POWER CLAMP CYLINDER

When a 15 mm offset is selected, the metal cover and clamp arm will interfere and the lock cannot be released manually. 13 - Manual lock release 5 Be sure to confirm safety before manually releasing the lock, and only perform work while the air is exhausted.

CYBx-OM0001H

With floating joint 13 Internal Construction and Parts List A 14 Revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

A

42 3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111

70pvvna

Piping diameter VNA211A, CCVLO2 1/2B (13 mm) Skip valve VNA311A 3/4B (19 mm) VNA411A 1B (25 mm) Speed controller Stop valve 17-4-5 2 Series VNA How to Order Seal material Thread type Bracket (Valve size: 1/2/3/4.) A B C NBR seals FKM seals EPR seals Nil F N T Rc G NPT NPTF Nil B None With bracket (VN-16) :Valve size Note 1) Valve size 1 comes with NV1-A16 (with thread).

VNH

2 Refer to How to Order in page 17-4-32. Pilot solenoid valve 17-4-36

AS

Meter-out: Gray Meter-in: Light blue 23 3.2 Note 2) 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" ASR ASQ 04 4 06 6 08 8 10 10 12 12 16 16 Thread type Nil R N NPT Note 1) For selecting applicable tubing O.D., refer to the Model on page 554. Note 2) Use 1/8" tube. Port size 01 1/8 02 1/4 03 3/8 04 1/2 Made to Order (For details, refer to page 562.)

AS-FS

Note 1) Inch size Note 3) 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Metric size 23 3.2 Note 2) 04 4 06 6 08 8 10 10 12 12 16 16 Indicator window direction Elbow Universal Nil 0 Indicator window Note 1) For selecting applicable tubing O.D., refer to the Model on page 4. Note 2) Use 1/8" tubing.

AS-FG

Note1) Metric size Inch size Note 3) 23 3.2 Note 2) 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Stainless steel type (Stainless steel 303) 04 4 06 6 08 8 10 10 12 12 16 16 Note 1) The material can be visually identified by color of the release button. Stainless steel type: White Note 2) White is also used for inch size.

Membrane Air Dryer

Number of pages from 6 to 32. Edition D Added for 10, 600, 750, 1000 L/min [ANR]. Number of pages from 32 to 40. DT Edition C Added IDG

Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters, ZP PAD SIZE 32-50, VACUUM SERIES, ZP VACUUM PAD, VL, ZP PAD SIZE 32-50, 0.5984 lb

JXCx-OMU0024

Parameter setting . 32 (1) Exclusive parameter setting for the connected actuator . 32 (2) Change of controller and actuator settings . 35 (3) Electoronic gear ratio (It is necessary to set when the different lead actuators are connected) . 36 (4) Change of the parameter protect setting . 37 4.3 Step data setting . 38 (1) Step data setting . 38 (2) Saving or Loading the Step data . 40 4.4

Soft Start-up Valve AV2000/3000/4000/5000

42 3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

12 14 15 3H9 4H9 4H9 5H9 3H9 4H9 4H9 5H9 M5 x 0.8 19 24 28 33 3.5 4.5 4.5 5.5 3H9 4H9 4H9 5H9 27 36 39 45 32 43 48 55 M10 x 1.5 M5 x 0.8 M6 1 M10 x 1 M6 x 1 M10 x 1.5 Rc1/8 M6 1 M10 x 1 M6 x 1 M12 x 1.75 Rc1/8 M8 1.25 M14 x 1.5 M8 x 1.25 913

Digital Flow Switch

When window comparator mode is selected: Refer to page 32. When accumulated output mode is selected: Refer to page 33. When accumulated pulse output mode is selected: Refer to page 35. -30No.PF-OMP0002-H a. When hysteresis mode is selected Set value [P_1] or [n_1] and [the current set value] are displayed in turn. Press the or button to change the value. Press the button to set.

PFxx-OMP0001CN

ft 0.1 cfm 3 1 ft 3/pulse 1 ft 3/pulse 0.1 ft -0.918.6 cfm -1.837.1 cfm -3.674.2 cfm (-0.20.2 [ 0]) (-0.40.4 [ 0]) (-0.80.8 [ 0]) 3 0999,999,999 ft 0.1 cfm 3 1 ft -27No.PF-OMP0001CN-F [F 1] OUT1 OUT1 ( )OUT2 0 ON 0 OFF 0 ON 0 OFF -28No.PF-OMP0001CN-F ( )OUT2 3 3 3 3 3 3 ON OFF ON OFF OUT2 -29No.PF-OMP0001CN-F <>OUT1 [F 1] [F 1][oU1] [oU1][] [1ot][] 31 32

PFxx-OMS0001CN

cfm -1.837.1 cfm -3.674.2 cfm (-0.20.2 [ 0]) (-0.40.4 [ 0]) (-0.80.8 [ 0]) 3 0999,999,999 ft 0.1 cfm 3 1 ft -28No.PF-OMS0001CN-A [F 1] OUT1 OUT1 ( )OUT2 H_1(H_2) H_1(H_2) H1(H2) H1(H2) H1(H2) H1(H2) 0 ON 0 OFF () 0 ON 0 OFF () -29No.PF-OMS0001CN-A ( )OUT2 3 3 3 3 6 6 6 6 zhi chi ON OFF ON OFF OU2 -30No.PF-OMS0001CN-A <>OUT1 [F 1] [oUt1][()] [oU1] [] [1ot] [] 32

PFxx-OMU0002

Window comparator mode An operating mode in which the switch output is turned on and off depending on whether the flow is inside or outside the range of two set values 13 No.PF-OMU0002-D Mounting and Installation Mounting Never mount the product in a place that will be used as a mechanical during piping.

Digital Flow Switch (Integrated display type)

of initialize mode 22 Function selection mode 25 F_1 Input procedure of the Set value of instantaneous output 26 F_2 Input procedure of the Set value of instantaneous output (Auto-preset) 27 F_3 Input procedure of the Set value of accumulated output 28 Key-lock function 30 Maintenance 31 Troubleshooting 32 Cross-reference for troubleshooting 32 Error indication 34 Specification 35 Specifications

4-channel Flow Monitor (Remote type monitor unit)

No.PF-OMH0003-F PRODUCT NAME 4-channel Flow Monitor (Remote type monitor unit) MODEL / Series / Product Number PF2A20# PF2W20# PF2D20# Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 12 Definition and terminology 13 Mounting and Installation 15 Installation 15 Wiring 16 Outline of setting 19 List of outputs 20 Initialize mode 21 Default

Toggle Type Air Gripper

Tightening torque Tightening torque Model Screw (Nm) A M6 4.8 B M5 2.8 MHT2-32DZ C M8 12 A M6 4.8 B M6 4.8 MHT2-40DZ C M8 12 A M8 12 B M8 12 MHT2-50DZ C M10 24 A M10 24 B M10 24 MHT2-63DZ C M10 24 13 - 3-4. Construction / Parts list Components No.