Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (Pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CW2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231 334.5 265.5

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

piping type VV VV 2-Rc 1/4 (Hexagon socket head taper plug) 2-Rc 1/4 (Hexagon socket head taper plug) S 1.1 WX 17.5 Bottom ported (ZZ) (Applicable O-ring) 2-10 Y GC 12 15 J M14 x 2 M16 x 2 MM M8 x 1.25 M10 x 1.25 A 212 245 B 17 19 C 10.5 12.5 CH 41.5 47.0 G 27.0 29.5 GA 25.0 27.5 GB 37.5 39.5 H 124 149 K 28 32 L 250 290 LD 11 14 LH 57 65 LL 87 100 LW 168 200 M 15 16 N 47 50 NC 44 60 NE 122

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

plug) G NW A GB N Z + Stroke Rc 3/8 WW WW (Hexagon socket head taper plug) Rc 3/8 Rc 3/8 (Port) Rc 3/8 (Port) (Hexagon socket head taper plug) XX XX Centralized piping type Centralized piping type VV VV 2-Rc 1/4 (Hexagon socket head taper plug) 2-Rc 1/4 (Hexagon socket head taper plug) S 1.1 WX 17.5 Bottom ported (ZZ) (Applicable O-ring) 2-10 Y GC 12 15 J M14 x 2 M16 x 2 MM M8 x 1.25 M10

Power Valve Precision Regulator

IR-A How to Order IR VVEXB 5 01 1 IRV VEX VEX Body size Thread type Nil F N T Port size Rc G Note) SRH Pilot type Internal pilot Common external pilot Valve stations 01 8 1 1 2 NPT NPTF SRP 2 2 stations SRF 10 10 stations ITV VVEX2 5 02 1 IC Body size Thread type Rc G Note) ITVH Port size Nil F N T Pilot type 4 1 02 ITVX 1 2 NPT NPTF Internal pilot Common external pilot 2 stations Valve stations

Series IDG

This is not applicable to the V type since it is equipped with a relief type regulator, 100 Note 2) This is not applicable in case of thread type symbols N and F, because barrel nipples are used for equipment connections.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

Mounting style Number of auto switches Nil L F G D Basic style Transaxial foot style Rod flange style Head flange style Double clevis style Nil S n 2 pcs. 1 pc. n pcs.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

1in = 25.4mm W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CL2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231

CS1

CS1L125SCS1125, #2 CS1L140SCS1140, #2 CS1L160SCS1160, #2 CS1L180SCS1180, #2 CS1L200SCS1200, #2 CS1L250SCS1250, #2 CS1L300SCS1300, #2 The drawing shows with an auto switch.

AIR FILTER

AF-OMQ0004-C PRODUCT NAME AIR FILTER MODEL / Series / Product Number AF10-M5(C)(-2,6,R,Z)-A AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,R,Z)-A AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-A AF50-(F,N)06(F,N)10(B)(-2,6,8,J,R,W,Z)-A AF60-(F,N)10(B)(-2,6,8,J,R,W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

[White] Blue [Black] Black [White] Switch 1 Switch 1 Load Switch 1 Relay Load Relay contact Blue [Black] Blue [Black] Brown [Red] Brown [Red] Brown [Red] Relay Black [White] Black [White] Blue [Black] Black [White] Switch 2 Switch 2 Switch 2 Blue [Black] Blue [Black] The indicator lights will light up when both switches are turned ON. 2 wire with 2 switch AND connection 2 wire with 2 switch

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Refer to the basic type for the female rod end. 732 1011Series CG1R-Z 20, 25, 32, 40, 50, 63 Direct Mount Cylinder How to Order 10 C D G 1 R N 25 100 Z M9BW N Type Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

HRX-OM-X084

1-5 1.7 Waste Disposal . 1-6 1.7.1 Disposal of refrigerant and compressor oil . 1-6 1.7.2 Disposal of product . 1-6 1.8 Material Safety Data Sheet (MSDS) . 1-7 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.1.1 HRR010-A-10. 2-1 2.1.2 HRR010-W-10. 2-2 2.1.3 HRR010-A-20. 2-3 2.1.4 HRR010-W-20. 2-4 2.2 Name and Function of Parts . 2-5 2.2.1 HRR010-A-10/20. 2-5

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

-260S ARP40P-260S G49-4-l01 G49-4-l02 0.4 MPa G49-2-l01 G49-2-l02 0.2 MPa Round type Note 2) G49-7-l01 G49-7-l02 0.7 MPa Pressure gauge ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Digital type Note 4) ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

-260S ARP40P-260S G49-4-l01 G49-4-l02 0.4 MPa G49-2-l01 G49-2-l02 0.2 MPa Round type Note 2) G49-7-l01 G49-7-l02 0.7 MPa Pressure gauge ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Digital type Note 4) ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom

HRX-OM-X027

and Fig. 5.2-2 Key operation (2/2) show the operation of keys of the thermo-chiller.

2-Color Display

Suction Verification High Vacuum Suction Work 1 Work 2 Work n Max. A Formula for Obtaining the Set-Value P-1 P_1 or P_2 H_1 or H_2 H-1 P_1 (P_2) = A (A-B)/4 n_1 (n_2) = B + (A-B)/4 H_1 (H_2) = (A-B)/2 n-1 Min.

JXCx-OMT0032CN

0,n+1OUTData n+0,n+1(LEC) IO IO(LEC) 11.3 (LEC) IO ON IOON IONo IO(LEC) (LEC) 124(5) 29 - (ID=1) OUT Data n+20 OUT Data n+3n+19 (LEC)7.1 OUT Data n+21(LEC) (IN Data.n+19[bit 0]=1) INP(IN Data n+1[bit 3])1 INP(LEC*6)6.3IO OUT Data n+20( IN Data n+19[bit 0])0 () INP 30 - 11.4 (LEC) IONo(LEC*6)IO IO(LEC) OUT Data n+30 OUT Data n+4n+18 (LEC)7.1 OUT Data n+2(063) OUT Data

VQ

SY SYJ (L5) Plug assembly (L4) VK 2-4.5Mounting hole 1 2 3 VVQ100-12A(L3) 88 (8.5) L2 VZ 48.7 L1 VT VT (45) (35) 33 25 (5.5) VP 23.5 12.3 VG R11 Manual override 21.5 (Min. bending inner radius) (29.3) VP 104 VQ VQZ Stations 1 2 3 4 5 n Dside Uside VZ 2-M5 X 0.8(E port) VS 2-M5 X 0.8(P port) 42.9 A A 20 (8.5) 1.5 5 n-M5 X 0.8 (A port) 5 (7.5) 15 P=10 38 Equation: L1=10n+32 L2=10n+43

Plug-in/Plug Lead: Single Unit

M5 ground screw 9 9 2n-Rc 1/2 4(A), 2(B) port VQ0 U side 34.5 VQ4 n X 12 X 12 VQ5 B 2 A 4 6 B B B B B B A A A A A A VQZ B 2 A 4 VQD 5 SMC SMC SMC SMC SMC B 2 A 4 4 L1 L2 B 2 A 4 3 B 2 A 4 2 P = 41 P = 41 B 2 A 4 1 Cable length (600 or 1500 mm) 58.5 34.5 48 68.5 Stations D side 42 16 15.5 61.8 133 22 51 69 117 2-Rc 1/8 (External pilot port) Dimensions Formula: L1 = 41n + 76, L2 = 41n + 96

VK3000

S070 VQD VQD-V Plug position B port N. C. A port N. O.