New

Conduit P type Q R S Q R S T Q R Q R 1 2 1/8, 1/4 1/4, 3/8 1/4, 3/8 64.5 67 69.5 69.5 34 45 50 53 52.5 55 57.5 57.5 99.5 102 104.5 104.5 36 47 52 55 68.5 71 73.5 73.5 77 91 96 47.5 50 52.5 52.5 36 47 52 55 23 25.5 28 28 42 53.5 58 61 3 1/2 101.5 23 Series VX2 For Air mm Dimensions/Body Material: Resin Y Y Grommet (with surge voltage suppressor) Grommet W W U U X X U1 U1 X1 X1 z300 Q F D

ZP3

q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

Compact Cylinder

L F K M E J (Port size) L Q Q B + Stroke B + Stroke A + Stroke A + Stroke W End Lock Mechanism Dimensions (mm) HN (Max.)

Table of Contents

3 q !1 y r i e Component Parts Description Material Material Note Note Description No. q w e r t y u No. i o !0 !1 !2 !

10

Body material: AIuminum, C37, Stainless steel Body material: Resin q q w w e e r r t t y y IN OUT IN OUT u u Component Parts Component Parts No. Description No.

High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

Made to Order

CA2 series GB Stroke A Stroke B (mm) Q S ZZ GB Bore size 40 50 63 80 100 29 53 167 269 ZZ + Stroke (A + B) S + Stroke (A + B) Q 33 59 179 295 33 61 195 311 41 73 231 373 41 79 251 395 L CBA2 series B port D port C port A port (mm) L Q S ZZ GC Bore size (mm) 40 50 63 80 100 42 12 66 180 282 Q GC Stroke B Stroke A 48 14 74 194 310 48 14 76 210 326 S + Stroke (A + B) 58 16 90 248 390 ZZ + Stroke

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

0 o q i @2 @9 #1 @4 @5 #1 @6 #0 @1 @8 !3 @3 @7 !9 @0 !2 !7 !8 t !7 !6 y Enlarged drawing of shim part !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

CV/MVGQ

8 q Clear anodized Aluminum alloy Head cover Piston seal NBR !

CQ2

Note No. q w e r t y u i o !0 !1 !2 !3 !

CV/MVGQ

8 q Clear anodized Aluminum alloy NBR Head cover Piston seal !

Rotary Actuator/Vane Type

q END w END q A B A B B A Switch for rotation END q Switch for rotation END q Switch for rotation END w Switch for rotation END w Auto switch B port A port * Solid-lined curves indicate the rotation range of the output shaft with single flat (key).

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

In the case of liquids: P Q = 53 Kv (9) G Q : Flow rate [L/min] Kv : Flow coefficient [m3/h] DP : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 232 Kv P (P2 + 0.1) (10) Q : Flow rate [kg/h] Kv : Flow coefficient [m3/h] DP : Pressure difference [MPa] P1 : Upstream pressure [MPa]: DP = P1 P2 P2 : Downstream pressure [MPa] 57 Solenoid

Aluminum High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

3 Port Solenoid Valve SYJ300/500/700 Series

N.O. 24 VDC 12 VDC Type 42 7 Q Q Q Specifications Series SYJ300/500/700 Low Power Consumption 0.5 W Q Q Q Q Q SYJ300.pages 10-12 Q Q SYJ500.pages 13-15 Q SYJ700.pages 16-18 Q Q Q Specifications Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q 9 Series SYJ300 3 Port Solenoid Valve Valve Specifications Model Weight g Valve model Type of actuation Port

Stability of suction position,

0 r r r o e e e e u u y w u u w t u w t y y y y w t q w t q t q q q Male thread (for direct mounting) With male thread adapter (Vacuum inlet: Vertical) With male thread adapter (Vacuum inlet: Lateral) With female thread adapter (Vacuum inlet: Vertical) With female thread adapter (Vacuum inlet: Lateral) Component Parts No.

Rotary Actuator

90o END w END q END q END w END q A B A B B A Switch for rotation END q Switch for rotation END q Switch for rotation Switch for rotation END w END w Auto switch B port A port Solid-lined curves indicate the rotation range of the output shaft with single flat (key).

Electric Actuator/Slider Type

How to Order q w e r t y u i o !

Thermo-chiller

The indicated value is in (C). e [PRS] lamp Turns ON when the pressure is indicated by q. The indicated value is in (MPa). r [FLOW] lamp Not used in this product t [DI] lamp Turns ON when electric conductivity is indicated by q.