Compact

q . r. lksi : Screw LXFH5BC 30 Ball t : : t l : . : : : : : t : i : : t : i ' . serie!: LXF: LXFH5BD 30 Screw LXFH5SA 30 Slide LXFH5SB 20 I LXP82BC 60 50 220 Linear ball bearing LXP82BD 60 50 90 Ball Screw 60 50 160 6 0 ' .

pa

Rectifying device Rectifying device ZNR ZNR 1 (+, ) Series VQ20/30 1 Grommet Black () DC SOL. SOL.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

to 10 30 to 10 30 to 10 22.5 to 10 Angular gripper 180 opening/closing 88 to 5 54 to 6 58 to 5 41 to 5 30 to 4 Note) The operating range for grippers is measured when both ends are open.

KR

30 29.5 30 32 15.2 18.5 8 14 Applicable tubing 40 49 14 21 27 20.3 31 18.5 20.6 10 Connection thread (With seal) 63 22 39 30.8 34 25.2 17 1 2 KRV12-04S 20.9 33.5 80 12 Reference dimensions after R thread installation.

Pilot Operated

30 35 19.5 19.5 22.5 34 43 47 29 37 43 14 17 20 3.5 4.5 4.5 28 35 42 63 80 90 44.5 51.5 60 104 (110.5) 24 29 33 71.5 78 92 115.5 (122) 133 (140.5) ( ) denotes the value for N.O.

Number Description PPMW-701-30-FM-B80 N.C., 30 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-30-FM-P80 N.C., 30 PSI, Flush Mount, Polysulfone 1/16" ID Barbed Fitting PPMW-701-30-FM-P85 N.C., 30 PSI, Flush Mount, Polysulfone 1/8" ID

Number Description PPMW-701-30-FM-B80 N.C., 30 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-30-FM-P80 N.C., 30 PSI, Flush Mount, Polysulfone 1/16" ID Barbed Fitting PPMW-701-30-FM-P85 N.C., 30 PSI, Flush Mount, Polysulfone 1/8" ID

Number Description PPMW-701-30-FM-B80 N.C., 30 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-30-FM-P80 N.C., 30 PSI, Flush Mount, Polysulfone 1/16" ID Barbed Fitting PPMW-701-30-FM-P85 N.C., 30 PSI, Flush Mount, Polysulfone 1/8" ID

Number Description PPMW-701-30-FM-B80 N.C., 30 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-30-FM-P80 N.C., 30 PSI, Flush Mount, Polysulfone 1/16" ID Barbed Fitting PPMW-701-30-FM-P85 N.C., 30 PSI, Flush Mount, Polysulfone 1/8" ID

Number Description PPMW-701-30-FM-B80 N.C., 30 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-30-FM-P80 N.C., 30 PSI, Flush Mount, Polysulfone 1/16" ID Barbed Fitting PPMW-701-30-FM-P85 N.C., 30 PSI, Flush Mount, Polysulfone 1/8" ID

Number Description PPMW-701-30-FM-B80 N.C., 30 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-30-FM-P80 N.C., 30 PSI, Flush Mount, Polysulfone 1/16" ID Barbed Fitting PPMW-701-30-FM-P85 N.C., 30 PSI, Flush Mount, Polysulfone 1/8" ID

IDX-OM-M050

When the IDF100F-30 is provided with options C, R and V and specified to have the ventilation direction to the right side, the part number will be IDF100F-30-CRV1. NIL IDF 100 F 30 NIL C 1 K 2 Size P 3 Air compressor size Note) 100kW 125kW 150kW Note) The value is referential. Confirm the capability of the compressor used.

Line filter

P A B C D E G J M N Q R S T U V W AFF20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AFF30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AFF40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl drain Auto Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with

Mist Separator

P A B C D E G J M N Q R S T U V W AM20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AM30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AM40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl Auto drain Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with level

Micro Mist Separator

Standard specifications Bracket mount Indicator mount P A B C D E G J M N Q R S T U V W AMD20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AMD30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AMD40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl Auto drain Semi-standard

Round Type Low Pressure Hydraulic Cylinder Series CH
M

H G I J K L A B C D E F M R Size Tolerance +0.058 0 -0.1 -0.2 -0.1 -0.2 -0.1 -0.3 -0.1 -0.3 AD-FI-20 AD-FI-25 AD-FI-32 AD-FI-40 +0.027 0 +0.027 0 +0.027 0 +0.027 0 9 9 16 16 36 38 55 55 16 18 22 22 9 9 12 12 20 25 32 40 10 10 15.5 15.5 20 20 24 24 14 14 20 20 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 46 46 56 64 28 30 40 43 60 60 80 88 22 22 30 30 16 16 16 24 10 10 12 12 30 30

MXW Series Long Stroke Slide Table

) 5H9 +0.03 depth 4.5 0 6 38 5 22 12 Y Y 25 40 84 L 10 13 13 K A 30 24 15.8 A Z NN-M4 x 0.7 thread depth 8 Bottom through hole 3.3 (N-1) x H G N-M4 x 0.7 thread depth GG HH H 6 depth 4.5 5H9 +0.03 Bottom through hole 3.3 0 5H9 +0.03depth 4.5 0 F E G F E Model HH H GG J Z N L K NN 64 106 71 MXW875 30 19 92 228 5 45 31 1 98 112 106 MXW8100 32 34 115 278 5 70 56 1 121 144 129 MXW8125 32 32

2 Phase Stepper Motor/Without Motor Brake Series LXS

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 10kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 150 100 50 10 1 150 100 50 10 1 10 10 15.1 10.1 5.1 1.1 0.2 15.1 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 20 7.6 5.1 2.6 0.6 0.1 7.6 5.1 2.6 0.6 0.1 30 30 5.1 3.4 1.7 0.4 0.1 5.1 3.4 1.7 0.4

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Indicator Valve size 16 25 40 50 Without XLFV16-30-1-2 XLFV25-30-1-2 XLFV40-30-1-2 XLFV50-30-1-2 With XLFV16A-30-1-2 XLFV25A-30-1-2 XLFV40A-30-1-2 XLFV50A-30-1-2 Indicator Valve size 63 80 Without XLFV63-30-1-2 XLFV80-30-1-2 With XLFV63A-30-1-2 XLFV80A-30-1-2 Note 1) Add the seal material symbol shown on page 8 at the suffix of the model number.

Step Motor Controller

Refer to page 30 for the noise filter set. Refer to the LECA Operation Manual for installation.