VZM500

(Except push-pull) Note 2) For push button (mushroom), push button (extended), push button (flush) and a single unit of fastening ring, refer to pages 5-6-6 to 5-6-7. The other parts are not replaceable.

MGC

D-G79/K79/K79C 10 8 10 9 10 D-H7/H7W, D-H7BAL, D-H7NF 6 4 4 4.5 5 MTS D-H7C 9.5 7 8.5 9 10 D-G5/K59 MY D-G5W/K59W 6 4 4 4.5 5 CY D-G5NTL/G5BAL D-G59F 7 5 5 5.5 6 MG D-G5NBL 45 35 40 40 45 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Since this is a guideline including

MGQ

6 !7 !8 !

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Cushion Stroke Model Stroke (mm) 25 30 1 5 0.3 Model CYP15 CYP32 CYP15 CYP32 8-17-6 6 Clean Room Rodless Cylinder Series CYP 15, 32 How to Order MX CYP 15 Z73 200 MTS MY Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

6 Stainless steel #6 !7 Stainless steel Spring washer Flat washer Stainless steel #7 !8 Stainless steel Flat washer Top cover Electroless nickel plated Aluminum alloy #8 Electroless nickel plated Aluminum alloy !

10-cy1s-e

CY1S32-PS-N CY1S40-PS-N Piston seal NBR Set of left nos. @6, @7, @8, @9, #0, #1 Scraper NBR 6: Not available Note 1) Seal kit includes @7 to #0 for 6. @7 to #1 are for 10. @0 to #1 are for 15 to 40.

Bore Size: 10mm, Stroke: 6mm, Auto Switch: F8P--Solid State , Gen. Purpose, 3 Wire PNP, Vertical, Lead Wire: Z (5m Lead Wire)

Body Class: 4 (ø10 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 13 (1/2"), Output Tube Size: None, Pilot Connection: R (Thread Type 1/8 Rc), Pilot Port Direction: Direction 1, Option 1: 6 (High Back Pressure w/Flow Rate Adjustment)

Rated Distance Range: G (0.02 to 0.15mm), Piping Specifications: C (Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm), Output Specifications: P (PNP Output), Unit Specification: w/Unit Conversion Function, Stations: 6

Rated Distance Range: F (0.01 to 0.03mm), Piping Specifications: C (Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm), Output Specifications: N (NPN Output), Unit Specification: w/Unit Conversion Function, Stations: 6

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: C (Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm), Output Specifications: P (PNP Output), Unit Specification: w/Unit Conversion Function, Stations: 6

Size: 60, Options: 6 (0.1 to 0.6MPa Set Pressure Range)

Size: 20, Options: 6 (0.1 to 0.6MPa Set Pressure Range)

Size: 30, Options: 6 (0.1 to 0.6MPa Set Pressure Range)

Size: 40, Options: 6 (0.1 to 0.6MPa Set Pressure Range)

Size: 50, Options: 6 (0.1 to 0.6MPa Set Pressure Range)

Thread: N (NPT), Seal: S (Seal), Options: 6 (0.1 to 0.6MPa Set Pressure Range)

Thread: R, Seal: S (Seal), Options: 6 (0.1 to 0.6MPa Set Pressure Range)

Thread: N (NPT), Seal: None, Options: 6 (0.1 to 0.6MPa Set Pressure Range)

Thread: R, Seal: None, Options: 6 (0.1 to 0.6MPa Set Pressure Range)