Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body; 316 SS; Poppet; 316 SS; Diaphragm: Hastelloy® C-22 ), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Gauge Port Extra Bottom; 5-Gauge Port Out)], Connections, Inlet: 6 (NPT 3/8 Inch), Connections, Outlet: 6 (NPT 3/8 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Presure Gauge, Connections: 1/4 Inch NPT), Gauge Port, Inlet: 0

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body; 316 SS; Poppet; 316 SS; Diaphragm: Hastelloy® C-22 ), Ports: 5PC [5 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 4-Gauge Port In, 5-Gauge Port Out)], Connections, Inlet: 6 (NPT 3/8 Inch), Connections, Outlet: 6 (NPT 3/8 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Presure Gauge, Connections: 1/4 Inch NPT), Gauge

Electric Actuators

3 0.5 3 3 3 N.O.

NCA1

A AA B BA C D DD E EA EE F FB G J R TF UF W WF Y LF P ZB 150 (1.5") 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 0.551 1/4-28 2 0.3 3/8 3/8 5/16 1.26 1.1 1.43 2 3/4 3 3/8 5/8 1 1.71 3 5/8 2.36 4 3/4 200 (2") 7/16-20 3/4 2.6 1 1/8 1 1/8 3/8 0.551 5/16-24 2.5 0.3 3/8 3/8 3/8 1.26 1.06 1.84 3 3/8 4 1/8 5/8 1 1.71 3 5/8 2.4 4 3/4 250 (2.5") 7/16-20 3/4 3.1 1 1/8 1 1/8 3/8 0.551 5/16-24 3 0 3/8 3/8 3/8 1.3

NCA1

4 2.02 1 1/8 1 1/8 3/8 9/16 0.3 3/8 3/8 5/8 5/16 1.26 1.1 1.43 2 3/4 3 3/8 1 1.71 2.36 4 3/4 3 5/8 MB1 200 (2") 5/8 2 1/2 7/16-20 3/4 2.6 1 1/8 1 1/8 3/8 9/16 0.3 3/8 3/8 5/8 3/8 1.26 1.06 1.84 3 3/8 4 1/8 1 1.71 2.4 4 3/4 3 5/8 250 (2.5") 5/8 3 7/16-20 3/4 3.1 1 1/8 1 1/8 3/8 9/16 0 3/8 3/8 5/8 3/8 1.3 1.06 2.19 3 7/8 4 5/8 1 1.75 2.48 4 7/8 3 3/4 325 (3.25") 1 3 3/4 3/4-16 1 1/8 3.9 1 1

Table of Contents

3 0.5 3 3 3 Proximity switch types Home position switch 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 2 wire 3 wire/NPN 3 wire/PNP 2 wire N.O.

NCQ2/CQ2

3, !

Fieldbus System

B: Locking type (Tool required) 2-position double (Metal) 4-position dual 3-port valve (B) 2(B) 4(A) 2(B) (A)4 Note) B (R1)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.O. N.O. 2 2-position double (Rubber) 4-position dual 3-port valve (C) 2(B) 4(A) 2(B) (A)4 C: Locking type (Manual) Note) C (R1)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.C.

EX120/121/122

ZS-28-CA-2 ZS-28-CA-2 ZS-28-CA-3 ZS-28-CA-2 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-4 ZS-28-CA-4 ZS-28-CA-4 SMC part no. Manufacturer's part no.

Compact Cylinder

Auto switch model Load voltage Lead wire length (m) Indicator light (N) Applicable load Pre-wired connector Type Special function Electrical entry Wiring (Output) None 0.5 1 (M) 3 (L) 5 (Z) DC AC Perpendicular In-line (Nil) M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV M9N M9P M9B M9NW M9PW M9BW M9NA IC circuit 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire

Electric Actuator

3 @3 !4 D 25 32 In-line motor type/LEY !6 u @3 #4 #3 When rod end male thread selected !0 #0 #1 #2 #1 @9 Component Parts No. Description Material Note No.

CQ2

3 !

Series KV2 Fittings

(g) Bag/Box Quantity Hex M D2 L1 L2 L3 A* 1/4 3/8** 1/2** 1/4** 3/8** 1/2** 3/8-18 3/8-18 3/8-18 3/8-18 3/8-18 3/8-18 3/8-18 3/8-18 3/8-18 Male Hex. Male Hex. Male Hex.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Note 3) For calculation on the longitudinal dimension of the intermediate strokes, refer to page 7-6-3.

A_HEC-OM-K001

. 3-2 3.2.3 Learning control function . 3-2 3.2.4 External sensor control function . 3-3 3.2.5 Temperature sensor fine control function . 3-3 3.2.6 Memorization of Set values function (Function that backs up with EEPROM) . 3-3 3.2.7 Temperature Upper / Lower Limit Alarm Function . 3-4 3.2.8 Communication Function. 3-4 3.2.9 Remote ON/OFF function. 3-5 3.2.10 Output cutoff Alarm Function

IDX-OM-W022

. 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 3 2 2 4 Drain Tube . 2 3 2 2 5 Electric wiring . 2 4 2 3 Cautions about Reinstallation . 2 6 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation .

IDX-OM-W031

2 2 Installation . 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping. 2 2 2 2 4 Drain Tube . 2 3 2 2 5 Electric Wiring . 2 4 2 3 Cautions for Reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation

IDX-OM-W013

. 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 3 2 2 4 Drain Tube . 2 3 2 2 5 Electric wiring . 2 4 2 3 Cautions about Reinstallation . 2 6 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation .

IDX-OM-W010

. 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 3 2 2 4 Drain Tube . 2 3 2 2 5 Electric wiring . 2 4 2 3 Cautions about Reinstallation . 2 6 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation .

IDX-OM-W023

i-2-3 . i-3 i-2-4 . i-3 i-2-5 . i-3 i-2-6 . i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6