Piping: Base Mounted, Stations & Port Location: 16 Stations (Type 21, 41, 42), Port Size: NPTF1/8

Piping: Base Mounted, Stations & Port Location: 2 Stations Type 20, 21, 41 and 42, Port Size: One-touch Fitting for 5/16" Tube

Piping: Base Mounted, Stations & Port Location: 3 Stations Type 20, 21, 41 and 42, Port Size: One-touch Fitting for 5/16" Tube

Piping: Base Mounted, Stations & Port Location: 4 Stations Type 20, 21, 41 and 42, Port Size: One-touch Fitting for 5/16" Tube

Piping: Base Mounted, Stations & Port Location: 6 Stations Type 20, 21, 41 and 42, Port Size: One-touch Fitting for 5/16" Tube

Piping: Base Mounted, Stations & Port Location: 8 Stations Type 20, 21, 41 and 42, Port Size: One-touch Fitting for 5/16" Tube

Piping: Base Mounted, Stations & Port Location: 10 Stations (Type 20, 21, 41, 42), Port Size: One-touch Fitting for 5/16" Tube

Piping: Base Mounted, Stations & Port Location: 11 Stations (Type 20, 21, 41, 42), Port Size: One-touch Fitting for 5/16" Tube

Piping: Base Mounted, Stations & Port Location: 5 Stations Type 20, 21, 41 and 42, Port Size: One-touch Fitting for 5/16" Tube

Piping: Base Mounted, Stations & Port Location: 7 Stations Type 20, 21, 41 and 42, Port Size: One-touch Fitting for 5/16" Tube

Piping: Base Mounted, Stations & Port Location: 9 Stations Type 20, 21, 41 and 42, Port Size: One-touch Fitting for 5/16" Tube

LMU100/200 Series Mist Spray Unit

1 Lubrication plug 5 81021-7 Brass 1 Filler seal 6 81021-8 1 Level gauge 7 Hard glass 81021-9 1 Type C retaining ring for hole 8 Stainless steel FG00193 1 O-ring 9 FKM KA00622 2 Pressure gauge 10 G46-10-01 1 Pressure gauge 11 G46-4-01-L 1 Pilot valve 12 81022P 1 O-ring 13 NBR KA00078 1 O-ring 14 FKM KA00099 2 Regulator 15 INA-13-717 1 VO307KG1-X328 1 2 5 1 2 5 VO315-00 G Solenoid valve 16

ChemicalThermo-con

DC cable 16.4 ft (5 m) Alarm output connector 4.3 (110) Signal cable 16 ft (5 m) 4.1 (103) 2.6 (65) 1.06 (27) 3.9 (100) 5.1 (130) Circulating fluid outlet (1.2 )30)) 12.6 (320) 0.8 (20) 0.8 (21) Terminal block Display panel 6.7 (170) 5.6 (143) 4.7 (120) AL SI 8.5 (215) OUT FG B B A FG + EXT.SENSOR REMOTE ON/OFF 3.8 (97) 3.1 (79) ALARM PURGE OUT PURGE IN SIGNAL Purge inlet (M5) Fluid leak

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

L1 L2 L3 L4 L5 L6 L7 (1) L8 D Model Bore size VCHC AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 5 17 54.5 16 15.5 50 30 10 4.5 ASS 1 4 1 4 2 x M4 x 0.7 11.5 17 56 51.5 40 5 23 20 30 4.5 Effective thread depth 6 Reference dimensions 8 3 45.5 5.25 20.6 61 13.2 68 56 25 26 5.5 ASR ASQ Note 1) L7: Reference dimensions Dimensions: AS5000 2 x 1/4 to 1/2 2-1/4 to 1/2 74.9 (Max. 82.9) 2

Speed Controller: Standard Type In-line Type AS Series

L1 L2 L3 L4 L5 L6 L7 (1) L8 D Model Bore size ASV AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 5 17 54.5 16 15.5 50 30 10 4.5 AK 1 4 1 4 2 x M4 x 0.7 11.5 17 56 51.5 40 5 23 20 30 4.5 Effective thread depth 6 Reference dimensions 8 3 45.5 5.25 20.6 61 13.2 68 56 25 26 5.5 VCHC Note 1) L7: Reference dimensions Dimensions: AS5000 ASR ASQ 2 x 1/4 to 1/2 2-1/4 to 1/2 74.9 (Max. 82.9)

AZ1000

(ASME B40.1 Grade A) psig/bar 4) (No code) Accuracy Cleanliness No oil ASME B40.1 level IV No oil Stainless steel Polycarbonate 316L SS 316L SS Case Window Socket Bourdon tube Material MPA MPa 1.14 (29) 2.28 (57.8) 2 (50.7) 2.13 (54.1) 3/4 HEX 9/16-18 UNF 0.73(18.5) inch (mm) For AK/BP series (Installed before shipment / Order separately) Stainless steel / Lower mount Model Specifications

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Two switch spacers are included with the product with built-in magnet. 906 Rotary Actuator 11-CRA1-Z Dimensions: Basic Type, 11-CRA1S30 Size: 30 Single shaft Double shaft 75 10 8 6 0 0.2 8 (g6) 7.8 0 0.2 28 Auto switch 8 x M5 x 0.8 depth 6 (Opposite side 4 locations) 28 40 4 x 6 (Mounting hole) 9 16 0 0.1 8g6 9.2 14 3 M5 x 0.8 (Vacuum suction port) 0 0.025 3 2 x Cushion valve (Width across

VZM500

3 Stainless steel y POM u POM 5-6-42 5 Port Mechanical Valve Series VZM500 Series VZM500 Basic VZM550-01-00 Accessory mounting hole (Pilot exhaust port) SA JIS Symbol VA SA VA 0.5 MPa supply VM 1.0 mm P.T. 16 N F.O.F. VR 2-3.2 mounting hole 2.0 mm O.T. 3.0 mm T.T.

Smooth Vent Valve

Main air suppy flow adjustment screw Initial air supply flow adjustment nut 11 Holding screw for initial air supply (M5) 82.5 9 MODEL M port M5 x 0.8 PRESS. 0.2MPa~10Pa 0.4~0.7MPa OPERATING PRESS IN Main air supply valve port TEMP. 5~60C S port M5 x 0.8 Initial air supply valve port MADE IN JAPAN (32) M S 52 (Body dimension) 65.8 (XVD2-02S) 41 0.2MPa~10 Pa 0.4~0.7MPa 5~60C IN 11 MADE IN

Counter/Extension Cable

CV MVGQ + 0.05 0.00 0010.00 0.02 0010.03 OK CC RB J If the workpiece dimension + 0.05 0.02 the product is good. 10 is within , D-X 20Data 10-12-41