)Safety standardsCirculating fluid Note 2)Temperature range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity

)Safety standardsCirculating fluid Note 2)Temperature range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity

)Safety standardsCirculating fluid Note 2)Temperature range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity

)Safety standardsCirculating fluid Note 2)Temperature range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 9) (50/60 Hz) (

)Safety standardsCirculating fluid Note 2)Temperature range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 9) (50/60 Hz) (

)Safety standardsCirculating fluid Note 2)Temperature range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity

)Safety standardsCirculating fluid Note 2)Temperature range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity

)Safety standardsCirculating fluid Note 2)Temperature range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity

)Safety standardsCirculating fluid Note 2)Temperature range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity

)Safety standardsCirculating fluid Note 2)Temperature range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity

)Safety standardsCirculating fluid Note 2)Temperature range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity

)Safety standardsCirculating fluid Note 2)Temperature range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity

)Safety standardsCirculating fluid Note 2)Temperature range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity

)Safety standardsCirculating fluid Note 2)Temperature range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity

3 rotationsParameter setup or external analog input setup (0 to 10 VDC)USB communication, RS422 communication?10 to 40 (No freezing)90 or less (No condensation)?20 to 65 (No freezing)90 or less (No condensation)Between case and SG: 10 (500 VDC)800

JSY1000/3000/5000 Series (Plug-in)

Leakage voltage Take note that the leakage voltage will increase when a resistor is used in parallel with switching element or a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the passing leakage voltage through the C-R circuit. The suppressor residual leakage voltage should be as 3% or less of the rated voltage. 3.

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Low torque Metal seal type Rotary joint Series MQR

0.3 Rotational torque [N.m] MQR12 MQR8 MQR8 20 MQR4 MQR2 MQR12 0.2 10 0.1 MQR1 0 0 0 1000 2000 3000 0 500 1000 1500 2000 2500 3000 Rotation speed [min-1 (r.p.m)] Rotation speed [min-1 (r.p.m)] Note 1: Value when no pressure applied.

Stainless Steel Regulator Series NSR

Test data available upon request. 40-140'F (5 -60"C) Non relieving type (Standard), 'Relieving type (NSR1101, NSR1, NSR3101, NSR3111, NSR4101, NSR4111) only applicabl icr N2 gas or air HolIY TO ORDER F luid / Diaphrag m M aterinl a I allvt size M5-10-32Nom(t!

3 Port Solenoid Valve, Series V100

Series V V Y Series V V J Applicable cylinder size Cylinder size y Series C dm bar)] b Cv 6 8 10 12 16 20 25 32 40 50 63 80 100 0.28 0.37 0.28 0.29 0.36 0.32 0.35 0.29 0.90 1.4 2.5 0.12 0.21 0.74 V1Y V2Y V3Y V4Y 3.4 5.2 Series VY 10 0.46 0.83 2.9 V1J V2J V3J Series VJ Conditions Pressure: 0.5MPa Load rate: 50% Cylinder speed: 450mm/s