Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

(P) (R2) 3 1 5 (R1) 1 (P) 5 (R1) (R2) 3 e q w r e q w r 4 (B) 2 (A) (B) (A) 4 2 VQ4300 VQ4301 3 1 (P) (R1) (R2) 3 5 1 (P) 5 (R1) (R2) (B) (A) 4 2 4 (B) 2 (A) VQ4400 VQ4401 1 (P) (R1) (R2) 3 5 1 (P) 5 (R1) (R2) 3 (A) 4 2 (B) 4 (B) 2 (A) VQ4500 VQ4501 1 (P) 5 (R1) (R2) 3 1 (P) (R1) (R2) 3 5 Component Parts Component Parts Description Material Note Number Body Spool/Sleeve Piston Description

JXCx-OMT0002

Note 1) For CIR-R and CIR-L, Axis 1 and 2 are based on interpolation.

HRX-OM-Y120

Both ends of the communication connection (the end nodes) need to be connected to the higher level computer. 2 2 R D R D 3 3 S D S D 5 5 S G S G Controller Master This product Do not connect any wire to other PIN numbers.

Title not found

(n-2) Same 5s+50(n-2) n=1,2,3,4,, 75+so(n-2) n=2,4,6,8.., B0+50(n-2) 1=2,4,6,4... s0+50(n-2) n=2.4.6.8... with 1 1 0 80 90 40 rr3.5 49 55.5 42 50 B I (O) 10(6.5 7 1 . 5 84.1 92.5 't!

Direct Operated

3 r r !4 q q Port 1 (N.C. IN) (N.O. EXH) o Port 2 (N.C. OUT) (N.O. OUT) !0 o !1 !1 !2 Port 3 (N.C. EXH) (N.O. IN) Port 2 (N.C. OUT) (N.O. OUT) !0 !2 Component Parts Component Parts Material Material No. Description No.

rep-modular-e

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Large Size Vacuum Module: Series ZR

X, Y, Z directions, for 2 hours each 2% F.S.

60

Model Valve Model Nil 2 1 2 3 VXK21ll VXK22ll VXK23ll 1 2 3 4 7 8 J Nil 2 1 2 3 VXK21ll VXK22ll VXK23ll N.C. N.O.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,

AWM20 to AWM40

C4SF Note 2) C2SF Polycarbonate 7 Bowl assembly Note 1) Note 2) Including O-ring.

AWM20 to AWM40

C4SF Note 2) C2SF Polycarbonate 7 Bowl assembly Note 1) Note 2) Including O-ring.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

(Use P/A tube cutter TK-1, TK-2 or TK-3.) Then push the tube in until it comes to a dead end and tighten nut by hand. 1 2 96 Series KF Insert Fittings Male connector: KFH Applicable tube (mm) A Effective orifice (mm 2) H1 (Hex.) H2 (Hex.) Thread R(PT) Weight (g) L2 M d L1 Part No. O.D.

4/5 Port Air Operated Valve SYJA3000 Series

(P) 3(R) 1 (P) (R)3 5(R) How to Order Manifold Base 2 position double 2 position double 4(A) (B)2 4(A) (B)2 Same manifolds as SYJ3000 series are prepared. 5(R) 1 (P) (R)3 3(R) 1 (P) SS5YJA3 Fill the same as SS5YJ3 (Refer to page 166.) 3 position closed center 3 position closed center 4(A) (B)2 4(A) (B)2 Instruct by specifying the valves and blanking plate assembly to be mounted on the manifold

CG5-S

R V Front flange type (F)/CG5FNS X165US inch rod option dimensional changes GA GB FT 2-Rc P H1 Width across flats B1 Dim.

Ｍ icro Mist Separator Regulator

AW-OMZ0062 PRODUCT NAME icro Mist Separator Regulator MODEL / Series / Product Number AWD20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWD30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWD40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3.

Mist Separator Regulator

AW-OMZ0061 PRODUCT NAME Mist Separator Regulator MODEL / Series / Product Number AWM20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWM30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWM40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3. Standard Specifications 9 4.

Basic Type/Direct Mount Type

2 r CY3R6 @3 @7 o u y t @8 !9 @2 18a CY3R10 2a 3a @0 !5 !6 @4 @9 @6 !0 i q !1 !4 !2 r @3 @7 @8 @5 o u y t !9 @2 18a CY3R15 to 63 !3 !0 !1 !4 !2 y r i q 2a 3a @0 @4 @9 @6 !5 !6 !9 @2 @3 @5 @8 @7 o u !7 t 18a CY3R15, 20 CY3R15 Component Parts No. Description Body End cover A End cover C End cover B End cover D Cylinder tube No.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

4-J Depth JK Thread depth PC (from counterbore surface) 2-P 2-Counterbore dia.

Low-Speed Rotary Actuator

Find the moment of inertia I for the rotation of shaft (B). r B 2. I is converted to the rotation of the shaft (A). B 2 r I = m2 2 b a I I = A B Number of teeth = b 5. Solid sphere Position of rotational axis: Through the center of diameter r 2 2 r I = m5 -27- Kinetic energy Table shows the allowable kinetic energy of the rotary actuator.