Proposals for Energy Saving M5 x 0.8 through hole 0.5MPa 0.35MPa (except 05) 0.45MPa (13,15 only) H M S 112 85.4 74 70 62 10 P ZM1 K5LZ-E15L-X235 26 30 Body type Conforms to the standard product.
Indicator: 6 High Vacuum Angle Valve Series XLA, XLAV Dimensions (mm) 1in = 25.4mm (b) XLA/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) Heater (optional) H B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 E Note 1) B 103 113 158 170 196 235 A 40 50 65 70 88 90 Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 12 11 11
60 3.5 2.8 2.3 1.9 1.6 1.4 1.3 70 4.4 3.8 3.2 2.8 2.3 2 1.8 80 6.5 5.2 4.2 3.6 3.1 2.7 2.4 90 8.5 6.8 5.5 4.7 4 3.5 3.1 100 11.4 8.6 7 5.8 5 4.4 3.9 110 14.2 11.2 8.8 7.2 6.2 5.4 4.9 1" ID 30 0.2 0.2 0.1 0.1 0.1 0.1 0.1 40 0.3 0.3 0.2 0.2 0.2 0.2 0.2 50 0.5 0.4 0.4 0.3 0.3 0.2 0.2 60 0.8 0.6 0.5 0.5 0.4 0.4 0.3 70 1.1 0.8 0.7 0.7 0.6 0.5 0.4 80 1.5 1.2 1 0.8 0.7 0.6 0.5 90 2 1 1.3 1.1 0.9
60 3.5 2.8 2.3 1.9 1.6 1.4 1.3 70 4.4 3.8 3.2 2.8 2.3 2 1.8 80 6.5 5.2 4.2 3.6 3.1 2.7 2.4 90 8.5 6.8 5.5 4.7 4 3.5 3.1 100 11.4 8.6 7 5.8 5 4.4 3.9 110 14.2 11.2 8.8 7.2 6.2 5.4 4.9 1" ID 30 0.2 0.2 0.1 0.1 0.1 0.1 0.1 40 0.3 0.3 0.2 0.2 0.2 0.2 0.2 50 0.5 0.4 0.4 0.3 0.3 0.2 0.2 60 0.8 0.6 0.5 0.5 0.4 0.4 0.3 70 1.1 0.8 0.7 0.7 0.6 0.5 0.4 80 1.5 1.2 1 0.8 0.7 0.6 0.5 90 2 1 1.3 1.1 0.9
SQ VFS A B C Series Model Effective area 14 mm2 16 26 AN203-KM8 51 SV1000 (For 8) VFR 26 m2 22 53.8 AN200-KM10 80.8 SV2000 (For 10) 30 mm2 25 AN300-KM10 70 97 VQ7 SV3000 SV4000 (For 12) 41 mm2 25 AN300-KM12 70 98 Plug (White) These are inserted in unused cylinder ports and P, E ports. d Cassette base type 16 Tie-rod base type 10 D A Series Manifold Model SUP block disk EXH block disk L SV1000
AC Specification (Built-in Full-wave Rectifier Type) Class B Apparent power (VA) Note 1) 2) Temperature rise (C) Note 3) Temperature rise (C) Note 3) Model Model Apparent power (VA) Note 1) 2) VXZ23, 24 VXZ25, 26 VXZ2A, 2B VXZ2C, 2D 9.5 70 10 70 12 70 14 70 Class H Class H Apparent power (VA) Note 1) 2) Temperature rise (C) Note 3) Temperature rise (C) Note 3) Model Model Apparent power (
Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt M8 x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 105 l x 110 l x 120 l x 140 l x 160 l M4 x 45 l x 50 l x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l 70 75 80 85 90 95 100 105 110 120
-75kPa -80kPa -85kPa 100 Pad diameter (mm) 80 63 50 40 10 30 50 70 100 200 5 7 Lifting force (N) How to read Example: Work load 20 kg (Lifting force: 196 N) Conditions:Desired number of pads 5 pcs.
AWD20 AWD30 AWD40 173 201 239 73 86 92 52 59 75 40 57 73 45 50 70 40 53 70 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 Optional specification With barb fitting With drain guide Metal bowl B 173 214 252 Metal bowl with level gauge Model B B B AWD20 AWD30 AWD40 234 272 209 247 208 246 74
D-A3 D-G39 D-K39 n (different side) 90 + 100 (n2) n = 2,4,6,8... 125 + 100 (n2) n = 2,4,6,8... n (same side) 1 60 65 75 80 85 90 90 90 2 (different side) 2 (same side) 70 75 80 85 70 75 80 85 70 + 30 (n2) n = 2,4,6,8... 70 + 50 (n2) n = 2,4,6,8... 75 + 30 (n2) n = 2,4,6,8... 80 + 30 (n2) n = 2,4,6,8... 85 + 30 (n2) n = 2,4,6,8... 75 + 50 (n2) n = 2,4,6,8... 80 + 50 (n2) n = 2,4,6,8... 85
Indicator: 6 High Vacuum Angle Valve Series XLA, XLAV Dimensions (mm) 1in = 25.4mm (b) XLA/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) Heater (optional) H B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 E Note 1) B 103 113 158 170 196 235 A 40 50 65 70 88 90 Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 12 11 11
10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 127 LEJ Series AC Servo Motor Clean Room Specification * This graph shows the amount of allowable overhang (guide unit) when the center of gravity of the workpiece overhangs in one direction.
AC Specification (Built-in Full-wave Rectifier Type) AC Specification (Built-in Full-wave Rectifier Type) Class B Class B Apparent power (VA) Note 1) 2) Temperature rise (C) Note 3) Apparent power (VA) Temperature rise (C) Model Model VXD23 to 25 VXD26, 27 VXD28, 29 VXD2A to 2C VXD2D, 2E VXD2F, 2G 7 60 9 60 9.5 70 10 70 12 14 70 70 Class H Class H Apparent power (VA) Note 1) 2) Temperature
0.05 0.04 0.04 0.04 0.03 0.03 0.02 0.06 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Piping port size Shock Absorber Specifications RB1007 RB1412 RB2015 RB2725 Shock absorber model MGG20 MGG25/32 MGG40/50/63 MGG80/100 Applicable guide cylinder Maximum energy absorption (J) 19.6 58.8 147 5.88 Stroke absorption (mm) 12 15 25 7 Maximum collision speed (m/s) 5 Max. operating frequency (cycle/min) 45 25 10 70
Series CXS is available in six bore sizes and stroke lengths up to 100mm. This series is very compact and has a very accurate non-rotating specification. It is suited for accurate pick-and-place applications or light duty material handling. The CXS can be used with either reed or solid state switches. Available in clean room versions. Dual rod cylinder with ball bearing slide, Bore sizes
Series CXS is available in six bore sizes and stroke lengths up to 100mm. This series is very compact and has a very accurate non-rotating specification. It is suited for accurate pick-and-place applications or light duty material handling. The CXS can be used with either reed or solid state switches. Available in clean room versions. Dual rod cylinder with rod retracted side end lock and
Series CXS is available in six bore sizes and stroke lengths up to 100mm. This series is very compact and has a very accurate non-rotating specification. It is suited for accurate pick-and-place applications or light duty material handling. The CXS can be used with either reed or solid state switches. Available in clean room versions. Dual rod cylinder with rod retracted side end lock and
Series CXS is available in six bore sizes and stroke lengths up to 100mm. This series is very compact and has a very accurate non-rotating specification. It is suited for accurate pick-and-place applications or light duty material handling. The CXS can be used with either reed or solid state switches. Available in clean room versions. Dual rod cylinder with rod retracted side end lock and
Series CXS is available in six bore sizes and stroke lengths up to 100mm. This series is very compact and has a very accurate non-rotating specification. It is suited for accurate pick-and-place applications or light duty material handling. The CXS can be used with either reed or solid state switches. Available in clean room versions. Dual rod cylinder with rod retracted side end lock and
5.21.1 Communication function . 5-70 5.21.2 Setting/checking of communication function . 5-70 Chapter 6 Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm buzzer stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector . 6-8 6.3.3 How to release the pump thermal