High Vacuum Angle Valve

Refer to Maintenance Parts on page 6 for further details regarding quantity and type.

IZx-OMX0087

Balance control selection mode . 4-4-6. Maintenance detection level selection mode . 4-4-7. Key-lock setting mode . 4-4-8. Ion generation stop mode . 4-5. Alarm functionIZT43 . 4-5-1. Alarms for IZT43 . 4-5-2. Details of the alarmsIZT43 . 4-6.Replacement of the assembly . 4-6-1. Replacement of the emitter cartridge . 4-6-2.

LA-OMP0023

Common Precautions for wiring and cables . 28 6. Troubleshooting . 29 6. 1 Operation troubles . 29 6. 2 Position / Speed / Thrust troubles. 30 2 - LAT3 Series/Card Motor 1. Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

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Typ. 1 5 16 H-6 11 T-6-L6-6 IM6-L6-6-L6 Page 3 Distributed by Power Aire, Inc. www.poweraire.com sales@poweraire.com Tube to Tube Fittings Distributed by Power Aire, Inc.

ASR

6 !7 @1 !0 !9 !6 !7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

FILTER REGULATOR

Port thread Rc Rc AD27-C-A AD27-A G G External NPT AD27(-Z)-A NPT AD27-C(Z)-A appearance B B drawing and Semi-standard 6 Semi-standard 6C part no. Port thread Part no. Part no. Port thread Rc Rc AD27-6-A AD27-6C-A G G NPT AD27-6(Z)-A NPT AD27-6C(Z)-A M50.8 M50.8 12 Option Note2 Semi-standard Semi-standard 2 Part no.

New

VXFA2 A<6 t t y r r w w e e q q Component Parts Component Parts No.

10

6 r RJ10, 14, 2015, 2725 w i !2 r !3 !1 q e t y u o !0 !6 Component Parts No. Material Treatment Description No.

Table of Contents - Tubing

Model 6 Size: nominal size X length Number of pieces 8 12 4 6 8 10 12 TM-04 TM-06 TM-08 TM-10 TM-12 2 X 6 2.6 X 8 4 3 X 8 Tube Release Tool Series TG To remove tube in a confined space or from manifolded one-touch fittings.

AW

C4SF-J C4SF-W C4SF-6 AD47-6 AD48-6 C4SF-6J C4SF-6W C4SF-2 AD47-2 AD48-2 C4SF-2J C4LF-8 AD47-8 AD48-8 C4LF-8J C1SF-6 AD17-6 C1SF-2 AD17-2 C2SF-C AD27-C C2SF-J C2SF-CJ C2SF-6 C2SF-6C AD27-6 AD27-6C C2SF-6J C2SF-6CJ C2SF-2 AD27-2 C2SF-2J C3SF-J C3SF-W C3SF-6 AD37-6 AD38-6 C3SF-6J C3SF-6W C3SF-2 AD37-2 AD38-2 C3SF-2J C3LF-8 AD37-8 AD38-8 C3LF-8J Polycarbonate Nylon Metal Metal bowl

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Thread type Nil F N T Rc G NPT NPTF Rated voltage DC AC (50/60 Hz) 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] A, B port size 01 C6 C8 N7 N9 1/8 One-touch fitting for 6 One-touch fitting for 8 Note) Do not remove the factory installed bracket from models with the bracket option.

Series AS-FM/AS-M/ASD-FM

Flow Rate and Effective Area Flow direction symbols on body AS2001FM Model AS1001FM AS2051FM 8 3.2, 4, 6 6 6 4 Metric size JIS symbol 1/8", 5/32", 3/16" 1/4" Tube O.D.

MXW Series Long Stroke Slide Table

25 138 328 6 95 81 2 141 176 149 MXW8150 32 32 45 168 378 7 120 106 2 145 MXW Series Long Stroke Slide Table Dimensions MXW 12 Stroke: 50, 75 Operating port 2-M5 x 0.8 (mm) Width across hexagon socket hole 2.5 J 12 Scale: 30% 6.5 Width across flats 8 5H9 +0.03 depth 4.5 0 Operating port M5 x 0.8 Operation direction A 6-M4 x 0.7 thread depth 6 (Helisert) 6 (Plug : M-5P) 58 46 27 24 5 26

CLA

(0 0(0) 0(4.5) 3(8) 6 9.5) D-G5 3(0) 3(0) 7(3.5) 10(6 128.5 D-KS ~ Hs 38 43.5 SO.5 59 69.5 A 0{2) 0(2) 1(4.5 4(8 6(9.5 D-F59W 3(0) 3(0) 7.5(3.5) 10.56 12. 5(8. 5) D-J59W :; ~s 40 43.5 49 55.5 83 ~ Ht 31 42 35 so 57.5 24 Accessories Series eLA Dimensions Of Accessories I Type Single Knuckle Joint Y Type Double Knuckle Joint '!

reduces flow setting time

Model AS1ll1FS-M5l AS2ll1FS-01 AS2ll1FS-02 AS3ll1FS AS4ll1FS Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

100

6 !5 !1 !4 Component Parts No.

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

CRBB-OM00004

Hexagon socket set screw (1pc) 29 No. 6.

JXCx-OMT0028CN

JXC-OMT0028CN (GW)(EtherNet/IP) / LEC-GEN1 . 4 2. . 6 2.1 . 6 2.2 . 6 2.3 . 7 2.4 () . 8 (1) . 8 (2)GW . 8 (3)LEC . 8 (4)GW . 8 (5)GW . 8 (6) . 9 (7) . 9 3 . 10 3.1 . 10 3.2 . 12 3.3 . 13 (1)(LECGEN1) . 13 (2)DIN (LECGEN1D) . 13 3.4 . 14 (1) . 14 (2) . 14 4. . 15 4.1GW (B RATE) . 15 4.2 (CN2SW) . 16 4.3LEC . 16 4.4GW EtherNet/IP . 22 5. . 26 5.1 CN4 . 26 5.2 CN3 . 26 5.3

ML2B

1 r #6 @3 #9 @7 y u t !5 #8 #9 @7 w !6 e q #5 #4 $9 $1 $0 ^1 ^0 $7 $8 ^0 !2 #2 @4 !3 %0 %1 %2 !0 @2 ^3 @1 #3 ^6 $6 %3 @6 $5 ^2 %5 %6 @5 $4 ^0 $3 #1 ^5 %7 @8 $2 o %8 ^7 #0 %9 ML2BS %4 ^4 !