Basic type / Direct mount type Series CY3B/CY3R

C Q + Stroke Shock absorber Shock absorber (mm) d B A H G FB FA D C L JK J HI HG Model CY1L15 CY1L20 CY1L25 CY1L32 CY1L40 HB HA GP EB EA LD HT HS HP HO 12 9.5 7.5 40 6.5 6 3 16.6 5 75 9.5 M6 x 1.0 14 16 4 6.5 65 13 6 5.6 16 25 39 38 16 9.5 9.5 46 8.5 21.6 5.2 86 10 M6 x 1.0 16 18 10 9 80 5.6 20 31 45 44 16 11 9.5 54 8.5 7 4 26.4 6.5 86 10 M8 x 1.25 21 23 18 9 90 14 8 7 20 39 53 52 20

Sine Rodless Cylinder Series REA/REB

7.5 45 44 10 18 16 9 8.5 80 46 16 9.5 5 21.6 9.5 REA 21 52 53 23 54 9 18 90 4 7 8.5 14 26.4 16 8 6.5 9.5 11 64 64 26.5 26.5 24.5 12 9.5 110 66 7 8 16 5 20 14 8 33.6 10.5 REB 28.5 76 74 30.5 78 12 35 130 5 10 10.5 20 41.6 25 10 8 11.5 14 REC Model HS HT J MM NN P JK L LD M N PA Nil TN TF CY REAL15 REAL20 REAL25 REAL32 REAL40 45 5.6 8 7.5 75 9.5 M6 x 1.0 M5 x 0.8 M8 x 1.0 21 25 M5 x 0.8

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Flow Rate and Sonic Conductance AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 Model AS121FM AS131FM Symbol Metric size 6,8 8,10 1/8",5/32",3/16",1/4" 3/16",1/4" 5/16" Tubing O.D. 3.2,4 3.2,4,6 4 6 1/4",5/16" 3/8" Inch size 1/8",5/32" 5/32" 3/16" Air flow (L/min(ANR)) 12 38 7 Controlled flow Sonic conductance dm3/(sbar) 0.04 0.12 0.02 Flow Direction Symbols on Body Critical pressure ratio 0.25

7ND9071en

L+ 14 Uo (Voc) Ui (Vmax) Io (Isc) Ii (Imax) Po Pi (Pmax) 15 L 15 16 L+ L+ 16 17 L L+ 18 Notes 1.

VQ4000

Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Hexagon socket head cap screw MYMK-16-A MYMK-16-A MYMK-25-A MYMK-25-A MYMK-25-A Side seal unit Nickel plated Seal List No. !

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

. 2 fingers 2 Bore size Number of auto switches 12 16 20 25 12 mm 16 mm 20 mm 25 mm Nil S 2 pcs. 1 pc.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

B C d H MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 8 9.2 6 15.5 5 9.2 M5 x 0.8 4 10 20.5 10 8 8 9.2 8 16.5 6 11.5 M6 x 1.0 5 16 22.5 16 10 8 9.2 10 18.5 6 15 M8 x 1.25 5 20 24.5 20 13 10 11.5 12 22.5 11 19.6 M10 x 1.25 6 25 33.5 25 17 14 16 16 28.5 12 25.4 M14 x 1.5 8 30, 40 40.5 30, 40 22 Applicable bore size (mm) Part no.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"

CG5-X6011

CB CD CE CW L A KK ER NI-150SUS 0.75 1.50 0.75 0.50 0.50 7/16-20 NY-150SUS 0.765 0.50 1.50 0.50 0.75 0.75 7/16-20 0.50 NI-325SUS 1.13 2.06 1.25 0.75 0.75 3/4-16 NY-325SUS 1.265 0.75 2.38 0.63 1.25 1.13 3/4-16 0.75 CP CD 1 CD 2 CL Pivot Pin Part No.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

(mm) D H Bore size B GA L LB GC GB C A LX LH MM NB Y X NA Z S LD 3.5 through, 6.5 depth of counterbore 4 9.5 28 8 M4 x 0.7 12 4 8 31.5 85 65 10 15 12 14 16 5 11 20 23 16 4.5 through, 8 depth of counterbore 5 5 9.5 16 15 18.3 20 16 5 11 20 26 20 8 28 M5 x 0.8 10 16 31.5 86 66 Specific Product Precautions Be sure to read before handling. Caution on mounting Caution 1.

13

-16 ZH20DL-12-16-16 12 12 12 12 114 40.95 30.5 15.8 3.5 15.8 20.95 20.95 114 40.95 30.5 15.8 3.5 15.8 26.75 124.6 45.95 32.7 15.8 3.5 17.2 26.75 124.6 45.95 32.7 15.8 3.5 17.2 I J K L M N O Model ZH18DS-12-12-12 ZH18DL-12-12-12 ZH20DS-12-16-16 ZH20DL-12-16-16 12 12 16 16 15.8 35.5 50 17 10 15.8 35.5 50 10 17.2 38.5 54.3 12 17.2 38.5 54.3 12 12 12 16 16 17 21.7 21.7 One-touch and screw-in

8

4 F Unit conversion URJ 16-13-5 F.S.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

17 15 16 17 14 16 16 14 16 17 14 16 18 9.0 9.0 9.0 0.30 0.15 0.15 0.30 0.15 0.15 0.25 0.25 0.25 0.32 0.17 0.20 0.30 0.23 0.25 0.30 0.15 0.13 0.30 0.15 0.13 0.24 0.24 0.23 0.25 0.18 0.13 0.31 0.22 0.22 4.1 4.5 4.7 4.1 4.5 4.7 4.1 4.1 4.1 3.5 4.1 4.1 3.8 4.1 4.3 3.7 3.7 3.9 3.7 3.7 3.9 4.0 4.1 4.1 3.8 3.8 4.2 3.7 3.9 4.6 15 19 20 15 19 20 14 16 16 14 16 17 14 16 17 9.0 9.0 9.0 VFS5600 VFS5110

44

17.8 20.4 10 14 10 14 12 16 20 24 27 38 41 51 37 41 50 41 45 57 42 43 53 72 78 KA 4 2.5 1.8 1.6 10 8 13.5 5 4 3 KQG2 2.3 2.6 Applicable tubing L1 M 6 4 6 10 10 15 5.8 3.3 KG H1 12 d 8 6 KFG2 KFG2 5.3 12 14 17.4 6.6 16 22.2 A L2 23 H2 MS 25.6 10 7.5 6.8 26 Connection thread 27.5 15 17 20.9 7.6 KKA 27 25.6 10 8 7.3 30 KP 27.5 27 25.6 12 9 8 LQ 35 27.5 16 17 23.5 8.5 34 MQR 25.6 12 10 9 44

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Hexagon socket head cap screw MYMK-16-A MYMK-16-A MYMK-25-A MYMK-25-A MYMK-25-A Side seal unit Nickel plated Seal List No. !

MU

-X +0.058 0 +0.058 0 +0.058 0 +0.070 0 3 4 5 6 13 14 17 23 18 22 26 32 9 11 13 16 8 10 10 14 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 8 10 10 16 21 24 27 39 8.5 10 11 16 11 14 15 20 8.5 10 11 16 19.5 24 26 36 CD-MU02 CD-MU03 CD-MU04 CD-MU05 9 11 13 16 20Knuckle pin and snap ring are included.

Electronic Pressure Switch Series (Separate Type)

-6-1 16-6-7 16-5-1 16-7-1 16-8-1 16-4-5 16-2-1 16-2-15 16-2-45 16-2-28 16-2-36 16-2-48 16-1-4 16-1-5 4 Mechanical Pressure Switch Series Mechanical Pressure Switch Series Model Selection Table Positive Pressure Negative Pressure IS3000 IS1000 ISG11/ISG21 ZSM1 ISG19/ISG29 ISG13/ISG23 ISG12/ISG22 Model Fluid General pneumatic General pneumatic General fluids Calibration method Pressure adjusting

Guide Cylinder Series MGG

52.5 38.3 11 111 M8 x 1.25 depth 16 1/4 58 25 164 94 75 67 285 47 14(16) 125(137) 14 58.5 44.5 16 128 M10 x 1.5 depth 21 Note) Rc, NPT and G ports can be selected.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Flow Direction Symbols on Body Flow Rate and Effective Area Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Symbol JIS Symbol Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled