SMC Corporation of America
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Flapper Diaphragm(A) Fixed orifice Diaphragm(B) IN Nozzle BLEED BLEED Exhaust valve Diaphragm(C ) SUP. passage SUP OUT Main valve Valve guide Adjusting spring N/m Fi xed ori f i ce Screw displ m S UP For ce N Fo rce N Nozzle flapper MPa/ m Diaph.(B) m2 Main valve MPa/ m (S) 1 1 Daiph (A) m2 press Press Press. Displ m Displ m spring Compd. spring Compd.

B C D E Model no. E [Tightening torque] L[]ZC[]5[] 16 20 15.5 52.5 L[]ZC[]3[] 12 20 8 37 Model no. A B C D L[]ZC[]5[] M10 x 1.25 x 12 deep [24.5Nm] L[]ZC[]3[] M6 x 1.0 x 8 deep [5.2Nm] Model no.

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

DO NOT k i id hi d l h b i d HRX-OM-O021 Chapter 1 Safety Instructions 1.3.4 Locations of Hazard Labels There are various warning labels on the product to show the potential hazards.

Resolution 0.1mm/pulse Accuracy 0.2mm Note 1) Output Type Open Collector (30V, 50mA) Output signal Phase A & B with Differential Output Max.

If air pressure is applied from the B port side, the shaft rotates counterclockwise.

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

Description Material PBT Brass Brass Note) Handle Needle Lock nut Needle guide Washer O-ring Silencer Silencer cover Body B Gasket q w e r t y u i o !

Note 2) JIS B 8370: General Rules for Pneumatic Equipment Warning 1. The compatibility of pneumatic equipment is the responsibility of the person who designs the pneumatic system or decides its specifications.

8370: JIS B 8361: JIS B 9960-1: 1 JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2- / 1 1.5 *3) *3) 1 1 () 3- IR3000 (1) 0.2%F.S (IR3000:F.S.=0.2MPa,IR3010:F.S.=0.4MPa,IR3020:F.S.=0.8MPa) ) F.S. (2) (3) (4) 0.010.8MPa IR3000 IR3010 IR3020 [MPa] MAX. 1.0 [MPa] () 0.1 [MPa] 0.010.2 0.010.4 0.010.8 0.2% 0.5% 11.5l /min(ANR) [1.0MPa ] -560 Rc1/4,3/8,1/2 Rc1/8 [2 ] 0.64 (1

Pi n assi gn of bus adapt or si de connect or I t em Pi n assi gn I t em Socket assi gn SLD SLD 4 4 3 D B D B CCLi nk I N CCLi nk O U T 3 2 5 D G D G D A 1 2 D A N . C.

Note 2) JIS B 8370: General Rules for Pneumatic Equipment Warning 1. The compatibility of pneumatic equipment is the responsibility of the person who designs the pneumatic system or decides its specifications.

A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

Color of lead wire Black Symbol Contact C Z I SE3 Common A White Normally Open B (N.C.) B PS Red Normally Closed IFW50--55/56 Z I SE1 2 ZSP e Color of lead wire Black Symbol Contact q Power supply (Common) ISA2 w Red Terminal (Relay terminal) w 24 VDC Blue e Power supply (Light terminal) IS N.O.

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

Changing between Rod Extended when Energized and Rod Retracted when Energized How to change Rod extends when energized, and air is supplied to port A, and exhausted through port B. Rod retracts when energized, and air is supplied to port B and exhausted through port A. 10 2-6. Allowable kinetic energy W a r n i n g Use the actuator with allowable kinetic energy (Table 4) or less.

Flow Characteristics With DIN terminal block With terminal block Port size Flow characteristics 2 3 (A R) b Cv C [dm 3/(sbar)] 1 2 (P A) b Cv C [dm 3/(sbar)] 26 38 0.38 0.30 7.0 9.8 27 38 0.37 0.32 7.4 9.8 27 40 0.36 0.22 7.3 9.8 25 40 0.37 0.20 6.8 9.6 2 1 (A P) b Cv C [dm 3/(sbar)] 3 2 (R A) b Cv C [dm 3/(sbar)] 1/2 3/4 Port size Effective area (mm2) 2 3 (A R) 1 2 (P A) 235

Flow Characteristics With DIN terminal block Port size Flow characteristics With terminal block 1 2 (P A) b Cv C [dm 3/(sbar)] 2 3 (A R) b Cv C [dm 3/(sbar)] 2 1 (A P) b Cv C [dm 3/(sbar)] 3 2 (R A) b Cv C [dm 3/(sbar)] 1/2 3/4 26 38 0.38 0.30 7.0 9.8 27 38 0.37 0.32 7.4 9.8 27 40 0.36 0.22 7.3 9.8 25 40 0.37 0.20 6.8 9.6 Port size Effective area (mm2) 2 3 (A R) 1 2 (P A) Ground

D E L 4-H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) A B C D E F G H J L Valve model Bracket part no.