Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Without connector With lead wire M plug connector Without lead wire Without connector How to Order Pilot Valve Assembly SYJ 40 VF3 1 1 D Z 1 K VQZ Type of actuation VP 1 2 Single (X81) Double (X80) Light/Surge voltage suppressor VG AC DC Without light/surge voltage suppressor Nil Note 1) Electrical entry K High pressure type Pressure specification VP3 VP3 Grommet Conduit terminal L plug

EXxx-OMO0027

End plate: Connected at EX600 Manifolds D side, incorporating the power supply connection. Solenoid valve manifold: An assembly of solenoid valves.

4-channel Flow Monitor (Remote type monitor unit)

D: Contents are added. E: Contents revised in several places. [July 2018] F: Contents revised in several places.

Air cylinder

D-M9NAM9PAM9BAM9NAM9PAVM9BAV (2) Make sure that auto switch mounting band is not slanted.

Air cylinder

D-M9NAM9PAM9BAM9NAM9PAVM9BAV (2) Make sure that auto switch mounting band is not slanted.

Quick Exhaust Valve Series AQ 1

Applicable tubing O.D. d Weight (g) D1 39.2 M1 L3 12.9 M2 M1 12.9 L2 14.3 L4 12.9 L1 5.2 D2 39.2 L3 23.5 Weight (g) D1 10.0 L2 13.7 L1 5.2 Model Tubing O.D. d AQ240F-04-00 Model Tubing O.D. d AQ240F-04-04 6 4 9.3 5 4 9.3 AQ240F-06-00 AQ240F-06-06 13.7 13.7 15.4 6.2 13.7 26.7 40.7 8 10.0 14.7 6 11.6 6 6 11.6 6.2 40.7 AQ340F-06-00 AQ340F-06-06 13.7 19.5 13.7 13.7 6.3 44.8 31.7 13 19.6 11.8

Polyurethane Coil Tubing Series TCU

Model Model L D L D TCU0805-1-N-X6 TCU0425-1-N-X6 1 N x 8 31 3 to 90 L x 5.2 + 200 N x 4 18 1 3 to 90 L x 5.9 + 200 8 5 TCU0805-2-N-X6 TCU0425-2-N-X6 2 42 L x 3 + 200 3 to 40 N x 16 L x 4.4 + 200 N x 8 2 3 to 90 4 2.5 28 TCU1065-1-N-X6 TCU0425-3-N-X6 52 1 3 to 45 L x 5 + 200 N x 10 N x 12 3 3 to 63 L x 2.9 + 200 28 10 6.5 TCU1065-2-N-X6 TCU0604-1-N-X6 2 3 to 35 52 L x 3 + 200 N x 20 L x 5.3

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

mA, 20 mA IC circuit, Relay, PLC No Reed auto switch D-A90 D-M9B, D-F8B D-M9N, D-F8N 2-wire 3-wire 24 VDC relay, PLC 24 VDC relay, PLC Solid state auto switch Yes 24 VDC (10 to 28 VDC) 24 VDC (4.5 to 28 VDC) Yes 2.5 to 40 mA 40 mA or less Refer to page 920 for the applicable auto switch list. 909

Heavy Duty Stopper Cylinder ø 50, ø 63, ø 80 RS2H Series

Cylinder stroke 30 40 30 mm (50, 63) Flange side Auto switch 40 mm (80) Nil Nil Without auto switch (Built-in magnet) Action D B T For applicable auto switches, refer to the table below. Auto switches are shipped together, (but not assembled).

Process Valve: 2 Port Valve For Compressed Air and Air-hydro Circuit Control VNA Series VNA 2 1 1 A A 1 0 15A 1 15A T Bracket (Valve size: 1/2/3/4.) Nil B Note) None With bracket Manual override Rated voltage 1 1 1 2 N.C. N.O. C.O. Port size Rc ø15 ø10 ø2

40 to 100 mm2/s Hydraulic fluid 40 to 100 mm2/s DIN terminal DIN terminal with light/surge voltage suppressor Caution CE-compliant This product cannot be used for water application.

AC Servo Motor Driver (MECHATROLINK-II type)

Troubleshooting . 40 7.1 Alarms List . 40 7.2 Warning List . 42 2 - LECYM Series / Driver Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Suction cups with flange

-45 2.2 3.5 6.0 9.0 14 22 36 -40 2.0 3.1 5.3 8.0 12 19 32 -6No.

Digital Pressure Switch ( compatible)

Nil (Rear piping) L (Bottom piping) Bracket A A1 ZS-46-A1 Bracket C A3 ZS-46-E B ZS-46-B Panel mount adapter E ZS-35-B D ZS-46-D Panel mount adapter + Front protective cover F ZS-35-E -9No.PS-OMX0002-A Accessories/Part numbers If an option is required independently, order with the following part numbers. Items Part No.

Electro-Pneumatic Valve NVEP/NVEF Series

pe: NVEF212O, NVEF312O toessureType: ItlVEP3lzO AO.27 " -0.45" I d 6.8 -1 1.smm') Flor Rate T!pe: NVEF213O Florir Rate Typei NVEF214O, NVEF314O Prassurc Type: NVEP814O Supply Exhaust t! UJ I 2-Forled \bBion DIMENSIONS A B c o E F G H J K M P R s T 1.57 (40) 2.52 (64) 2.20 (56) 1.77 (45) 4.80 (1221 1.97 {50} 0.98 (25) 1 . 1 0 (28) 0.51 (13) 4.45 (113) ?

Ionizer Nozzle type IZN10 Series IZS

Note 1) 20 16 17 Elbow for piping port/IZN10D B C 180 10 (mm) B Model C 16 D 11.5 IZN10-16 (mm) IZN10-17 (inch) 22 24.5 18.5 12 Female threads for piping (Rc1/8)/IZN10-11 16 Rc1/8 13 Width across flats 14 456 Ionizer IZN10 Series Dimensions L-bracket/IZN10-B1 IZS (Mounting angle adjustable range) 40 7.5 17 IZN IZN 2 x R10 3.4 2 x M3 2 x 3.4 IZF 25 40 5 ZVB 50 Internal mounting IZD IZE 20.5

AS-FPQ/AS-FPG

5 15-17-5 6 Series AS-FPQ/FPG Dimensions H (width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max. Min. Max. 1 2 Min.

ISO Cylinder: Standard Double Acting, Single/Double Rod Series C96 ø32, ø40, ø50, ø63, ø80, ø100, ø125

Nil S 3 n Auto switch 32 40 50 63 80 100 125 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm 125 mm Nil Without auto switch For applicable auto switch model, refer to the below table. Rod Single rod Double rod Nil W Stroke (mm) Refer to Standard Stroke on page 20.

Clean Tubing: Polyolefin Tubing Series TPH

(mm) 2.5 4 5 6.5 8 H White (W) D Black (B) Red (R) MS Blue (BU) T Yellow (Y) Green (G) VMG Air/Nitrogen gas/Water (Pure water) (1) Fluid Max. operating pressure (at 20C) 0.7 MPa (2) Min. bending radius (mm) 10 20 25 30 40 Burst pressure Refer to the burst pressure characteristics curve.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

3 Way,3 Port Solenoid Valve NVZ Series

(Ms) Tgpe 40 Manifold,/ Bottom Ported(External Pilot) inch (mm) Grommet (c), (H) (ln case ol lo-3zNorn, (M5)) L type plug connector(L) 13.78 (s50) 13.,13 (s41) r3.19 (35) Symbol (internal pilot tpe) N.C. N.O. slJrb s-zrJh P R P R w (external pilot type) N.C. N.O. A A , $TJ-b SZI;TF P R P B Model '.6NPTF 0.26 (130) 0 4 8 .,6. ].