Mounting: B (Through-hole/Both Ends Tapped Common, Basic), Bore Size: Ø40 mm, Port Thread: M thread: ø12 to ø25, Rc: 32 to 63, Clamp Stroke: 10 mm, Rotary Direction: L (Counterclockwise), Body Option: N (w/Arm)

Body Size: 40, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 3/8, Option: D + M, Attachment: Standard, Semi-Standard 1: Metal Bowl w/Level Gauge, Semi-Standard 2: Standard

Input Signal: Voltage Type 0 to 10 VDC, Monitor Output: Analog Output 1 to 5 VDC, Pipe Thread: NPT, Port Size: 1/4, Bracket: w/o Bracket, Cable Connector: Straight Type 3 m, Pressure Display Unit: psi

Input Signal: Voltage Type 0 to 10 VDC, Monitor Output: Analog Output 1 to 5 VDC, Pipe Thread: NPT, Port Size: 3/8, Bracket: w/o Bracket, Cable Connector: Straight Type 3 m, Pressure Display Unit: psi

Input Signal: Voltage Type 0 to 10 VDC, Monitor Output: Analog Output 1 to 5 VDC, Pipe Thread: NPT, Port Size: 1/4, Bracket: w/o Bracket, Cable Connector: Right Angle Type 3 m, Pressure Display Unit: -

Input Signal: Voltage Type 0 to 10 VDC, Monitor Output: Analog Output 1 to 5 VDC, Pipe Thread: Rc, Port Size: 3/8, Bracket: w/o Bracket, Cable Connector: Straight Type 3 m, Pressure Display Unit: psi

Body Size: 60, Back Flow: w/o Backflow, Thread: Rc, Port Size: 10 (1), Options: M (Round Type Pressure Gauge, w/Color Zone), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Bowl: 8 (Metal Bowl w/Level Gauge), Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa

Body Size: 60, Back Flow: w/o Backflow, Thread: N (NPT), Port Size: 10 (1), Options: M (Round Type Pressure Gauge, w/Color Zone), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: 8 (Metal Bowl w/Level Gauge), Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product

Accuracy: Basic Type, Size: 25, Motor Mounting: Top Mounting Position, Motor Type: T6 [AC Servo Motor, (Absolute Encoder), Output 100W], Lead: B [LEY25, 6mm; LEY32, 8(10)mm], Stroke: 200mm, Motor Option: w/o Lock, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped (Standard), Cable Type: w/o Cable, Cable Length: w/o Cable, Driver: w/o Driver, I/O Connector

Accuracy: Basic Type, Size: 32, Motor Mounting: Top Mounting Position, Motor Type: T7 [AC Servo Motor, (Absolute Encoder), Output 200W], Lead: B [LEY25, 6mm; LEY32, 8(10)mm], Stroke: 200mm, Motor Option: B (w/Lock), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped (Standard), Cable Type: w/o Cable, Cable Length: w/o Cable, Driver: w/o Driver, I/O Connector

Accuracy: Basic Type, Size: 32, Motor Mounting: Top Mounting Position, Motor Type: T7 [AC Servo Motor, (Absolute Encoder), Output 200W], Lead: B [LEY25, 6mm; LEY32, 8(10)mm], Stroke: 200mm, Motor Option: w/o Lock, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped (Standard), Cable Type: w/o Cable, Cable Length: w/o Cable, Driver: w/o Driver, I/O Connector

Body Size: 60, Back Flow: w/o Backflow, Thread: N (NPT), Port Size: 10 (1), Options: M (Round Type Pressure Gauge, w/Color Zone), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: R (Flow Direction: Right to Left), Drain Cock w/Barb Fitting: W (Drain Cock w/Barb Fitting), Pressure

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 DNil A B C Sealmaterial XSA 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Symbol Nil N1 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 1.3 x 10-10 (FKM) XVD Note 1) Values at ambient temperatures, excluding gas permeation.

Stations: 10 (10 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 10 (10 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: W (w/Flow Adj.

Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: None (Straight), Port Size: C6 (ø6), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only)

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: C8 (ø8), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only)

Body Size: 50 (Applicable to AC50/AC60), Handle Operation: Single Action, Thread Type: N (NPT), Port Size: 10 (1), Mounting: B (w/Bracket), Silencer: S (w/Built-in Silencer, EXH Port), Handle Color: K (Black), Handle Material: M (Metal), Flow Direction: Flow Direction: Left to Right), Unit: Z (Unit of Product Label: psi)

Body Size: 50 (Applicable to AC50/AC60), Handle Operation: Single Action, Thread Type: N (NPT), Port Size: 10 (1), Mounting: B (w/Bracket), Silencer: S (w/Built-in Silencer, EXH Port), Handle Color: Red, Handle Material: M (Metal), Flow Direction: Flow Direction: Left to Right), Unit: Z (Unit of Product Label: psi)

Body Size: 50 (Applicable to AC50/AC60), Handle Operation: W (Double Action), Thread Type: N (NPT), Port Size: 10 (1), Mounting: without Mounting Option, Silencer: S (w/Built-in Silencer, EXH Port), Handle Color: Red, Handle Material: M (Metal), Flow Direction: Flow Direction: Left to Right), Unit: Z (Unit of Product Label: psi)