ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Accessories Symbol Specifications -XA -XB6 -XC4 Mounting Basic Foot Rod flange Head flange Single clevis Double clevis Center trunnion Change of rod end shape Heat resistant cylinder (150C) Rod end nut Clevis pin With heavy duty scraper Standard Tie-rod, cushion valve, tie-rod nut, etc. made of stainless steel -XC7 Piston rod ball joint Rod clevis Rod boot Option -XC10 -XC11 -XC22 -XC35 Dual

Compressed Air Cleaning Filter Series

Nominal filtration rating: 0.01 m [Filtration efficiency: 99.9%] Oil mist density at outlet: Max. 0.1 mg/m3 (ANR) [0.08 ppm] 150C 1/8, 1/4 200 250C 1/4, 3/8 500 350C 3/8, 1/2 1,000 Piping support type 450C AMH 1/2, 3/4 2,000 550C 3/4, 1 3,700 1, 1 1/2 650 6,000 1 1/2, 2 850 12,000 AMH150C to 550C AMH650/850 150C 1/8, 1/4 200 Dust filtration, Oil mist adsorption Dust filtration, Oil mist adsorption

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

area (mm2) Operating direction 1.0 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 MGC Made to Order Specifications (For details, refer to pages 1829 to 2021.) 113 102 90 79 68 57 45 0UT 34 23 113 12 6 85 77 68 60 51 43 34 IN 26 17 85 MGF 201 181 161 141 121 101 80 0UT 60 40 201 Symbol Specifications 16 8 XA MGZ 151 136 121 106 91 76 60 IN 45 30 151 Change of rod end shape Heat resistant cylinder (10 to 150C

Air Cylinder: Standard Type Double Acting, Single Rod Series CJ2 ø6, ø10, ø16 How to Order Bore size 6 6 mm Built-in Magnet Cylinder Model 10 10 mm Suffix the symbol “-A” (Rail mounting style) or 16 16 mm “-B” (Band mounting style) to the end of part Mo

Symbol Specifications XA Change of rod end shape XB6 Heat resistant cylinder (150C) Not available with switch & with air cushion XB7 Cold resistant cylinder Not available with switch & with air cushion XB9 Low speed cylinder (10 to 50 mm/s) Not available with air cushion XB13 Low speed cylinder (5 to 50 mm/s) Not available with air cushion XC3 Special port location Not available with

Guide Cylinder/Compact Type ø 20, ø 25, ø 32, ø 40, ø 50 Series MGC

MGF Theoretical Output MGZ Symbol Specifications OUT IN -XB6 Heat resistant cylinder (10 to 150C) (N) MGT -XB13 Low speed cylinder (5 to 50 mm/s) Operating direction Piston area (mm2) Operating pressure (MPa) Bore size (mm) Rod size (mm) -XC4 With heavy duty scraper 1.0 0.9 0.8 0.7 0.6 0.5 0.3 0.4 0.2 -XC6 Made of stainless steel 314 283 251 220 188 157 126 0UT 314 62.8 94.2 20 8 -XC8 Adjustable

High Vacuum Angle Valve

(Option) Amplifier Heater (Option) Ambient temperature: Max. 150C (Sensor) 2-color indicator An optional heater is available. Auto switches are mountable from 4 directions.

ISO Standard (15552) Air Cylinder: Standard Type Double Acting, Single/Double Rod ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 CP96 Series

Symbol Specifications -XA Change of rod end shape -XB6 Heat-resistant cylinder (10 to 150C) -XC4 With heavy duty scraper Mounting Basic Foot Rod ange Head ange Single clevis Double clevis Standard Rod end nut V V V V V V Clevis pin V Option Rod end V V V V V V Rod clevis V V V V V V Rod boot V V V V V V -XC7 Tie-rod, tie-rod nut, etc. made of stainless steel -XC10 Dual stroke cylinder/Double

High Vacuum Angle Valve, XL Series

Residence time of water at 20C is 5.5 x 10-6 sec, whereas at 150C it is 2.8 x 10-8 sec, or 200 times shorter. As an example, it took 800 minutes to evacuate moist air from a 150mm x 500mm P/A test chamber to 10-9Torr. The same process took only 4 minutes with dry (20ppb) nitrogen.

Rotary Clamp Cylinder: Standard ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 MK Series

Accessories -XB6 Heat resistant cylinder (-10 to 150C) w/o auto switch only Note 1) MK-A012Z MK-A016Z MK-A020Z 12 16 20 25 32 40 50 63 Clamp bolt, Hexagon socket head cap screw, Hexagon nut, Spring washer -XC22 Fluororubber seals Note 2) Note 1) Except 12 and 16. Note 2) The bumper is a standard product.

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

625 825 980 1400 1560 0.7 56 77 105 140 139 208 258 341 418 557 731 870 1149 1365 1950 2172 1.0 80 110 150 200 200 298 370 490 600 800 1050 1250 1648 1961 2801 3121 R H R H R H R H R H R H R H R H 12 6 16 8 Clamp part 20 12 Non-rotating accuracy 0.7 to 1.4 During clamping (Retraction end) 25 12 32 16 Made to Order (For details, refer to page 40.) 40 16 50 20 XB6 Head resistant cylinder (150C

CM2 Series ø 20, ø 25, ø 32, ø 40 Air Cylinder: Standard Type Double Acting, Single Rod

Symbol Specifications -XAl Changeofrodendshape -XB6 Heat resistant cylinder (10 to 150C) -XB7 Coldresistantcylinder(40to70C)*1 Option: Ordering Example of Cylinder Assembly -XB9 Lowspeedcylinder(10to50mm/s)*1 -XB12 Externalstainlesssteelcylinder*2 -XB13 Lowspeedcylinder(5to50mm/s)*2 Cylinder model: CDM2C20-50Z-NV-M9BW -XC3 Specialportlocation -XC4 Withheavydutyscraper -XC5 Heat resistant

Air Cylinder: Single Rod Series MB ø32, ø40, ø50, ø63, ø80, ø100, ø125

250, 300, 350, 400, 450, 500 CS2 50 1000 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Symbol Specifications -XA 63 1000 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Change of rod end shape -XB5 Oversized rod cylinder 80 1000 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 -XB6 Heat resistant cylinder (150C

Rodless Cylinder for Vacuum Series CYV ø15, ø32

(Atmospheric conditions) 0.1 Note 1) This data indicates deterioration with age of the average number of particles per operation under the following test conditions. 5.0 Particulate generation [particles/cycle] Cylinder: CYV32-100 Workpiece weight: 5 kg Average speed: 100 mm/s Measurement environment: Operation in the atmosphere after baking at 150C for 48 hours.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

MTS Cylinder: CYV32-100 Workpiece weight: 5 kg Average speed: 100 mm/s Measurement environment: Operation in the atmosphere after baking at 150C for 48 hours. Leakage [Pam3/sec] 10-8 MY Note 2) The leakage test result shown is based on a test conducted for 10 minutes after the cylinder was pressurized with helium at 0.1 MPa.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

(Atmospheric conditions) 0.1 Note 1) This data indicates deterioration with age of the average number of particles per operation under the following test conditions. 5.0 Particulate generation [particles/cycle] Cylinder: CYV32-100 Work piece weight: 5kg Average speed: 100mm/s Measurement environment: Operation in the atmosphere after baking at 150C for 48 hours.

Compact Guide Cylinder ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 MGP Series

MGP MGP Symbol Specications 12, 16 1 to 249 12, 16 11 to 249 20, 25, 32 1 to 399 20, 25 21 to 399 40 to 100 5 to 395 32 to 100 26 to 399 Applicable stroke [mm] -XA Change of guide rod end shape -XB6 Heat resistant cylinder (10 to 150C) -XB10 Intermediate stroke (Using exclusive body) -XB13 Low speed cylinder (5 to 50 mm/s) -XB22 Shock absorber soft type RJ series type -XC4 With heavy duty

ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

-XB6 Heat resistant cylinder (10 to 150C)*2 -XB7 Cold resistant cylinder (40 to 70C) -XB9 Low speed cylinder (10 to 50 mm/s) -XC4 With heavy duty scraper -XC6l Made of stainless steel Double knuckle joint * Mounting bracket, double knuckle joint, and auto switch are shipped together with the product.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

Mass Symbol Specifications (kg) XB6 Heat resistant cylinder (150C) 20 25 32 40 50 100 80 63 Bore size (mm) XB13 Low speed cylinder (5 to 50 mm/s) 16.6 26.32 37.46 11.63 7.19 3.84 2.82 1.72 LB Type (Ball bushing bearing, Basic style) Basic mass XC4 With heavy duty scraper 20.58 33 45.98 14.17 9.38 4.87 3.79 2.44 LF Type (Ball bushing bearing, Front mounting flange style) XC6 Made of stainless

How to Order MB Series ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Air Cylinder: Standard Type Double Acting, Single Rod

JMB [mm] Symbol Specications MB MB Bore size Standard stroke Max. manufacturable stroke Stroke range q Stroke range w -XA Change of rod end shape -XB5 Oversized rod cylinder*1 *2 *3 MB1 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Up to 1000 -XB6 Heat resistant cylinder (10 to 150C) -XC3 Special port location*3 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350,

CG1 Series ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Air Cylinder: Standard Type Double Acting, Single Rod

Symbol Specications -XAl Change of rod end shape -XB6 Heat resistant cylinder (10 to 150C)1 CA2 -XB7 Cold resistant cylinder (40 to 70C)2 CS1 -XB9 Low speed cylinder (10 to 50 mm/s) -XB13 Low speed cylinder (5 to 50 mm/s) -XC4 With heavy duty scraper -XC6 Made of stainless steel -XC8 Adjustable stroke cylinder/Adjustable extension type -XC9 Adjustable stroke cylinder/Adjustable retraction