Add to Cart SMC SS0700-2A-2 end plate assy, S070 SOLENOID VALVE,3-PORT*** $12.91 + Add to Quote Add To Cart Add to Cart SMC SS0700-80A

Add to Cart SMC SS0700-2A-2 end plate assy, S070 SOLENOID VALVE,3-PORT*** $12.91 + Add to Quote Add To Cart Add to Cart SMC SS0700-80A

-2 clip, S070 SOLENOID VALVE,3-PORT*** $2.60 Add to Quote Add To Cart Add to Cart SMC SS0700-80A-4 clip, S070 SOLENOID VALVE,3-PORT*** $5.43

Add to Cart SMC SS0700-2A-2 end plate assy, S070 SOLENOID VALVE,3-PORT*** $12.91 + Add to Quote Add To Cart Add to Cart SMC SS0700-80A

Add to Cart SMC SS0700-3B-1-C8 d-side endplate, 3 PORT SOLENOID VALVE $56.00 + Add to Quote Add To Cart Add to Cart SMC SS0700-80A

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-2 clip, S070 SOLENOID VALVE,3-PORT*** $2.60 Add to Quote Add To Cart Add to Cart SMC SS0700-80A-4 clip, S070 SOLENOID VALVE,3-PORT*** $5.43

Add to Cart SMC SS0700-2A-2 end plate assy, S070 SOLENOID VALVE,3-PORT*** $12.91 + Add to Quote Add To Cart Add to Cart SMC SS0700-80A

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

VXF2

With/without silencer Diaphragm/ Main valve material Symbol Electrical entry Voltage Piping Symbol Symbol A B 1 2 3 4 20A NBR/POM Without Grommet 25A NBR/POM A With A Direct piping type 40A 24 VDC 50A A B Direct piping type B C D E F G H J K L M N P Q R S T U V W 65A 5 100 VAC Grommet Flange type with surge voltage suppressor 110 VAC A B C D Direct piping type 200 VAC Flange type 230 VAC 80A

High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

SMC SS0700-7A-1 back pressure check valve, S070 SOLENOID VALVE,3-PORT*** $23.24 Add to Quote Add To Cart Add to Cart SMC SS0700-80A

IDX-OM-U021

10K ( (10 () () (K16K) JIS 80A 10K 2m) 0.7m) ( ( (10, 20 18 t 268 217 9351 t A A 8x23 8x19 75 20 4x A 1300 720 1290 160 150 t K K K16K 64 (K16K) (17) 17) JIS 80A 10K JIS 80A 10K 1823) 40 (18~23) 1332 1432 1.3 1.3 () 1,3 (1) 1,3 (1) () 9902 20 475 1030 950 (3) (3) (2) (2) IDF100150F 6-3 6 4 IDX-OM-U021 6 6-4 IDF100/125F-30R () CM OLR MC1,2 THR THS1,2 TB1,2

S070

Number No. r t y u i SS070A 01 1A O-ring FKM SS070A-80A-1 10 VFN Port size Clip Stainless steel SS070A-80A-2 10 With 3.18/2 barb fitting With 4/2.5 barb fitting 01 02 Metal joint Stainless steel SS070A-80A-3 10 Leaf spring Stainless steel SS070A-80A-4 10 Mounting bracket Stainless steel SS070A-80A-5 10 < U Side End Plate Assembly > w U side end plate assembly no.

IDX-OM-Z004

10K (10,0.7m) ) (10 ( (K16K) JIS 80A 10K 2m) 20 18 t 268 217 t 20 18 t 8x23 8x19 A A 8x23 8x19 20 4x 75 A 1056 A 720 9351 1290 160 150 150 160 t K K K K K16K JIS 80A 10K 64 (17) 17) 40 (K16K) 1823) (18~23) JIS 80A 10K 479 127 1332 1432 1,3 -W4 (-W4) -W4 Y3/4 (-W4) Y 3/4 () () R3/4 R3/4 20 50 165 475 9902 1030 950 (-W5) -W5 1,3 (-W5) -W5 R3/4 R3/4 IDF100F150F-W

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

XLA XL XLQ XLQ y Body surface treatment/Seal material and its changed part Bodysurfacetreatment Part numbers indicating changed seal material and leakage XM XY Surface treatment External: Hard anodized Internal: Raw material External: Hard anodized Internal: Oxalic acid anodized Symbol Nil A Note 2) Leakage Pam3/s or less Note 1) Changed part None w, e w e Symbol External 1.3 x 10-10 (FKM

SYJ Series

Connector mounting position SY3000-37-80A-5 On A side 1 to 8stations SY3000-37-80A-2 On B side SS5YJ3-21,32SA SY3000-37-80A-7 On A side 9 to 16stations SY3000-37-80A-4 On B side SY3000-37-80A-5 On A side 1 to 8stations SY3000-37-80A-2 On B side SY3000-37-80A-7 On A side 9 to 12stations SY3000-37-80A-4 On B side SS5YJ5-20,40,42,43SA SY3000-37-80A-9 On A side 13to16stations SY3000-37-80A-7

PVC Quick Drain Valve

piping external diameter 32 to 89 Orifice size 25, 40, 65, 80 851 PVC Quick Drain Valve LVW Series How to Order 60 25A LVW Series O-ring material Symbol Material Symbol Orifice size Body class 60 80 Nil N FKM 25 6 EPDM 40 8 65 90 9 80 Pilot port thread type Symbol Thread type Port size Nil N Rc1/8 Symbol Body class Applicable PVC piping external diameter NPT1/8 Symbol 25A 32A 40A 50A 65A 80A

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

flange surface Right flange surface Left flange surface Right flange surface Flange side Flange side Left flange surface Rear flange surface Right flange surface Left flange surface Rear flange surface Right flange surface Nil Left flange surface A F J K M With indicator With indicator Without indicator Without indicator Flange side Flange side t Auto switch type r Temperature specifications XLA