Digital Flow Switch

Monitor unit Monitor unit Monitor unit Monitor unit 3% F.S. (15 to 35C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 2% F.S. (15 to 35C) 5% F.S. (0 to 50C) (15 to 35C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) Repeatability 1% F.S.

Combination Cylinder

5 !6 !

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

L ISA-5-1 ISA-5-2 ISA-5-3 ISA-5-4 ISA-5-5 ISA-5-6 ISA-5-7 L 73.0 8 4.5 1.25 7.5 135.5 173.0 210.5 248.0 5.5 35 35 285.5 323.0 852 Pressure Sensor Controller Series PSE200/300 Function Details A Auto-shift function B Auto-preset function When there are large fluctuations in the supply pressure, the switch may fail to operate correctly.

Environment

Nil Without cable 2 2 5 5 A 10 !

IDG

to 55(3) (3) 5 to 50 Ambient temperature (C) 5 to 50 5 to 55 5 to 50 5 to 50 Outlet air atmospheric pressure dew point (C) Standard performance 15 Inlet air flow rate (l/min (ANR)) (4) 56 111 222 335 560 830 1110 665 28 Outlet air flow rate (l/min (ANR)) Purge air flow rate (l/min (ANR)) (5) 50 100 200 300 500 600 750 1000 25 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

JXCx-OMT0005CN

No.1 (2)(5)(10)(13) DRIVE No.

Fieldbus system PROFINET compatible SI Unit

Power connectors Pin Remarks 1 24 V (US1) 2 0 V (US1) 3 24 V (US2) 4 0 V (US2) 5 FE View of Push Pull connector (XD1/XD2) Fig. 3-6 Pin allocation of Push Pull connector (24 Volt) for EX245-SPN1A/SPN2A Pin Remarks 1 0 V (US2) 2 0 V (US1) 3 FE 4 24 V (US1) 5 24 V (US2) View of 7/8 inch 5 pins plug connector (XD1) View of 7/8 inch 5 pins socket connector (XD2) Fig. 3-7 Pin allocation of 7/8

CM2

SCM220A, #5, #19 CM2G25SCM225A, #5 SCM225A, #5, #19 CM2G32SCM232A, #5 SCM232A, #5, #19 CM2G40SCM240A, #5 SCM240A, #5, #19 The data shows auto switch equipped styles.

ALF400 to 900, ALT-5/-9

F L A N 5 1 . 3 ) 0 8 ( 9 3 . 9 ) 5 . 8 3 2 ( 3 7 . 1 ) 4 4 ( 2 / 1 8 / 3 4 / 1 6 0 N 0 0 4 F L A N 5 3 . 3 ) 5 8 ( 0 7 . 9 ) 5 . 6 4 2 ( 1 8 . 1 ) 6 4 ( 4 / 3 0 0 5 F L A N 4 5 . 3 ) 0 9 ( 3 6 . 1 1 ) 5 . 5 9 2 ( 9 8 . 1 ) 8 4 ( 1 4 / 3 0 0 6 F L A N 4 9 . 3 ) 0 0 1 ( 8 5 . 2 1 ) 5 . 9 1 3 ( 1 0 . 2 ) 1 5 ( 1 0 0 8 F L A N 4 9 . 3 ) 0 0 1 ( 3 3 . 3 1 ) 5 . 8 3 3 ( 2 3 . 2 ) 9 5 ( 2 /

Air Slide Table Series MXP

5 5 5 5 A A 3 3 3.5 3 3 MXH A B MXU Minimum Auto Switch Mounting Stroke Electrical entry from inside (mm) MXS B C Applicable auto switch model No. of auto switches mounted MXQ D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV MXF 1 pc. 2 pcs. 5 10 5 10 5 5 B D MXW MXJ Parallel electrical entry B A Auto Switch Mounting MXP MXY Caution MTS A D Auto Switch Mounting Tool Use the watchmakers screwdriver with

Clamp Cylinder with Lock

9 @0 #8 #1 @8 @2 r $0 #6 #5 $2 @6 @7 $5 !5 !0 !6 !2 $3 u $1 #9 y #3 @9 #0 !4 @4 @3 @5 @1 !7 e !1 $4 o i w q t 40 Extension locking (F) #3 @9 #0 !4 @2 #7 !8 #4 #1 !9 #8 @0 @8 #2 r $0 #5 #6 $2 @6 @7 !3 $5 !5 !0 !6 !2 $3 u $1 #9 y !7 e $6 $4 !

SZ3000

0 (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 4(A) 2(B) 5(EA) 1(P) 3(EB) i JIS symbol 2 position double 2 position double (A) 4 (B) 2 w e q r t y u o !0 5 (EA) 1 (P) 3 (EB) 4(A) JIS symbol 3 position closed center (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i 3 position exhaust center (A) 4 (B) 2 3 position closed center/exhaust center/pressure center 5 (EA) 1 (P) 3 (EB) w e q r t y u o !

HRL

Users equipment 2 1 2 Circulating fluid outlet Oscillator CH1 2 2 Circulating fluid return port 3 5 4 5 Circulating fluid outlet Optical system CH2 5 5 Circulating fluid return port No. Description Size Recommended part no.

energy saving effect

temperature 32C 25 25 Ambient temperature 43C Cooling capacity [kW] Cooling capacity [kW] 24 20 20 Facility water temperature 40C 15 15 Ambient temperature 45C 10 10 5 5 5 10 15 20 25 30 35 0 5 10 15 20 25 30 35 0 Circulating fluid temperature [C] Circulating fluid temperature [C] 170 Thermo-chiller Inverter Type HRSH Series If the product is used at altitude of 1000 m or higher, refer

CJP

NCM 6 3 Y-P006 I-P006 +0.040 0 0.020 0.045 +0.040 0 4 5 6 4 5 3 5 12 M3 x 0.5 3 5 12 M3 x 0.5 9 3.5 5 3.5 5 10 5 5 5 Y-P010 I-P010 +0.048 0 0.030 0.060 +0.048 0 8 6.3 10 10 6.3 7 5 7 10 16 M4 x 0.7 5 8 16 M4 x 0.7 13.6 NCA 5.5 6.5 5.5 6.5 12 6 6 6 Y-P015 I-P015 +0.048 0 0.030 0.060 +0.048 0 10 7.8 15 12 7.8 9 6 9 15 19 M5 x 0.8 6 10 19 M5 x 0.8 15.8 7 7 7 7 DKnuckle pin Trunnion pin -X Material

CJP

NCM 6 3 Y-P006 I-P006 +0.040 0 0.020 0.045 +0.040 0 4 5 6 4 5 3 5 12 M3 x 0.5 3 5 12 M3 x 0.5 9 3.5 5 3.5 5 10 5 5 5 Y-P010 I-P010 +0.048 0 0.030 0.060 +0.048 0 8 6.3 10 10 6.3 7 5 7 10 16 M4 x 0.7 5 8 16 M4 x 0.7 13.6 NCA 5.5 6.5 5.5 6.5 12 6 6 6 Y-P015 I-P015 +0.048 0 0.030 0.060 +0.048 0 10 7.8 15 12 7.8 9 6 9 15 19 M5 x 0.8 6 10 19 M5 x 0.8 15.8 7 7 7 7 DKnuckle pin Trunnion pin -X Material

Vacuum Unit Ejector / Vacuum Pump System

5 Not specified Not specified 100,000 5 +7 6 +10 -18No.

0.55

How to Order VP 3 4 4 5 G 1 A Base mounted Series Pilot type 3 5 7 VP300 VP500 VP700 Type of actuation A B N.C. (Normally closed) N.O.

44

O.D. 1/8" (3.18) 0.086" (2.18) KFG2H0122-00 7 1.1 8 21.8 5 1.5 8 2 x Applicable tubing H1 H2 H2 0.098" (2.5) 5/32" (4) KFG2H0325-00 7 1.6 8 21.8 5 1.8 8 d 1/4" (6.35) 5/32" (3.95) KFG2H0704-00 16 6 12 25.2 6 3.3 12 5/16" (8) 0.236" (6) M L M KFG2H0906-00 25 17 14 28.6 6.6 5.3 14 3/8" (9.53) 1/4" (6.35) KFG2H1163-00 45 19 17 33.6 7.6 5.6 17 1/2" (12.7) 3/8" (9.53) KFG2H1395-00 55 51 19 37

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Flow Rate and Sonic Conductance AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Metric size 3.2, 4, 6 10, 12 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 Tubing O.D. 1/8", 5/32" 1/8", 3/16", 1/4", 1/4", 5/16", 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Flow rate (L/min (ANR)) 180 230 100 260 390 660 790 460 920 1580 1710 Controlled