Protocol: EtherNet/IPâ„¢, Mounting: DIN Rail Mounting, Cable Connector: w/o Plug Connector, Actuator: LEP, Type: Table Type, Body Size: 10, Motor Size: Basic, Lead: LEP*6: 8; LEP*10: 10, Stroke: 25mm

Protocol: EtherNet/IPâ„¢, Mounting: DIN Rail Mounting, Cable Connector: w/o Plug Connector, Actuator: LEP, Type: Rod Type, Body Size: 10, Motor Size: Basic, Lead: LEP*6: 8; LEP*10: 10, Stroke: 25mm

Clean Series: 10 (Clean Room), Stations: 05, Cylinder Port: C6 (w/One-touch Fitting for ø6), Kit: FS0 (w/o Cable, Side Entry), Option: BN (w/Back Pressure Check Valve, w/Name Plate)

Clean Series: 10 (Clean Room), Stations: 06, Cylinder Port: C6 (w/One-touch Fitting for ø6), Kit: FS0 (w/o Cable, Side Entry), Option: BN (w/Back Pressure Check Valve, w/Name Plate)

Clean Series: 10 (Clean Room), Stations: 07, Cylinder Port: C6 (w/One-touch Fitting for ø6), Kit: FS0 (w/o Cable, Side Entry), Option: BN (w/Back Pressure Check Valve, w/Name Plate)

Clean Series: 10 (Clean Room), Stations: 08, Cylinder Port: C6 (w/One-touch Fitting for ø6), Kit: FS0 (w/o Cable, Side Entry), Option: BN (w/Back Pressure Check Valve, w/Name Plate)

Cooling Capacity: 100 (10 kW), Cooling Method: W (Water-cooled), Pipe Thread: N [NPT, (w/Rc-NPT conversion Fitting)], Option: ABK (w/Caster Adjuster-foot, w/Earth Leakage Breaker, and Fluid Fill Port)

Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N1 (NPT1/8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)

Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C4 (ø4), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)

Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C6 (ø6), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)

Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: None (Straight), Port Size: C6 (ø6), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C6 (ø6), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)

Body Size: 10, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: M5, Option: G (Size 20 25, 30, 40: Round Type Pressure Gauge w/Limit Indicator; Size 10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: T (T-Interface), Semi-Standard 1: 1 (0.02 to 0.2MPa Setting), Semi-Standard 2: RZ (R + Z)

Body Size: 10, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: M5, Option: G (Size 20 25, 30, 40: Round Type Pressure Gauge w/Limit Indicator; Size 10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: Standard, Semi-Standard 1: 1 (0.02 to 0.2MPa Setting), Semi-Standard 2: R (Flow Direction: Right to Left)

Body Size: 30, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 03 (3/8), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: R (Flow Direction: Right to Left)

Body Size: 30, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 02 (1/4), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: R (Flow Direction: Right to Left)

Body Size: 20, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 02 (1/4), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: C (Bowl Guard), Semi-Standard 2: R (Flow Direction: Right to Left)

Body Size: 20, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 02 (1/4), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: R (Flow Direction: Right to Left)

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 03 (3/8), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: 1 (0.02 to 0.2MPa Setting), Semi-Standard 2: R (Flow Direction: Right to Left)

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 04 (1/2), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: R (Flow Direction: Right to Left)