VCHN

/4 11/2 1/4 VCH41(N.C.)

Card Motor

(Refer to page 11, [I/O cable] for details.) Note 3) The DIN rail is not included. If the DIN rail is required, please order separately.

Angle Seat Valve

Body material/Port size/Orifice diameter Symbol Body material Port size Orifice diameter A Bronze (CAC) 3/8 11 B 1/2 14 C 3/4 18 D Stainless steel 316L equivalent Pressure type Nil Standard H High pressure 3/8 11 E 1/2 14 F 3/4 18 Other Special Options Special Entry for Pilot Port/ Insulating Adapter Type VXB215 XCA Enter standard product number.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Nil S n Rc NPT Nil TN TF 21 22 Relief type Vacuum suction type G Cylinder stroke (mm) Rubber bumper only Model Cushion Auto switch mounting Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Port size Lubrication Model Rubber Air 10-/21-CM220 10-/21-CM225 10-/21-CM232 10-/21-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 Relief type Vacuum suction type 1/8 25,

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 6 10 16 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 5, 10, 15, 20, 25, 30

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Nil S n Rc NPT Nil TN TF 21 22 Relief type Vacuum suction type G Cylinder stroke (mm) Rubber bumper only Model Cushion Auto switch mounting Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Port size Lubrication Model Rubber Air 10-/21-CM220 10-/21-CM225 10-/21-CM232 10-/21-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 Relief type Vacuum suction type 1/8 25,

Cylinder with Lock Series CLS

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Lock Monitor Manual Unlocking Warning Caution 1.

Digital Flow Switch (Integrated display type)

Otherwise, chattering will occur. 9: This function is available when the model includes an analogue output. 10: When selecting 0 to 10 V, refer to the analogue output graph for the allowable load current. 11: Standard condition (STD): 20 [oC], 101.3 [kPa] (Absolute pressure), 65 [%R.H.]

Modular Type Regulators Series AR

70 66 90 3.2 13 66 65.8 11 70 90 3.2 Note 1) The total length of B dimension is the length when the filter regulator knob is unlocked.

AW

Note 11) Without a valve function Note 12) Metal bowl: The combination of 2 and 8 is not possible. Note 13) For thread type: M5 and NPT. This product is for overseas use only according to the new Measurement Law. (The SI unit type is provided for use in Japan.) The digital pressure switch will be equipped with the unit conversion function, setting to psi initially.

New

Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

Membrane Air Dryer

(For the part number of the dew point indicator, refer to pages 10 and 11.) 3.

58

11 [Mounting screws set made of stainless steel] Since this is a guideline including hysteresis, not meant to be guaranteed.

Low Profile Slide Table Series MXF

Model Maximum allowable load mass Average speed Va (mm/s) A2 10 11 12 17 A3 6 10 10 11 A4 21 23 28 34 A5 21 23 28 34 A6 10 11 12 17 A1 6 10 10 11 MXF8 MXF12 MXF16 MXF20 0.6 1 2 4 Note) Note) MXF8 MXF12 MXF16 MXF20 1.0 Note) 16 mm for MXF8-10 only. 0.7 Table (4) Maximum Allowable Moment: Mmax (Nm) 0.5 0.4 Model Stroke (mm) 100 18.27 75 7.96 13.70 50 3.34 5.69 9.14 30 0.98 2.22 3.41 6.66

AC Servo Motor Driver (Pulse input type)

Driver Servo amplifier 24VDC (Note 4, 12) Controller (Note 7) Positioning module CN1 QD75D (Note 7) 21 DICOM CN1 (Note 2) Trouble (Note 6) 20 46 DICOM 48 ALM RA1 14 13 Zero speed detection CLEARCOM DOCOM 23 ZSP CLEAR CR 41 RA2 (Note 12) Limiting torque RDYCOM 12 25 TLC RA3 READY 11 RD PP PG NP NG 49 10 11 35 In-position 24 INP 15 16 RA4 PULSE F PULSE F 10m max. 17 PULSE R PULSE R 18 36 4

E-MY2B_E_A

CONTENTS SAFETY 2 General General 3 positions 5 positions Model Indication Method 5 Names and Functions of Individual Parts 6 Installation 9 3 positions Names and Functions of Controller 11 Example of Internal Circuit and Wiring 12 Setting 15 Operation Characteristics 20 Specifications 21 5 positions Names and Functions of Controller 23 Example of Internal Circuit and Wiring 24 Setting 27

SI Unit for Vacuum Manifold

Wiring 11 2.1. Fieldbus interface connector 11 2.2. Power supply connector 13 2.3. FE terminal 14 3. Configuration 15 3.1. GSD file and symbol file 15 3.2. Head modules 15 3.3. Modules 16 3.4. Sub modules 17 3.5. Configuration steps 18 4. Parameter 19 4.1. Module parameters for Vacuum / Release module 19 5. Process data 23 5.1. Process data on Vacuum / Release module 23 5.2.

Activated Carbon Filter

Bowl assembly specifications 11 to 13 7. Assembly of Optional parts 14 8. Troubleshooting 15 9. Replacement work procedure 16 to 22 1) Element assembly (AMK20) 16 to 17 2) Bowl assembly (AMK20) 18 1) Element assembly (AMK30/AMK40) 19 to 20 2) Bowl assembly (AMK30/AMK40) 21 to 22 10. Exploded Drawing 23 11.

IO-Link/ELECTRO-PNEUMATIC REGULATOR

(Page 14) 0x0025 (37) 1..11 R Detailed Device Status N *1: R means Read and W means Write. *2Y is included in data storage, N is not included in data storage. *3: 8 octets fixed character string. *4: "x" represents a major revision number.

Air Cylinder: Standard Double Acting, Single/Double Rod Series NCM

Note 11) Exclude 2".