Body Size: 10, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: M5 (M5 x 0.8), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 10, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: M5 (M5 x 0.8), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 05 (400 L/min. 14.1 scfm), Thread Type: Body Size 05: M Thread; Body Size 10-40 R Thread, Port Size: M5 (M5 x 0.8)

Body Size: 10, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: M5, Option: B + G, Semi-Standard: 1 + N + Z

Body Size: 10, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: M5, Option: G + H, Semi-Standard: 1 + N + Z

Body Size: 10, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: M5, Option: G + H, Semi-Standard: 1 + Y + Z

Pad Diameter: 06 (ø6), Pad Styles: B (Bellows), Material: GS (Conductive Silicon Rubber), Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: B4 (Female Thread M4X0.7)

Pad Diameter: 06 (Flat + Bellows), Pad Styles: B (Bellows), Material: S (Silicon Rubber), Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: B4 (Female Thread M4X0.7)

Pad Diameter: 06 (Flat + Bellows), Pad Styles: B (Bellows), Material: U (Urethane Rubber), Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: B5 (Female Thread M5X0.8)

Pad Diameter: 06 (Flat + Bellows), Pad Styles: B (Bellows), Material: F (Fluoro Rubber), Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: B4 (Female Thread M4X0.7)

Pad Diameter: 06 (Flat + Bellows), Pad Styles: B (Bellows), Material: U (Urethane Rubber), Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: B4 (Female Thread M4X0.7)

Pad Diameter: 06 (Flat + Bellows), Pad Styles: U (Flat Style), Material: N (NBR), Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: B5 (Female Thread M5X0.8)

Pad Diameter: 06 (Flat + Bellows), Pad Styles: U (Flat Style), Material: N (NBR), Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: B4 (Female Thread M4X0.7)

Pad Diameter: 06 (Flat + Bellows), Pad Styles: B (Bellows), Material: S (Silicon Rubber), Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: B5 (Female Thread M5X0.8)

Modular F.R.L. Unit

Y610(03) 04 Y310Y110-M5 Y210Y310Note 6) 02 03 VHS4002 03 04 VHS40-06 VHS5006 10 VHS20VHS30VHS3002 03 01 02 3-port valve for residual pressure release 02 03 04 06 E400E500-06 Note 6) E100-M5 E20002 03 04 E30001 02 03 02 03 04 E300E600E60006 10 E60006 10 06 10 Piping adapter 02 03 04 06 IS1000E-40 Note 6) Pressure switch with piping adapter IS1000E-20 02 03 04 IS1000E-30 01 02 03 02 03

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 06 (3/4), Output Specification: E (OUT1: PNP; OUT2: Analog 1 to 5V), Temperature Sensor: T (Temperature Sensor), Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 06 (3/4), Output Specification: A (OUT1: NPN; OUT2: NPN), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 06 (3/4), Output Specification: E (OUT1: PNP; OUT2: Analog 1 to 5V), Temperature Sensor: T (Temperature Sensor), Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 06 (3/4), Output Specification: C (OUT1: NPN; OUT2: Analog 1 to 5V), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 06 (3/4), Output Specification: C (OUT1: NPN; OUT2: Analog 1 to 5V), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)