ZQ-OM01301

Note 3) (6) and (7) do not need to be selected. 7 - Doc. No.

High Vacuum Angle Valve, XL Series

Orifice mm Differential pressure MPa Port A Pa Internal Fitting External XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA3-32 XSA3-43 2 3 0.8 VCR 0.3 3 6 Direct solenoid operation (N.C.) 10-11 1.0 1/4 10 -6 10 -9 10 -11 P.32 to P.34 2 0.3 SWJ 4.5 11 10 -10 0.8 0.3 6 3/8 19 Differential Pressure: Indicates the maximum operable pressure difference between port P and port A.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Rated voltage 5 6 24 VDC 12 VDC Note 1) Light/surge voltage suppressor is built-in.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

6 !6 Component Parts Description Material Description Material No.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

6 !7 !

EXxx-OMO0027

Content of diagnosis 0 There is an error in Slot 0. 1 There is an error in Slot 1. 2 There is an error in Slot 2. 3 There is an error in Slot 3. 4 There is an error in Slot 4. 5 There is an error in Slot 5. 6 There is an error in Slot 6. 7 There is an error in Slot 7. Unit diagnosis byte1 Bit No.

HRX-OM-R028

Communication alarm function . 6-1 6.1 Communication alarm occurs .6-1 6.2 Communication alarm reset.6-2 6.3 Setting and checking.6-2 6.3.1 Setting and checking items.6-2 6.3.2 Setting and checking.6-3 HRSH Series HRX-OM-R028 Chapter 1 Read before using Chapter 1 Read before using The communication of this device consists of contact input/output communication and serial communication.

CJP2-OM0002K

Part number of auto switchD-A9D-A9V Unitmm B A (When detecting retracted stroke end) H H 1 H 2 3 (When detecting extended stroke end) 5st 10st 15st 20st 25st 30st 35st 40st 4 6 1 6 11 16 21 26 13.0 10.0 20.0 10 1 6 11 16 21 26 31 36 41 16.0 9.5 19.0 16 1 6 11 16 21 26 31 36 41 18.0 12.0 24.0 Part number of auto switchD-M9D-M9VD-M9WD-M9WV Unitmm B A (When detecting retracted stroke end) H

Electric Actuator Miniature Rod Type Miniature Slide table Type

Top mounting Front mounting Model Bolt Max. tightening Max.screw-in torque [Nm] depth [mm] LEPS6 M4X0.7 1.4 6 LEPS10 M4X0.7 1.4 6 Model Bolt Max. tightening Max.thread depth [mm] torque [Nm] LEPS6 M4X0.7 1.4 7 LEPS10 M4X0.7 1.4 8 40 - 6. When mounting the product, tighten the mounting screws within the specified torque range.

C95

6 !7 !8 !

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6

CE

6 Port joint Stainless steel Valve seal NBR 40 to 63 #6 !

Bernoulli Gripper

(Aluminum: 6.5 g, Stainless steel: 17.6 g) ZNC30 to 80: The weight value is for the basic type without a plug. *6 For pressure sensor details, refer to the PSE540 series in the Web Catalog and the Operation Manual. 6 ZNC Series Lifting Force ZNC20m ZNC30m ZNC40m 12 16 6 14 10 5 12 8 Lifting force [N] Lifting force [N] Lifting force [N] 4 10 6 8 3 6 4 2 4 2 1 2 0 0 0 0 0.6 0.5 0.4 0.3 0.2

CE

6 Port joint Stainless steel Valve seal NBR 40 to 63 #6 !

EXxx-OMU0020CN

US1 LED . 6-6 US1 LED US1 OFF US1 OFF , (17 V ) US1 (17 V 20.4 V) ON US1 ON 21.6 V 6.4.6. US2 LED . 6-7 US2 LED US2 OFF US2 OFF , (17 V ) US2 (17 V 21.6 V) ON US2 ON 22.8 V 49 No.EX-OMU0020CN 6.5.

LEC-OM032xx

Branch Branch N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 Shield Controller CN4 Controller CN4 Description Pin No. Description Pin No. EMG+ 1 EMG+ 1 EMG2 EMG2 SD+ 3 SD+ 3 SD4 SD4 EN_SW+ 5 EN_SW+ 5 ON 6 ON 6 DC24V 7 DC24V 7 GND 8 GND 8 Shield Shield 29 - 8.

Mist Separator

Semi-standard: 6 Piping port Piping port (4) Part No. (4) Part No. thread ty pe thread ty pe Rc C3SF-6J-A Rc C3SF-6-A G C3SFF-6J-A G NPT C3SFN-6J(Z)-A NPT C3SF-6(Z)-A Option symbol Semi-standard symbol W 6W Semi-standard: W Piping port (4) Part No. thread ty pe Rc C3SF-W-D G NPT C3SF-W(Z)-D Appearance and part No.

Air Filter

Semi-standard: 6 Semi-standard: 6C Piping port Piping port thread ty pe (5) Part No. thread ty pe (5) Part No. Rc Rc C2SF-6-A C2SF-6C-A G G NPT C2SF-6(Z)-A NPT C2SF-6C(Z)-A Option symbol Semi-standard symbol J 6J CJ 6CJ Semi-standard: J Semi-standard: CJ Piping port Piping port thread ty pe (5) Part No. thread ty pe (5) Part No.

CE

6 Port joint Stainless steel Valve seal NBR 40 to 63 #6 !

PSxx-OMT0001CN

0.4MPapsi 5 10 N 1 2 3 4 5 6 1 2 NPN2 PNP2 P 6 10 3 4 0.2MPapsi 0.2MPapsi 10 7 4 5 6 M SI 5 8 10 1 7 L 7 L N S 6 7 8 R 6 7 8 2 T 9 B -9No.PS-OMT0001CN-E 2 1F 2GH 3ISO1179-1 4 5kPa 61 7 8M12 9 10 11 12ISO16030 -10No.PS-OMT0001CN-E 2 / (2 2 2 1 ) ((3x8)3 ) ISA-16 ISA-14 2 ISA-16-2 3 ISA-16-3 4 ISA-16-4 5 ISA-16-5 6 ISA-16-6 ZS-31-B ZS-31-C 4 6 DIN ISA-