E-P HYREG

VVEX2-2-5-02 VY1200-00-G 4 pcs.

Precision Regulator

Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate: 0 L/min (ANR) Back pressure: 0.5 MPa Supply pressure: 0.5 MPa IR2000-02 IR2000-02 IR2000-02 ARJ 0.204 0.5 0.2 AR425 to 935 Set pressure (MPa) Set pressure (MPa) Set pressure (MPa) Set pressure P2 (MPa) 0.4 0.202 Set point 0.15 ARX 0.3 0.200 AMR 0.1 0.2 0.198 ARM 0.05 0.1 0.196 ARP 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2 46.5 R3 28.6 7.1 Manual override (For C6, C8) M5 X 0.8 external pilot port 10.5 (Only external pilot style (R)) (For C10) (For 02) 38.5

SZ3000

External pilot LOCK FREE LOCK FREE Valve stations F: D-sub connector P: Flat ribbon cable connector (26 pins) Note Note Symbol 02 Stations Symbol 02 Stations 2 stations 2 stations Connector mounting position Double wiring specifications Double wiring specifications (1) 12 02 12 02 12 stations 12 stations Symbol D Mounting position 2 stations 2 stations D side Specified layout (2) (Up to 24

Modular Type Filter Regulator Series AW

Applicable model AW40-06 AW40 AW30 AW20 AW10 Accessory Bracket assembly Note 1) AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38NNote 6) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 6) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 6) AR10P-270AS AR10P-260S G27-10-R1 G27-10-R1 Note 3) AW20P-270AS AR20P-260S G36-10

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

10.5 Foot bracket 15.4 16.7 PE port P 1 3 R 1.5 A Rc(PT)1/8 R port Rc(PT)1/4 P port 2-3 Die cast hole For manifold gasket positioning DIN terminal (Y): VQZ3l2(R)-lYl-C6, C8, C10, 02 L plug connector (L): VQZ3l2(R)-lLl-C6, C8, C10, 02 88.5 89.5 300 (Lead wire) Indicator light 31.5 35 92.5 MAX.10 Pg.7 Applicable cord O.D.

Process Pump

For AIR EXH: AN20-02 (: Either Nil or N is entered as a thread symbol.)

Base Mounted Wiring: Plug-in w/D-sub Connector, U Side Mtg, Stations: 3 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 1/8, Thread: NPT, Control Unit: Air Release Valve,Filter Reg w/Manual Drain,Pressure Switch, Voltage Air Release Valve: 24VDC

Base Mounted Wiring: Plug-in w/Terminal Block, One-piece Junction Cover, Stations: 4 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 1/4, Thread: NPT, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch, Voltage Air Release Valve: 24VDC

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 2 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 1/4, Thread: NPT, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch, Voltage Air Release Valve: 24VDC

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 2 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 1/4, Thread: NPT, Control Unit: Filter Reg. w/Auto Drain, Blank Plates for Air Release Valves & Press. Sw., Voltage Air Release Valve: -

Base Mounted Wiring: Base Mounted Plug-in w/Multi-connector on D Side, Stations: 2 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: ø6 One-touch Fitting, Thread: Rc, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch, Voltage Air Release Valve: 24VDC

Base Mounted Wiring: Base Mounted Plug-in w/Multi-connector on D Side, Stations: 4 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: ø6 One-touch Fitting, Thread: Rc, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch, Voltage Air Release Valve: 24VDC

Base Mounted Wiring: Base Mounted Plug-in w/Multi-connector on D Side, Stations: 4 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: ø6 One-touch Fitting, Thread: Rc, Control Unit: Filter Reg. w/Manual Drain,Blank Plates for Air Release Valve&Press. Switch, Voltage Air Release Valve: -

Base Mounted Wiring: Plug-in w/Terminal Block, One-piece Junction Cover, Stations: 9 Stations, Passage: 4 [P(SUP): Common, E(EXH): Individual, Port A,B(CYL): Bottom], Port Size: 1/4, Thread: NPT, Control Unit: Air Release Valve, Voltage Air Release Valve: 100VAC 50/60HZ

Base Mounted Wiring: Plug-in w/Terminal Block, One-piece Junction Cover, Stations: 11 Stations, Passage: 4 [P(SUP): Common, E(EXH): Individual, Port A,B(CYL): Bottom], Port Size: 1/4, Thread: NPT, Control Unit: Air Release Valve, Voltage Air Release Valve: 100VAC 50/60HZ

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 3 Stations, Passage: 3 [P(SUP): Common, E(EXH): Individual, Port A,B(CYL): Side], Port Size: 1/4, Thread: NPT, Control Unit: Air Release Valve, Voltage Air Release Valve: 100VAC 50/60HZ

Base Mounted Wiring: Plug-in w/Terminal Block, One-piece Junction Cover, Stations: 9 Stations, Passage: 4 [P(SUP): Common, E(EXH): Individual, Port A,B(CYL): Bottom], Port Size: 1/8, Thread: NPT, Control Unit: Air Release Valve, Voltage Air Release Valve: 100VAC 50/60HZ

Base Mounted Wiring: Plug-in w/Terminal Block, One-piece Junction Cover, Stations: 11 Stations, Passage: 4 [P(SUP): Common, E(EXH): Individual, Port A,B(CYL): Bottom], Port Size: 1/8, Thread: NPT, Control Unit: Air Release Valve, Voltage Air Release Valve: 100VAC 50/60HZ

Base Mounted Wiring: Plug-in w/Terminal Block, One-piece Junction Cover, Stations: 3 Stations, Passage: 3 [P(SUP): Common, E(EXH): Individual, Port A,B(CYL): Side], Port Size: 1/4, Thread: NPT, Control Unit: Air Release Valve, Voltage Air Release Valve: 100VAC 50/60HZ