Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: L (Ball Bushing Bearing), Bore Size: 25mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 100mm, Auto Switch: Y7PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal
Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: L (Ball Bushing Bearing), Bore Size: 25mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 100mm, Auto Switch: Y7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal
Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: L (Ball Bushing Bearing), Bore Size: 25mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 100mm, Auto Switch: Y7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)
Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: L (Ball Bushing Bearing), Bore Size: 20mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 100mm, Auto Switch: Y7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector)
Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: L (Ball Bushing Bearing), Bore Size: 20mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 100mm, Auto Switch: Y7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)
Clean Series: Vacuum Suction Type, Magnet: Built-in, Mounting: Basic Style, Cushion: Rubber Bumper, Bore Size: 25mm, Stroke: 100mm, Port Thread: Male Rod End, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -
Clean Series: Vacuum Suction Type, Magnet: Built-in, Bore Size: 10mm, Stroke: 100mm, Port Location: 90° to Axis, Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire, Lead Wire or Prewired Connector: -
Clean Series: Vacuum Suction Type, Magnet: Built-in, Mounting: Front Mounting Style, Bore Size: 20mm, Port Thread: Rc, Stroke: 100mm, Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire or Prewired Connector: -, Number: -
Clean Series: Vacuum Suction Type, Magnet: Built-in, Mounting: Front Mounting Style, Bore Size: 20mm, Port Thread: Rc, Stroke: 100mm, Auto Switch: H7B--Solid State, Gen. Purpose, 2 Wire, Lead Wire or Prewired Connector: -, Number: -
Magnet: With Auto Switch, Mounting: Basic Style, Shaft: Single Shaft, Size: 50, Rotating Angle: 100°, Cushion: Without Air Cushion, Auto Switch: Solid State, Gen. Purpose, 3 Wire NPN, Lead Wire: -
Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Type: A [Servo Motor (24 VDC)], Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 100mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 1.5m, Controller Type: LECA6 NPN, Servo Motor
Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 100mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 1.5m, Controller Type: LECA6 PNP, Servo
Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 100mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: Standard Cable, Actuator Cable Length: 1.5m, Controller Type: LECA6 PNP, Servo Motor, Step Data Input Type
Series: Clean Series Ball Screw Drive, Accuracy: High Precision Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 100mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: Standard Cable, Actuator Cable Length: 1.5m, Controller Type: LECA6 PNP, Servo Motor, Step Data
Series: Guide, Clean Series, Size: 16, Mounting Pitch: S, Stroke, mm: 100
Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～0.7, Cushion: Rubber bumper at both ends, Specification: Clean Series (vacuum type), Port
20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%
LJ1H Refer to pages starting with 181 for mounting. 30 95 B 100 95 8(4)-6.2 (160) () () 110 95 20 95 A (140) () () A B Stroke Model LG1H202PA-100-F LG1H202PA-200-F LG1H202PA-300-F LG1H202PA-400-F 100 200 300 400 50 150 250 70 170 270 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)
200 300 400 500 600 700 800 900 1000 Flow rate (slpm, N2) 0 50 100 150 200 250 300 350 400 450 500 550 600 650 700 Flow rate (slpm, N2) AK1200HF 150 psig (1.0 MPa) 50 psig (0.34 MPa) Inlet pressure: 100 psig (0.69 MPa) AK1200FC Inlet pressure: 150 psig (1.0 MPa) 3/4 inch connections ) 100 0.69 75 0.52 0.62 90 0.55 80 60 0.41 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure