Process Valve

size: 32A, 40A, 50A Applicable cable O.D. 6 to 8 (D, DL) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below Manual override (Non-locking push type) G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) P1 P2 F E D A B B C A J Main port 1 (A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNA5-32A VNA6

High Vacuum L Type Valve

H B A G A Unit: mm Model A B C D E Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMV0017 6.

Ionizer Nozzle type IZN10 Series IZS

Note 1) 20 16 17 Elbow for piping port/IZN10D B C 180 10 (mm) B Model C 16 D 11.5 IZN10-16 (mm) IZN10-17 (inch) 22 24.5 18.5 12 Female threads for piping (Rc1/8)/IZN10-11 16 Rc1/8 13 Width across flats 14 456 Ionizer IZN10 Series Dimensions L-bracket/IZN10-B1 IZS (Mounting angle adjustable range) 40 7.5 17 IZN IZN 2 x R10 3.4 2 x M3 2 x 3.4 IZF 25 40 5 ZVB 50 Internal mounting IZD IZE 20.5

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Refer to pages 16-143 to 16-14-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 16-1-11 to 16-1-13 for Precautions on every series. C (COM) A (N.O.) Color of lead wire Black Symbol Contact C Common B (N.C.) A White Normally Open B Red Normally Closed Mounting & Wiring ZSE ISE IFW50--01 to 04/11 to 14/21 to 24 Caution PSE 1.

VXD21/22/23

Fluid JIS Symbol Standard specifications Option (1) Made to Order (2) OUT Water (standard) Turbine oil High temperature water (D, E, N, P) High temperature oil (D, N) Air X44 Note 1) Refer to page 17-3-9 Applicable Fluids Check List for details of special fluids outside of the standard options and specifications. Note 2) Please contact SMC for details.

Air Cylinder MGQ Series Compact Guide Cylinder

atci resstance 5CMO or more ur'leitheleslvotage or 50oVDC Mega ibelw@lcase 6nd cab e) .wfisland volag. lcoovac ior l m n roFrnF ' d e ro.abdi . ndicalor igft LgftaloN .Ambienttemperalure 10-60:c D-Y7NW.Y7NWV/3wire Auto Switch Dimensions D-Y7NW ' D-Y7PW . D-Y7BW Operating range Mosl sensll ve position D-Y7PW.Y7PWV/3wire D-Y7NWV . D.YTPWV .

LEC-OM005xx

Functions . 14 3.1 Easy mode . 14 (1)Functions in easy mode . 14 (2)Tree structure of easy mode . 15 3.2 Normal mode . 16 (1) Functions in normal mode . 16 (2)Tree structure of easy mode . 18 4. System Structure . 19 5.

MVGQ

+ , C8D , ) ( ) ( : C%=D C&=D , 9 ! &' = 2 + ! , E , ! !

MQQ

Action D Double acting Mounting Cylinder stroke B L F G D Note) Through hole & Double end tapped (Standard) Foot type Rod side flange type Head side flange type Double clevis type Bore size (mm) Standard stroke (mm) 10 10, 20, 30, 40 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 Note) Available with the MQQL only. 25 10, 20, 30, 40, 50, 75, 100 Mounting brackets are included when shipped

DOC1020530

(d) Output signal (DO) forced output Output signals can be switched on/off forcibly independently of the servo status. Use this function for output signal wiring check, etc.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

7.5 Up to 300 16.5 17 10 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 17 12 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 27 20 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5

Series VCL

G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CL2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231 334.5 265.5 196.5 300 369 L1 77 115.5 154 231 346.5 269.5 192.5 308 385 VV2CL3 L2 89 127.5

ZSE30/ISE30

ZS-27-A Bracket ZS-27-B Panel mount adapter ZS-27-C Panel mount adater + Front protective cover ZS-27-D With M3 x 8L (2 pcs.) 16-2-4 5 Series ZSE30/ISE30 High Precision, 2-color Display Digital Pressure Switch Specifications ZSE30 (Vacuum/Low pressure) 100.0 to 100.0 kPa 101.0 to 101.0 kPa 500 kPa 0.2 kPa ISE30 (Positive pressure) 0.000 to 1.000 MPa 0.100 to 1.000 MPa 1.5 MPa 0.001 MPa Rated

Digital Flow Switches, Series PF2A, Series PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Pressure Sensor Controller

D: Contents revised in several places. E: Contents revised in several places. F: Contents revised in several places. G: Contents revised in several places.

PSxx-OMG0001CN

-22No.PS-OMG0001CN-H , (2030 ) -23No.PS-OMG0001CN-H PSE300 ( ) No.1 ON ON OFF Yes No No.2 OFF ON No.1 OFF No.3 No.4 No.5 No.6 No.7 -24No.PS-OMG0001CN-H No.8 Yes No No.9 No.9 No.10 No.11 No.12 No.13 No.14 No.15 No.16 -25No.PS-OMG0001CN-H No.

4-channel Flow Monitor (Remote type monitor unit)

D: Contents are added. E: Contents revised in several places. [July 2018] F: Contents revised in several places.

AMF

190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 7.5 4 4 5 5 63 76 76 90 90 10 10 10 10 10 AMF150 AMF250 1/2 3/8, 1/2 AMF350 3/4 AMF150SAME, #1 AMF250SAME, #2 AMF350SAME, #3 4.6-31 Odor Removal Filter Series AMF Dimensions: AMF450 to AMF850 HAl AT IDl AMG AFF AMl M Dimensions with mounting bracket Model Port size (Nominal size B) A H B C D E F G I 221 J 25 K 10 L 14 N 90 O 55 P 110 Q 50

AS-FPQ/AS-FPG

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2000 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing November, 2000 D-SMC.L.A. P-80 (D)

SY3000/5000/7000/9000

suppressor 24, 12, 6, 5, 3 VDC M8 connector Electrical entry for D, Y Electrical entry for G, H, L, M, W LN, MN type: with 2 sockets.