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. : MH-G04 (30 g) 706 MHY2 Series 180 Angular Type Air Gripper Cam Type Dimensions MHY2-10D Pin hole positioning 30 9 9 2 x M3 x 0.5 thread depth 4 4 (Thread for mounting attachment) 4 x M3 x 0.5 through (Mounting thread) 3H9+ 0.025 0 depth 3 6 0.005 0.025 4 4 x M3 x 0.5 thread depth 6 3 6 (Mounting thread) 2 x 3.4 through 2 x M3 x 0.5 depth 6 12 (Mounting hole) (Mounting thread) (Limted

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 48 5 11 56 VXA 1 6 VN 1 8 5 M5 M5 LVC 2 (OUT) port M5, 1/8 1 (IN) port M5, 1/8 1 (IN) port 2 (OUT) port LVA 15 LVH 2-M2.5 x 0.45 2-M3 x 0.5 thread depth 5 LVD Thread depth 3.5 VDW31 LVQ 36 (27.6) LQ 300 Lead wire LVN 40 30 SMC SMC 1 1 TI/ TIL AC

x 0.5 When not equipped with bracket, the M3 threads at both ends (4 positions) can be used for other purposes. (16.3) 11.5 7.7 7.7 11.5 5 22.5 40 7.5 L dimensions n (stations) Dimensions 3 4 6 8 2 9 5 7 10 52.5 L1 70 105 140 35 157.5 87.5 122.5 175 62.5 L2 80 115 150 45 167.5 97.5 132.5 185 69.5 L3 87 122 157 52 174.5 104.5 139.5 192 3 stns. x 1 2 stns. x 2 3 stns. x 2 2 stns. + 3 stns

Bracket B Bracket A Bracket D Mounting screw M4 x 5L Mounting screw M3 x 5L The tightening torque for bracket mounting screw should be 0.5 to 0.7 Nm for M3 and 1.4 to 1.6 Nm for M4. Set Pressure Range and Rated Pressure Range Caution Set the pressure within the rated pressure range. The set pressure range is the range of pressure that is possible in setting.

Mounting with brackets Mount a bracket to the using two M3 x 5L mounting screws and install on piping. The switch can be installed horizontally depending on the installation location. PSE IS Mounting screw M3 x 5L Mounting screw M3 x 5L ISG ZSM The tightening torque for bracket mounting screw should be 0.98 Nm or less.

PF2A ZS-36-A1 ZS-36-A2 ZS-36-A3 ZS-36-A4 ZS-36-A5 2 L-type brackets, 2 mounting screws M3 x 15L For 1 station (for single unit) For 2 stations 2 L-type brackets, 2 mounting screws M3 x 25L PF2W For 3 stations 2 L-type brackets, 2 mounting screws M3 x 35L For 4 stations 2 L-type brackets, 2 mounting screws M3 x 45L PF2D For 5 stations 2 L-type brackets, 2 mounting screws M3 x 55L IF 951

AMD Micro mist separator Nominal ltration rating: 0.01 m Oil mist density at outlet: 0.1 mg/m3 Body size Symbol Flow capacity 70D 7 m3/min (ANR) 80D 11 m3/min (ANR) 90D 14.5 m3/min (ANR) Option Symbol Symbol Description Max. operating pressure [MPa] Nil Auto drain 1.0 H Auto drain 1.6 J Drain guide 1.6 Main line lter 1 2 Thread type Port size L Options H and J cannot be selected simultaneously

M3 tightening torque: 0.63 to 1Nm. Do not touch equipment other than the terminal block during wiring. 3. Put back the front panel. [Remote control] Voltage is applied to the terminal block. Be sure to turn off the switch with lamp before wiring. 1) Disconnect the wires from no. 5 and 6 of the terminal block and mount the external switch.

M3 tightening torque: 0.63 to 1Nm. Do not touch equipment other than the terminal block during wiring. 3. Put back the front panel. [Remote operation] Voltage is applied to the terminal block. Be sure to turn off the switch with lamp before wiring. 1) Disconnect the wires from no. 5 and 6 of the terminal block and mount the external switch.

M3 6.5mm 1.25mm 2 M3 6.5mm 1.25mm 2 IDFA100F150F 1 6 1.3 IDX-OM-U022 2. 2.1 45 45 45 IDFA100F150F 2 1 2.1 IDX-OM-U022 2. 2.2 2.2.1 (1) (85%) () B C 245050 () 2000m ) (2) IDFA100F150F 2 2 2.2 IDX-OM-U022 2. 2.2.2 P.6-3 6.3 IDF-AB501 14 1 1 1 4 5 2 3 1 600mm 600mm 600mm 600mm 600mm 1 IDFA100F150F 2 3 2.2 IDX-OM-U022 2. 2.2.3 60 60 .

Description Part number Remarks Bracket A ZS-38-A1 Mounting screw (M3 x 5L, 2 pcs.) Bracket B ZS-38-A2 Mounting screw (M3 x 5L, 2 pcs.) Bracket C ZS-38-A3 Mounting screw (M3 x 5L, 2 pcs.) Panel mount adapter ZS-27-C Mounting screw (M3 x 8L, 2 pcs.) Panel mount adapter + Front protective cover ZS-27-D Mounting screw (M3 x 8L, 2 pcs.)

x 0.5 depth 5 2-1.2 (Guide air release) 9 + Stroke 5 [ 6.7] 20.5 20.5 20.5 3 5 28 29 9 2 [Auto switch] 2-M3 x 0.5 (port size) 6.1 + Stroke 8.4 6 9 12 14.5 10 2-M3 x 0.5 through 2-4.3 through Counterbore 8 depth 0.5 25 + Stroke 8 5 19 + Stroke 10.5 + Stroke [ 24.5] 4-M4 x 0.7 depth 5 2-2 through (Guide air release) 6 [ 6.7] 5 32 23 11 23 33 23 3 6 [Auto switch] 2-M3 x 0.5 (Bore size) 8.6

x 0.5 When not equipped with bracket, the M3 threads at both ends (4 positions) can be used for other purposes. (16.3) 11.5 7.7 7.7 11.5 5 22.5 40 7.5 L dimensions n (stations) Dimensions 3 4 6 8 2 9 5 7 10 52.5 L1 70 105 140 35 157.5 87.5 122.5 175 62.5 L2 80 115 150 45 167.5 97.5 132.5 185 69.5 L3 87 122 157 52 174.5 104.5 139.5 192 3 stns. x 1 2 stns. x 2 3 stns. x 2 2 stns. + 3 stns

The smoothness of the surface and closeness of the oxidize layer can effect (increase/decrease) this. 7 Ultimate pressure Ultimate pressure is P=Q/S, where the sum of mass flow rates for outgassing (Qg) and leakage (Ql) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, QlS shown as above, and the ultimate pressure of the pump itself.

8 10 10 0 L/min (ANR) ISO Class 7 ISO Class 7 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] ISO Class 6 ISO Class 6 10 10 0 L/min (ANR) 50 L/min (ANR) ISO Class 5 10 10 ISO Class 5 30 L/min (ANR) 1000 1000 ISO Class 4 ISO Class 4 90 L/min (ANR) 100 100 50 L/min (ANR) 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter [m] Particle

10 Definition and terminology 11 Mounting and Installation 14 Installation 14 Wiring 15 Wiring 15 Internal circuit and wiring example 16 Easy Setting 17 Measurement mode 17 Function Setting 20 Function selection mode 20 Default setting 20 F0 Unit selection function 22 F1 OUT1 23 F2 OUT2 25 F3 Response time 27 F4 Auto-preset 28 F6 Fine adjustment of display value 30 F11 Display resolution 31

No.PF-OMJ0005CN-I () // PFM7## 2 10 13 14 14 16 17 20 22 22 F0 23 F1 OUT1 24 F2 OUT2 27 F3 28 F4 29 F5 30 F6 31 F7 32 F8 35 F9 36 F10 38 F11 39 F12 40 F13 41 F98 42 F99 44 45 49 50 53 54 54 57 59 73 -1No.PF-OMJ0005CN-I (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

When hysteresis mode is selected: Refer to page 31. When window comparator mode is selected: Refer to page 32. When accumulated output mode is selected: Refer to page 33. When accumulated pulse output mode is selected: Refer to page 35. -30No.PF-OMP0002-H a. When hysteresis mode is selected Set value [P_1] or [n_1] and [the current set value] are displayed in turn.

0999,999,999 ft 0.1 cfm 3 1 ft 3/pulse 1 ft 3/pulse 0.1 ft -0.918.6 cfm -1.837.1 cfm -3.674.2 cfm (-0.20.2 [ 0]) (-0.40.4 [ 0]) (-0.80.8 [ 0]) 3 0999,999,999 ft 0.1 cfm 3 1 ft -27No.PF-OMP0001CN-F [F 1] OUT1 OUT1 ( )OUT2 0 ON 0 OFF 0 ON 0 OFF -28No.PF-OMP0001CN-F ( )OUT2 3 3 3 3 3 3 ON OFF ON OFF OUT2 -29No.PF-OMP0001CN-F <>OUT1 [F 1] [F 1][oU1] [oU1][] [1ot][] 31