Cooling Capacity: 100 (10 kW), Cooling Method: A (Air-cooled), Pipe Thread: N [NPT, (w/Rc-NPT conversion Fitting)], Option: AB1K (w/Caster Adjuster Foot and w/Earth Leakage Breaker w/Handle and w/Fluid Fill Port)
Body Size: 50, Thread: N (NPT), Port Size: 10 (1), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: Standard, Semi-Standard 2: WZ (W + Z)
Body Size: 60, Thread: N (NPT), Port Size: 10 (1), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: Standard, Semi-Standard 2: WZ (W + Z)
Clean Series: Clean Room, Stations: 10, Cylinder Port: w/One-touch Fitting for ø4, Kit: w/o Cable, Top Entry, Option: DIN Rail Mount Style, w/Name Plate
Stations: 10 (10 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Range: 20 (2 to 16 L/min), Supply/Return Port Size: 03 (3/8)
Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only)
Body Size: 60, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: 10 (1), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: R (Flow Direction Right to Left), Semi-Standard 2: Standard
Nozzle Diameter: 15 (ø1.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 08 (One-touch Fitting ø8), VAC: 10 (One-touch Fitting ø10), EXH: 10 (One-touch Fitting ø10), Accessories: S (w/Standard Bracket, w/Silencer)
Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 08 (One-touch Fitting ø8), VAC: 10 (One-touch Fitting ø10), EXH: 10 (One-touch Fitting ø10), Accessories: NS (w/o Standard Bracket, w/Silencer)
Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 08 (One-touch Fitting ø8), VAC: 10 (One-touch Fitting ø10), EXH: 10 (One-touch Fitting ø10), Accessories: S (w/Standard Bracket, w/Silencer)
Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 08 (One-touch Fitting ø8), VAC: 10 (One-touch Fitting ø10), EXH: 10 (One-touch Fitting ø10), Accessories: N (w/o Bracket, w/o Silencer)
Nozzle Diameter: 15 (ø1.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 08 (One-touch Fitting ø8), VAC: 10 (One-touch Fitting ø10), EXH: 10 (One-touch Fitting ø10), Accessories: N (w/o Bracket, w/o Silencer)
Nozzle Diameter: 15 (ø1.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 08 (One-touch Fitting ø8), VAC: 10 (One-touch Fitting ø10), EXH: 10 (One-touch Fitting ø10), Accessories: NS (w/o Standard Bracket, w/Silencer)
Body Size: 50, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: 10 (1), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: R (Flow Direction Right to Left), Semi-Standard 2: Standard
Body Size: 10, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: M5 x 0.8, Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: 2 + R, Semi-Standard 2: Standard, Made to Order: -
Stations: 10 Stations, Port Size: LN7 (Elbow Top Ported w/1/4" One-touch Fitting), Cable Length: 0 (w/o Cable)
Stations: 10 Stations, Port Size: L8 (Top Ported Elbow w/ø8 One-touch Fitting), SI Unit: 0 (w/o SI Unit)
Model: 10S6 (Side Ported), SI Unit Specification: 0 (w/o SI Unit), SI Unit Output Polarity, End Plate: w/o SI Unit, I/O Unit Stations: None, Valve Stations: 10 Stations, P,E Port, SUP/EXH Block: U (U Side, 2 to 10 Stations, Internal Pilot), A,B Port Size: N7 (ø1/4" One-touch Fitting, Straight, Inch), Mounting: A (DIN Rail Mounting, Name Plate w/Station Number), DIN Rail Option: 0 (w/o DIN
Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: R (Bracket for w/o
Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: D [1 NPN Outputs + Analog (4 to 20 mA)], Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover