TCU

Tube size (mm) Dimension of coil (mm) No. of tubes Max. operating length (m) L D Part No. 210 18 1 52 2 35 3 22 1 54 2 27 3 17 1 41 TCU0425B-1 TCU0425B-2 TCU0425B-3 TCU0604B-1 TCU0604B-2 TCU0604B-3 TCU0805B-1 1.5 4 2.5 280 28 265 1 2 5 tubes/ case 1.5 1 2 325 24 6 4 37 305 330 31 8 5 Dimensions are changeable due to material.

V100

Blank Plate Assembly Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Gasket Assembly Part no.: V100-31-1A Part no.: V100-77-1A (M2 x 14, flat nickel plated) Round head combination screw Place notch mark on the blank plate to 2 port side when assembling.

Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump Flow Rate: 1.08 CFM / 31 LPM , 1.08 CFM / 31 LPM, Max Pressure: 4 PSIG / 111 in H20 / 276 mbar , 4 PSIG / 111 in H20 / 276 mbar, Max Vacuum: 8 in HgV / -271 mbar , 8 in HgV / -271 mbar, Voltage (DC): 24, Item Dimensions: Length: 5 in / 127 mm Width: 4.6 in / 117 mm Height: 3.33 in / 85 mm

Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump Flow Rate: 1.08 CFM / 31 LPM , 1.08 CFM / 31 LPM, Max Pressure: 4 PSIG / 111 in H20 / 276 mbar , 4 PSIG / 111 in H20 / 276 mbar, Max Vacuum: 8 in HgV / -271 mbar , 8 in HgV / -271 mbar, Voltage (DC): 12, Item Dimensions: Length: 5 in / 127 mm Width: 4.6 in / 117 mm Height: 3.33 in / 85 mm

AIR SLIDE TABLE

29.7 42.7 42.7 28.7 67.7 67.7 A Stroke Stroke Model 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6B 18 7.4 7.4 7.4 7.4 7.4 3 13.6 13.6 19.6 36.6 13.6 MXQ8B 29 13.9 13.9 13.9 13.9 13.9 13.9 4 11.1 11.1 19.1 19.1 38.1 38.1 MXQ12B 16.5 16.5 16.5 16.5 16.5 16.5 16.5 16.5 26.1 20.1 20.1 27.1 27.1 33.1 52.1 52.1 MXQ16B 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 35 25 25 25 31

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQS ø 12, ø 16, ø 20, ø 25

Stroke range Stroke range Bore size Bore size Rod end male thread Long stroke 31 to 199 31 to 199 12, 16 12, 16 Rubber bumper Stroke range 51 to 199 51 to 199 20 20 Rubber bumper is standard equipment for long stroke type. 51 to 299 51 to 299 25 25 Part no.: CQSB25-47D-XB10 Makes 47 stroke tube. B dimension is 69.5 mm. Part no.: CQSB25-47D CQSB25-50D with 3 mm width spacer inside.

Non-rotating Double Power Cylinder Series MGZ

. @9, #4, #5, #6, #7, #8, #9, $0 Rod seal B 31 Piston seal Seal kits consist of items @9 and #4 to $0, and can be ordered by using the seal kit number corresponding to each bore size. Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed.

ZSE2/ISE2

31 9 600 (3000) 9 600 (3000) 42 13 40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 16-6-12 7 Compact Pressure Switch Series ZSE2/ISE2 01 T1 Dimensions: ISE2Grommet type: ISE2-15 01 T1 01 T1 Connector type: ISE2-15C Pressure setting trimmer Pressure setting trimmer L H SET L H SET 15 15 ZSE ISE Indicator light (Red) Indicator light (Red

VND

20 25 3 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 7 50 2 B Flange 17-4-38 3 Series VND Steam Valve: 2 Port Valve For Steam Model Port size Flow characteristics Weight (kg) Av x 10-5 Orifice size (mm) Model Rc Flange Note) VND10D-6A VND10D-8A VND10D-10A VND20D-10A VND20D-15A VND30D-20A VND40D-25A VND50D-32A VND50D-32F VND60D-40A VND60D-40F VND70D-50A VND70D-50F 1 8 1 4 26 28 31

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

VV4QD12-l) Lead wire length: 300mm 4-Rc(PT)1/8 (P, R port) Light 2-4.5 (Mounting hole) 57 50.5 5.3 5.3 52 0.6 1 3 P R 1 3 R P 30 17 6.5 15 7 10 P=11 0.5 0.5 2n-M5 (A, B port) L2 35 4 M5: M5 thread L1 38 42 M plug connector (M) Station 1 2 3 4 5 n D side U side Direct manual override (Non-locking) 24 15 43 L plug connector (L) n: Station Dimensions n L 11 12 13 14 15 16 17 18 19 28 20 39 31

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

The process and suction status can then be compared. 8 Diagnosis (flow rate) 0: OFF 1: ON 14 Fixed output 0: OFF 1: ON 15 Diagnosis (error) 0: OFF 1: ON 16 to 31 Measured flow rate value Signed 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Measured flow rate value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Error Fixed Reservation Flow rate Reservation

VCC

Rc1/4 RETURN(3) port M5 leakage detection port 30 19 11 23 Part number for sub-base VCC13-S02 02F [Rc1/4] [G1/4] 38.4 Sub-base material is aluminum + hard anodized containing PTFE. 70 0.5 to 2 650 Valve for Water and Chemical Base Fluids VCC Series Dimensions Manifold Pilot port C4: 4 One-touch fitting C6: 6 One-touch fitting G1/4 (RETURN port) G1/4 (IN port) VV2CC1 VVMCC1, VV3CC1 30 31

Compact Pressure Switch Series ZSE2 (For Vacuum)/ISE2 (For Positive Pressure)

31 9 600 (3000) 9 600 (3000) 42 13 40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 784 Compact Pressure Switch Series ZSE2/ISE2 01 T1 Dimensions: ISE2Connector type: ISE2-15C Grommet type: ISE2-15 01 T1 01 T1 Pressure setting trimmer Pressure setting trimmer L H SET L H SET 15 15 Indicator light (Red) Indicator light (Red) 20 20 600 (

® 3-Screen Display

Note Bracket A ZS-50-A Interchangeable with ISE70 With 2 mounting screws (M4 x 6L) Bracket B ZS-50-B With 2 mounting screws (M4 x 6L) Lead wire with M12 connector: Straight ZS-31-B Lead wire length: 5 m Lead wire with M12 connector: Right-angled ZS-31-C Lead wire length: 5 m 6

PSE57  Series Pressure Sensor for General Fluids

Adapter with restrictor Rc1/4 ZS-31-X175 1 pc. Adapter with restrictor Rc1/8 ZS-31-X188 1 pc. Assembly-type connector PCA-1557743 1 pc. Port size Symbol Port size Model PSE570 PSE573 PSE574 PSE575 PSE576 PSE577 01 R1/8 (with M5 female thread) 02 R1/4 (with M5 female thread) For pressure switch precautions and specic product precautions, refer to the Operation Manual on the SMC website.

PSE57  Series Pressure Sensor for General Fluids

Note q Lead wire and M12 connector (3 m), Straight ZS-37-A 1 pc. w Lead wire and M12 connector (3 m), Right angle ZS-37-B 1 pc. e Assembly-type connector PCA-1557743 1 pc. r Adapter with restrictor Rc1/4 ZS-31-X175 1 pc. t Adapter with restrictor Rc1/8 ZS-31-X188 1 pc. y Orice M5 ZS-48-A 1 pc. u q + e ZS-37-A-X448 The lead wire and connector are Nil Voltage output type 1 to 5 V 28 Current

Pilot Operated 2 Port Solenoid Valve For Dry Air Series VQ20/30 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Made to Order Specifications G: Grommet Oil-free specifications VQ2 31 1 A M X2 Y: DIN terminal Note) Please consult with SMC when using. Not available for manual operation. Seal material fluorine rubber specifications YO: DIN terminal without connector VQ2 31 1 A M X5 17-2-82

KS/KX

34 35 38 36.5 39.5 30 31 32 37.5 38 39.5 40.5 42 1 8 Applicable tubing M 17 15.2 26 18.5 6 1 4 3 8 1 4 3 8 1 2 3 8 1 2 8 17 21.6 14.9 Connection thread H 10 22 18.5 31.5 21 22 30.5 25.0 7 D 24 24 20.9 34 22 8 12 35.1 35.1 MS Reference dimensions after R thread installation.

3 Position Cylinder Series RZQ

D-A72/A7H D-A80H/A73C D-A80C/F7/J79 D-J79W/F7V D-J79C/F7W D-F7WV/F7BAL D-F7BAVL/F79F Auto switch model D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL D-A9 D-A9V D-A73 D-A80 D-A79W D-F7NTL D-P4DWL Bore size A B A B B A B A B A A A B B 32 40 50 63 36.5 26 30 40.5 27 37.5 27.5 38 32.5 43 24.5 35 42 30 34 46 31 43 31.5 43.5 36.5 48.5 28.5 40.5 27 39 43 32.5 36.5 47 33.5 44 34 44.5 39 49.5 31 41.5 29.5

Air Cylinder/Standard Type: Lube, Non-lube Type, Air-hydro Type Series CS1 Lube, Non-lube Type: Air-hydro Type:

Rod seal CS1-180A-PS Piston seal CS1-200A-PS 24, 29 and 31 are non-replaceable parts, so they are not included in the seal kit.