IDUS/IDFS

Note 2) Refer to page 14-18-9 for further information of options. Note 3) Combination of L and M is not available. 14-18-6 7 The models IDF1E to 11E and IDU3E to 6E have been revised. For details, refer to catalog no. ES30-8A. Similar updating for other IDF/IDU models is scheduled to follow shortly.

Made to Order Specifications:

Refer to How to Order for standard specifications on pages 14-20-3, 16, 23, and 31.

7

14 120 52 113 82 52.5 ( ): Denotes the Normally Open (N.O.) dimensions. 154 Pilot Operated 2 Port Solenoid Valve VXD Series High temperature oil Heated water Replacement Parts DIN Connector Part No.

Wireless System

A B A 14 A B A B A 14 A B A 14 A B 3 2 A 14 U side D side D side U side 0 1 5 4 2 3 B 12 B 12 B 12 B 12 B 12 7 8 1 2 3 4 5 Valve stations EX600-ED4 1 set EX600-WEN1 1 set EX600-EU1 1 set SS5Y3-10S6WE72-05B-C6 (Type 10 5-station manifold base, Wireless EtherNet/IP) Negative common, M12 connector IN/OUT pin arrangement 1, I/O unit: 2 stations * SY3100-5U1 3 sets (2-position single part no

LC6D/LC6C

18 Interface cable 7 9 8 Power cable 14 Power cable b View b View a a Wiring Signal description Cable description Color Pin no.

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

14 Power cable b View b View a a Wiring Cable description Color Signal description Pin no.

Safety Instructions

Using the equipment out of the specified range could cause the equipment to be damaged, malfunction, or operate improperly. 14-14-7 5 Air Preparation Equipment Precautions 3 Be sure to read before handling.

Series AP500

Please contact SMC. 3) 14 to 194F (10 to 90C) for Vespel seat. 4) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa). 5) Tested with Helium gas inlet pressure 1000 psig (7 MPa). 6) On panel mount option, bonnet port is not threaded. 7) Mass, including individual boxed weight, may vary depending on connections or options.

Series CQ2

(between lead wire and case) Ambient temperature ... 10 to 60C (14 to 140F) Enclosure . IEC529 standard IP67, watertight (JISC0920) Weight Table Unit: g (oz.)

Large Bore Compact Cylinder Series CQ2

(between lead wire and case) Ambient temperature ... 10 to 60C (14 to 140F) Enclosure . IEC529 standard IP67, watertight (JISC0920) Weight Table Unit: g (oz.)

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

NPN PNP Power supply 24 VDC for I/O signal CN4 Power supply 24 VDC for I/O signal CN4 1 COM+ COM+ 1 COM COM 2 2 Load Load 3 3 OUT0 OUT0 Load Load 4 4 OUT1 OUT1 Load Load 5 5 OUT2 OUT2 Load Load 6 6 OUT3 OUT3 Load Load 7 7 BUSY BUSY Load Load 8 8 ALARM ALARM 9 9 IN0 IN0 10 10 IN1 IN1 11 11 IN2 IN2 12 12 IN3 IN3 13 13 RESET RESET 14 14 STOP STOP Input Signal Output Signal Name Details Name

33

14 Circulating fluid pressure [MPa] Circulating fluid pressure [MPa] Outlet: 60 Hz Outlet: 60 Hz 0.12 0.12 12 12 0.10 0.10 Pump head [m] Pump head [m] 10 10 0.08 0.08 8 8 Outlet: 50 Hz Outlet: 50 Hz 0.06 0.06 6 6 0.04 0.04 4 4 Allowable operating range Allowable operating range Return port Return port 0.02 0.02 2 2 0.00 0.00 0 2 4 6 8 10 12 14 16 0 2 4 6 8 10 12 14 16 Circulating fluid flow

EXxx-OMZ0016

To use 8-14 frequency channels, neighboring frequencies need to be separated by 2 MHz.

3 Port Solenoid Valve/

Piping adapter Spacer with Bracket Mounting Position Dual residual pressure release valve (-X538) Dual residual pressure release valve with soft start-up function (-X555) (Max. 10) 201.8 82.9 (14) (14) 201.8 (Max. 10) 82.9 IN OUT IN OUT d c b a d a b c Model a b c d Note Model a b c d Note VP544-5DZ1-03-X538 33.9 57.2 95.7 220.7 AW30-03G-A Y300T-A E300-03-A VP544-5DZ1-03-X555 33.9 57.2 129.2

Multi-Axis Step Motor Controller

Actuator side (14) (18) A1 B1 (17.7) A 10*1 (13.5) B 15*1 A6 B6 1 2 C 20*1 Connector D (14.7) 15 16 Connector A (30.7) L (11) (10) *1 Produced upon receipt of order (Robotic cable only) Cable color Connector C terminal no. Brown 2 Red 1 Orange 6 Yellow 5 Green 3 Blue 4 Signal Connector A terminal no.

EX600-DX_DY_DM_eng

1 FE - 3 2 1 0 3 2 1 1 0 25 24 23 22 21 20 19 18 17 16 15 14 25 24 23 22 21 20 19 18 17 16 15 14 Digital I/O unit Digital output unit EX600-DM E EX600-DM F EX600-DY E EX600-DY B EX600-DY F Configuration Configuration Configuration Configuration Configuration 3 4 1 2 5 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 2 1 3 5 4 7 6 9 8 11 10 13 12 2 1 3 5 4 7 6 9 8 11 10

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

17.5 M8 x 1.25 18 10 20 M14 x 1.5 30 17 66 50 11 52 176 10 53 88.5 M16 x 1.5 25 9 73 73 53 20 50 28 17 17 M10 x 1.5 20 12 22 30 19 73 63 11 55 194 10 60 95 M18 x 1.5 28 8 80 80 60 22.4 55 30 17 17 M10 x 1.5 22 12 25 30 21 80 80 13 65 212 12 75 115 M22 x 1.5 32 8 100 100 75 28 65 32 22 20 M12 x 1.75 26 14 29 35 26 90 100 13 80 234 14 90 139 M27 x 2 38 6.5 118 118 90 35.5 80 35 27 19 M12 x

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

710 670 20 700 230 120 222 2 1 14-13-14

Direct Operated Precision Regulator Modular Style Series ARP3000 1

AL 14-4-65

Electro-pneumatic Proportional Valve Series VEF/VEP 1

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Power amplifier with feedback circuit Control circuit Electro-pneumatic proportional valve Pressure sensor Caution VEXP3141 1. Air supply Poor quality air could increase the spools sliding resistance, while preventing it from attaining its specified characteristics.