 atm) 4 mm PVC 1.14 mm AWG23 0.72 mm -36No.PF-OMO0007CN () a(L/min) b(L/min) PF2A710 A 1 10 PF2A750 B 5 50 PF2A711 C 10 100 PF2A721 D 20 200 PF2A751 E 50 500 -37No.PF-OMO0007CN PF2A710/750 PF2A711/721/751 -38No.PF-OMO0007CN ()ZS-37-A (L )ZS-37-B ZS-29-T -39No.PF-OMO0007CN NPN(1 ) + (15 V) NPN(1 ) + (420 mA) PNP(1 ) + (15 V) PNP(1 )

Digital Flow Switch (Remote type sensor unit)

PF2A521 D 20 200 PF2A551 E 50 500 Analogue output A B Voltage output 1 V 5 V Current output 4 mA 20 mA Rated flow range [L/min] Model Min.

HRX-OM-W058

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

Fieldbus system PROFIBUS DP compatible SI unit

Ignores excess current per unit for 100 msec after inrush. Disable Does not ignore excess current. Enable Ignores excess current.

AS-FPQ/AS-FPG

Metric sizes 6 8 10 12 ASS Flow rate l/min (ANR) Controlled 100 180 230 260 390 460 660 790 920 1580 1710 ASR (free) flow Effective area mm2 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Note) Flow rate values are at a pressure of 0.5MPa, and temperature of 20C.

Clean Regulator

400 200 300 100 200 300 400 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH3100-02 SRH3110-02 SRH3100-02 0.5 0.20 0.20 0.4 Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 0 100 200 300 400 0 2 4 6 400 100 200 300 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min SRH4000-03 SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure

2-Layer Soft Fluoropolymer Tubing

Fix one end and bend the loop gradually at 100 mm/min. Measure 2R when the tube breaks or is crushed.

Safety Speed Control Valve (SSC Valve) Series ASS

Cylinder extension speed: 100 mm/s Meter-out needle fully open 100 mm/s Return speed Solenoid valve (Reference) Recommended circuit for high return speed When low extension speed and high return speed are desired, the following circuit using 3-port is recommended. Exhaust port (EA) Supply port (P) Exhaust port (EB) Fig.

Air Cylinder Short Type Standard: Double Acting, Single Rod Series CM3 ø20, ø25, ø32, ø40 How to Order CM3 L 40 150 With auto switch CDM3 M9BW L 150 40 With auto switch (Built-in magnet) Number of auto switches Rod end thread Nil Mounting 2 pcs. Bo

V 100 V or less 100 V, 200 V 200 V or less 24 V or less IC circuit Grommet Relay, PLC 12 V Connector 2-wire 24 V IC circuit PLC Terminal conduit 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Solid state

Rotary Table: High Precision Type Vane Style Series MSUA Size: 1, 3, 7, 20 How to Order Connection port location Side ported Nil Bearing type Axial ported E High precision type A Available with side ported Free mount type only, when equipped with auto s

V 5 V, 12 V, 24 V, 100 V Heavy-duty cord Reed switch Parallel cord 100 V Heavy-duty cord 3-wire (NPN) 5 V, 12 V IC circuit Solid state switch Grommet 3-wire (PNP) 12 V MDSUA7 Relay, Connector Grommet Connector Grommet Connector Heavy-duty cord 2-wire 24 V MDSUA20 100 V PLC Reed switch 100 V IC circuit 48 V, 100 V 24 V or less Order example: MSUA20 single vane type (connection port side location

High Speed 2 Port Valve SX10 Series

(packaged together) 50 80 650 F 40 550 G 10 300 H 4 200 J Filter (IN port) 100 Nil Without lter F With lter Note) Note) Flow reduction rate 50 L/min: 5% or less 100 L/min: 5 to 10% 150 L/min: 10 to 15% 80 600 K 40 500 L 10 250 M 4 150 150 Specications Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 Type of actuation 2-position 2 port N.C.,

Compact Vacuum Ejector Series ZA How to Order Ejector Unit ZA1 1 07 K1 P1 5 L 0 1 Nozzle nominal size Vacuum (V) port 05 ø0.5 Part no. Symbol Applicable tubing O.D. 07 ø0.7 KJS23-M5 ø3.2 (Straight) 1 Solenoid valve combination (Refer to Table (1).) KJS04-

Symbol 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC With pressure sensor (0 to 101 kPa, accuracy 2% F.S.) With pressure sensor (0 to 101 kPa, accuracy 1% F.S.) With pressure sensor (100 to 100 kPa, accuracy 2% F.S.) With pressure sensor (100 to 100 kPa, accuracy 1% F.S.)

PSxx-OMR0001CN

kPa200 kPa) (41 ) ON (41 ) ON(OFF) (34 ) ON (NPN/PNP) (100 kPa200 kPa) (27 ) ISA3 2 -61No.PS-OMR0001CN-J 5 (100 kPa 200 kPa) 80 kPa 220 kPa () OUT1 (OUT1) 80 mA OFF, (14 kPa ) OFF 220 kPa () -20 kPa220 kPa (-20 kPa) [ON/OFF] [] [kPa] () -62No.PS-OMR0001CN-J Revision history A B C D E F [2018 3 ] G [2018 6 ] H [2019 9 ] I [2021 10 ] J [2022 6 ] 4-14-1, Sotokanda, Chiyoda-ku

Process Pump <Fluororesin Type> Series PA3000

0.3MPa 8 SUP = 0.5MPa 0.2MPa 0.2 0.2MPa SUP = 0.5MPa 6 0.4MPa 50 4 0.1 0.3MPa 2 0.2MPa 00 5 10 00 5 10 00 50 100 Flow rate (l/min) Air consumption (l/min [ANR]) Operating cycle (Hz) PAP3313-T11: Flow rate characteristics (5Hz)* PAP3313-T11: Flow rate characteristics (2.5Hz)* PAP3310-T11: Flow rate characteristics 0.5 0.5 0.5 Discharge pressure (MPa) Discharge pressure (MPa) SUP = 0.5MPa

Heatless Air Dryer Series ID

Maintenance Caution Model A B C D E Mounting dimension J H L K G F Port size Nominal size (B) ID200 240 240 320 320 1.

IN20267

TYPE Class Instance Attribute Size Description Output 100 100 3 1 INT Position set-point Input 150 150 3 2 INT 2 bytes measured position, 2 bytes diagnostics Figure 16-1 Explicit Messaging 41 - IN20267 Installation and Handling 17. Air supply 17.1. Use clean air.

Heatless Air Dryer Series ID 1

Maintenance Caution Model A B C D E Mounting dimension J H L K G F Port size Nominal size (B) ID200 240 240 320 320 1.

Magnet: D (Built-in), Mounting: G (Head Flange), Bore Size: 25mm, Stroke: 100mm, Rod End Thread: Male Thread, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: C (Auto Switch Mounting Bracket)

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: 32mm, Stroke: 100mm, Rod End Thread: Male Thread, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: C (Auto Switch Mounting Bracket)