1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 12/Rc 3 8 Body ported type (Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 3 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector JIS Symbol Body ported type (Without

Low Differential Pressure Sensor

CAT.ES100-49 A Low Differential Pressure Sensor Rated differential pressure range: 0 to 2 kPa 0 to 2 0 to 2 kPa kPa 0 to 2 0 to 2 kPa kPa Accuracy: 1% F.S. 1% % F.S. F.S. 1% % F.S. F.S.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Side 1/4 1/4 1,3,5 (P,EA,EB) Port 1/8 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/4 Port size 1/4 C6 (One-touch fitting for 6) 4,2 (A,B) Port C10 (One-touch fitting for 10) C8 (One-touch fitting for 8) Manifold base weight W (g) n: Station W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For more than 10 stations (more than 5 stations in case of SS5Y7), supply pressure to

Vacuum Pad: Ball Joint Type

1 3.5 25 28 50 53 ZPT32F10-0-A14 16 36.5 49 1 15.5 1 34 1 35.5 13 35 32 Additional Dimensions by Stroke Additional Dimensions by Stroke (mm) (mm) Q: 6 Q: 8 Q: 6 Q: 8 H I H I Stroke Stroke K P K P 5.1 K P K P 5.1 20 20 +10 5.6 +10 5.6 0 0 30 30 1 +1 +20 +4.9 +4.4 1 +1 +4.9 +4.4 +20 50 50 +25 +40 +49.9 +49.4 +25 +40 +49.9 +49.4 717 Vacuum Pad: Ball Joint Type Lateral Vacuum Entry Without Buffer

2-Color Display High Precision

Suction Verification High Vacuum Suction Work 1 Work 2 Work n Max. A P-1 H-1 n-1 Formula for Obtaining the Set-Value Min.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 1 A single controller monitors up to 4 pressure sensors. 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 1 A single controller monitors 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 Space saving 1 40mm MPa kPa OUT1 76% OUT2 CH 1 2 3 4 PRESSURE SET reduction

PSE550/300

value may change 1 digit. 2 1 1 mmH2O mmHg Series PSE530 pressure sensors are also applicable.

0.01

4, G 1/4 NPT 1/4 Rc 1/4, G 1/4 NPT 1/4 Female thread Rc 1/4, G 1/4, NPT 1/4 Resin Case material Resin Aluminum Stainless steel Air (Nitrogen) Fluid 0.01 m (filtration efficiency: 99.99%) Note) Nominal filtration rating Initial pressure drop 0.03 MPa (at inlet pressure 0.7 MPa, maximum flow) Maximum operating pressure (at 20C) 1.0 MPa (in case of nitrogen: 0.99 MPa) 5 to 45C Operating

Clean Regulator

ITVX Specifications PVQ VY1 SRH30 SRH40 SRH31 SRH41 Model Non-relief Relief Relief mechanism VBA VBAT Rc 1/8, 1/4 URJF 1/4 Rc 1/4, 3/8, 1/2 URJF 3/8 Rc 1/8, 1/4 Rc 1/4, 3/8, 1/2 Port size AP100 Grade A Clean air, N2, Ar, CO2, Pure water Clean air, N2 Fluid Grade B Air, N2, Ar, CO2, Water Air, N2 1.5 MPa Proof pressure 1 MPa Max. operating pressure Low pressure type High pressure type 0.02

VCB

6A) 1/4 (8A) 3.0 1/8: 0.21 1/4: 0.24 2 VCB2 0.5 9.2 (0.51) 4 0.3 11.7 (0.65) 5 2.0 6.3 (0.35) 3 0.8 9.7 (0.54) 4 1/4 (8A) 3/8 (10A) 1/2 (15A) 1/4: 0.42 3/8: 0.40 1/2: 0.49 3 VCB3 0.5 14.4 (0.80) 5 3.0 0.2 24.8 (1.38) 7 0.1 37.8 (2.10) 10 3.0 6.3 (0.35) 3 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 1/4: 0.58 3/8: 0.55 1/2: 0.62 3/4: 0.78 1.3 10.8 (0.60) 4 0.7 15.3 (0.85) 5 3.0 4 VCB4 0.3 24.8 (

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Recommended tightening torque Unit: Nm Connection thread 3/4 28 to 30 1/8 7 to 9 1/4 12 to 14 3/8 22 to 24 1/2 28 to 30 1 36 to 38 Torque 1939 Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes (Double Action Type) Series VHS4510/5510 Model When in the exhaust position, the valve may be padlock secured. This prevents erroneous operation.

ITV

ITV301l 0.005 to 0.1MPa ITV303l 0.005 to 0.5MPa 1.12-1 1/4, 3/8, 1/2 ITV305l 0.005 to 0.9MPa Series ITV209l Controls vacuum pressure steplessly in proportion to an electric signal.

25

Rc, NPT, G 1/8 PB PB With LQ3 fitting With LQ1 fitting (6.35) PAF (1.2) PA PB 55 15 FLUID IN FLUID OUT 4.5 30 41 7 (140) (149) 139 79 87 77 2 4.5 FLUID IN Rc, NPT, G 1/8 With nut (LQ1/LQ3 fittings) 1/4" tube extension Caution 1.

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

Model Orifice size Port size Material Body Seal 4.5 mm 10 mm 6 mm 8 mm 3 mm 2 mm VX21 1/8, 1/4 NBR 1/4, 3/8 Brass Stainless steel VX22 FKM 1/2 EPDM 1/4, 3/8 VX23 PTFE 1/2 Normally Open (N.O.)

PSE540/560

Port size ISA2 R 1/8 (With M5 female thread) R 1/4 (With M5 female thread) Rc 1/8 NPT 1/8 (With M5 female thread) NPT 1/4 (With M5 female thread) URJ 1/4 TSJ 1/4 01 02 C01 N01 N02 A2 B2 IS Option/Part No. Output specifications Part no. Note Connector for PSE200 Description ZS-26-E-4 ZSM Voltage output type 1 to 5 V Current output type 4 to 20 mA Nil 28 1 pc. ZS-28-C 1 pc.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Note 1) [ ]: Denotes the normal position.

Speed Controller with Uni One-touch Fitting AS Series

Metric size Inch size Elbow type Universal type 1 8 3.2 4 6 8 10 12 " 5 32" 3 16" 1 4" 5 16" 3 8" 1 2" 1 8 AS221F-U01 AS231F-U01 Gasket 1 4 AS221F-U02 AS231F-U02 1 4 AS321F-U02 AS331F-U02 Female thread 3 8 AS321F-U03 AS331F-U03 Uni thread 1 2 AS421F-U04 AS431F-U04 Note 1) Elbow type only Note 2) indicates the control type (0 for meter-out and 1 for meter-in).

Digital Flow Switch (Integrated display type)

NPN (1 output) + Analogue (1 to 5 V) type PF2W7--28--X560 PNP (1 output) + Analogue (1 to 5 V) type PF2W7--68--X560 NPN (1 output) + Analogue (4 to 20 mA) type PF2W7--29--X560 PNP (1 output) + Analogue (4 to 20 mA) type PF2W7--69--X560 Max. 30 V, 80 mA Internal voltage drop: 1 V or less 28: Analogue output: 1 to 5 V Max. 80 mA Internal voltage drop: 1.5 V or less 68: Analogue output: 1 to

Safety Speed Control Valve (SSC Valve) Series ASS

D L2 L3 L4 L5 L6 L7 L8 P d h T L1 Model Model ASS10 ASS100 ASS110 2 10 5 20 9 5 20 52 14 4 17 50 XT14-82-3-1 1 8 ASS30 ASS300 ASS310 3.2 12 6 30 12 6 26 73 23 5 16.5 63 XT14-105-5-1 1 4 3 8 , ASS500 ASS500 2.3 14 7 35 13 6 38 99 27 6 30.5 90 XT14-89-2-1 1 2 3 4 , ASS600 ASS600 3.2 14 7 65 14 6 46 116 31 6 26 112 XT14-85-2-1 3 4 1 , AS Meter-in Control Type Meter-out Control Type ASP Mounting