MY2

5@8 @7 %5!

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

Pin Cylinders Series CJP2/CJP

B1 A' Rod end nut Width across flats B2 30 D-1 D E J C MM Without rod end thread NN W B (mm) Symbol A A' B B1 B2 C D E F F' GA GB H J MM NN P S W Z Bore size 6 10 16 7 9 14 14 5.5 2 3 16.5 8 6.5 5.5 6.5 17 6 M3 x 0.5 M10 x 1.0 M3 x 0.5 16 3 33 10 12 15 17 7 2.5 4 19 8 6.5 6 7 20 7 M4 x 0.7 M12 x 1.0 M3 x 0.5 19.5 3 39.5 12 14 20 19 8 3 6 24.5 10 8.5 6.5 7.5 24 10 M5 x 0.8 M14 x 1.0 M5 x

10

7 !9 !1 !4 !0 !3!8 !6 !5 12-2 12-1 7-2 7-1 1-2 1-1 1-1 Width across flats Rod view 32 (2:1) Component Parts No.

Cylinder with Lock

7 #6 #8 #7#5 #0#1#9 @1@0 @2 @3 @6 @8$0@4@5 @9 t !9 #3#2 #4@7!7!2 Component Parts Component Parts No. Description Material Qty.

CRBU

Refer to p.1.2-7 for further information.)

Programless controller (with stroke study) Step motor (servo 24 VDC)

OFF ON OFF ON Position number IN3 IN2 IN1 IN0 Position number OUT3 OUT2 OUT1 OUT0 1 (End side) 1 (End side) 2 (Motor side) 2 (Motor side) 3 3 4 4 5 5 6 6 7 7 8 8 9 9 10 (A) 10 (A) 11 (b) 11 (b) 12 (c) 12 (c) 13 (d) 13 (d) 14 (E) 14 (E) 24 No.JXC-OMU0030-A (3) The change of I/O output signal The change of I/O output signal under the condition of controller at auto mode.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

C DH7 EN 0 0.1 ER (Max.)

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

RQ

Refer to page 7-7-14 for details on rod end nut and accessories. Double clevis bracket material: Carbon steel 7-7-9 9 Series RQ Dimensions: 32, 40, 50 For the auto switch mounting position and its mounting height, refer to page 7-7-16.

Low Friction Cylinders Series MQ

0.2 D W E M K B + Stroke L 0.2 A + Stroke M E (mm) Bore size (mm) P Stroke range (mm) RB Note) H OA A B C D E F W I Y J K L M N OB Q RA TN TF 10 39.5 M3 x 0.5 M4 x 0.7 10 to 40 31.5 6 6 ( 5.8) 29 5.5 38 4 5 5 8 20 3.5 6.5 14.5 7 16 44 M4 x 0.7 M6 x 1.0 10 to 60 34 8 8 ( 7.8) 36 5.5 47 7 5 7 10 25.5 5.4 9 18 10 20 47.5 M5 x 0.8 M6 x 1.0 10 to 60 37.5 10 10 ( 9.8) 40 5.5 52 7 6 8 10

MQQ

Stroke range (mm) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5 6 6 29 5.5 M3 x 0.5 4 38 5 8 20 3.5 6.5 14.5 7 5 16 10 to 60 44 M6 x 1.0 34 8 8 36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18 10 5 20 10 to 60 47.5 M6 x 1.0 37.5 10 10 40 5.5 M5 x 0.8 7 52 8 10 28 5.4 9 19.5 10 6 25 10 to 50, 75, 100 54 M6 x 1.0 42 12 12 45 8.5 M6 x 1.0 7 60 4.5 10 12 34 5.5 9 23

MQQ

thread effective depth C 2-Rc 1/8 F Q Y 2 x 4-OB Counterbore depth RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E Bore size (mm) Stroke range (mm) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5 6 6 29 5.5 M3 x 0.5 4 38 5 8 20 3.5 6.5 14.5 7 5 16 10 to 60 44 M6 x 1.0 34 8 8 36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

Title not found

13 7 6 9 8 11 10 3 Connector B terminal no.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

83503 Flat ribbon cable connector Socket: 10 pin MIL type with strain relief Conforming to MIL-C-83503 D-sub connector Conforming to MIL-C-24308 JIS-X-5101 Flat ribbon cable connector Socket: 26 pin MIL type with strain relief Conforming to MIL-C-83503 Applicable connector Internal wiring +COM, COM Location Valve 4(A), 2(B) port Porting specifications Direction Lateral, Upward, Downward Metric

Electric Actuators

0 Step motor (Servo/24VDC) 14 7 Electric Actuator/Miniature Rod Type Series LEPY Dimensions LEPY LEPS LECP6 LECP1 Model Selection Step Motor (Servo/24 VDC) Specific Product Precautions LEPY6 C D A B 3.5 2 x M4 x 0.7 x 7 2 x 3.3 through 19 +0.025 0 2.5H9 ( ) depth 2.5 +0.025 0 2.5H9 ( ) depth 2.5 20 12 13 Motor cable mounting direction: Nil (Top entry) Rod operating range Note 1) 2 x M4 x

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

port 3 22.5 3 22.5 84 96 e ng e ng ra 3 ra on on ti A port ta 3 ti 90 4 ro ta 7 ro m 1 A port A port u Clockwise m e e m g s 3 u i ni n w im k C ra c l o Mi 6 3 8 ax n o 1 ti M ta ro e m g u m n ni Mi 180 e ra C s l i o w c k n tio ta ro m mu xi Ma Positioning pin hole Positioning pin hole Position of bottom positioning pin hole Position of bottom positioning pin hole With external shock

SZ3000

Particularly when using a C-R element (surge voltage suppressor) for the protection of a switching element, take note that leakage voltage will increase due to leakage current flowing through the C-R element.

Rotary Actuator

4 types Combination of applicable chart A 1 A 2 C 8 C59 Chart 1, 2, 7 A 2 A24 C10 C60 Chart 1, 2, 7 Combination is available only when all the conditions are fulfilled in the combination chart.