Size/Valve Type: 5 (20A, N.C.), Body/Port/Orifice: J (Stainless Steel; Port 3/4;, Orifice 20), Voltage/Electrical Entry: J (110VAC, DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: A (G Thread)

IDX-OM-W029

K L2 N1 M P 13 4x H (911)[] 911)[] mm A B C D E F G H J K L M N P IDU22E R1 325 775 1153 93 445 1235 279 353 600 379 46 85 IDU37E R11/2 360 1258 64 550 1350 290 388 680 414 50 13 IDU55E 855 1345 1440 R2 470 53 530 360 36 500 75 700 526 IDU75E 1480 1575 70 IDU Series 6-2 GWP 6 2 IDX-OM-W029 6 6-4 IDU22E-23 IDU37E-23 GFCI For Option R GFCI R GFCI For Option R L N PE TB THR L N PE TB

VBA-OM-S001

No gap Booster regulator Air tank Booster regulator A B C D E F G H I J K L M Grooves There should be no damage or dust O-rings VBAT05A1 VBA10A VBA11A 150 374 370 307 163 160 100 200 Rc 3/8 257 60 Rc 1/4 20 Air tank There is a slight play on the diagonal parts.

VBA-OM-P018

Rc3/8 VBA1 OUT IN Rc1/2 Rc3/8 () OUT VBA1 12~14Nm(R1/4) VBA2 22~24Nm(R3/8) OUT O Rc1/4 O A B C D E F G H I J K L M O VBAT05A1 VBA10A VBA11A 150 374 370 307 163 160 100 200 Rc3/8 257 60 Rc1/4 20 VBA10A VBA11A 391 328 VBAT10A1 VBA20A VBA22A 170 522 454 417 367 170 180 120 312 Rc1/2 278 130 VBAT10A1-VBA2 IN OUT Rc3/8 39 VBA1 IN OUT IN IN OUT OUT VBAT10A 1 VBA2 VBA1 3NmM5

VBA-OM-S008

VBA11A 150 337 370 307 163 160 100 200 Rc 3/8 257 60 278 130 regulator A B C D E F G H I J K L M URL http://www.smcworld.com Rc 1/4 20 Rc 1/2 39 IN port Rc3/8 Rc 3/8 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3 5207 8249 Fax: +81 3 5298 5362 170 180 120 312 2008 SMC Corporation All Rights Reserved Assembly dimensions OUT port (J) Maintenance 411 IN port (I) Akihabara

VBA-OM-S006

K L M 278 130 39 Rc1/4 20 IN Rc3/8 Rc1/2 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer Rc3/8 OUT (J) 170 180 120 312 411 IN (I) 4-14-1 , Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN 417 367 VBA11A 391 328 Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 180 460 454 2010 SMC Corporation All Rights Reserve Rc1/4 URL http:/

VBA-OM-S009

OPERATION MANUAL VBAT-M47A AIR TANK Safety valve port Pressure gauge and safety valve set Applicable standards TSG R0003-2007 Supervision Regulation on Safety Technology for Simple Pressure Vessels OUT port Table 1 Specifications Model VBAT20S1-T-X104 VBAT38S1-T-X104 Hex. socket head plug Drain valve Tank mass 13kg 19kg Tank capacity 20 L 38 L Chinese Pressure Vessel Code Compliant Product

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

12 port side SOL (+) 3: COM () 4: 14 port side SOL (+) 5: Ground ZNR ZNR 4 2 2 4 5 DC: Double 3 3 Solenoid Valve (with M Connector) Comforming to ISO 15407-1 Series EVS1-01/1-02 Dimensions EVS1-01-FG-S-M0 117.5 75.5 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 14 4 2 12 12 26 35 45 14 Indicator light 5 1 3 Manual override 39 36.5 41.5 2-5.5 mounting holes 44 M12 connector 20

Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Valves: Provided, Allowable Kinetic Energy(J): 0.025, Torque(N⋅m): 1.8, Operating Pressure

Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Valves: Provided, Allowable Kinetic Energy(J): 0.025, Torque(N⋅m): 1.8, Operating Pressure

Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Valves: Provided, Allowable Kinetic Energy(J): 0.025, Torque(N⋅m): 1.8, Operating Pressure

Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Valves: Provided, Allowable Kinetic Energy(J): 0.025, Torque(N⋅m): 1.8, Operating Pressure

Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Valves: Provided, Allowable Kinetic Energy(J): 0.025, Torque(N⋅m): 1.8, Operating Pressure

Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Valves: Provided, Allowable Kinetic Energy(J): 0.025, Torque(N⋅m): 1.8, Operating Pressure

Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Valves: Provided, Allowable Kinetic Energy(J): 0.025, Torque(N⋅m): 1.8, Operating Pressure

Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Valves: Provided, Allowable Kinetic Energy(J): 0.025, Torque(N⋅m): 1.8, Operating Pressure

Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Valves: Provided, Allowable Kinetic Energy(J): 0.12, Torque(N⋅m): 1.8, Operating Pressure Range

Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Valves: Provided, Allowable Kinetic Energy(J): 0.12, Torque(N⋅m): 1.8, Operating Pressure Range

Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Valves: Provided, Allowable Kinetic Energy(J): 0.12, Torque(N⋅m): 1.8, Operating Pressure Range