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ZQ-OM01601 // ZQ-ZSV 2 9 10 11 14 14 15 16 16 19 19 19 F0 21 F1 OUT1 22 F2 OUT2 24 F3 26 F4 27 F6 29 F11 30 F80 31 F81 32 F90 33 F96 35 F98 36 F99 38 39 42 43 44 50 51 51 1 - *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems.

OFF ON OFF ON 6 4 3 2 2 1 8 4 0.5 10 5 0.5 min s IDF60/70/80/90 Series 13-2 IDX-OM-W093 14 14.1 / IDF60/70/80/90 Series 14-1 Revision history 2020 6 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

No.PS-OMM0002CN-F / / ZSE80(F) ISE80(H) 2 9 10 11 14 14 16 17 19 19 21 21 21 F0 23 F1 OUT1 24 F2 OUT2 27 F3 27 F4 / 28 F5 30 F7 31 F8 32 F9 34 F10 35 F98 36 F99 38 39 42 42 43 50 50 52 -1No.PS-OMM0002CN-F (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems.

Specifications 5 Model 7 Note2) FGGLD Note 1) FGGLC Note 1) FGGLB Note 1) FGGSD Note 1) FGGSC Note 1) FGGSB Note 1) Number of elements 14 65 x L250 7 Note2) 21 65 x L250 7 Note2) 28 65 x L250 Stainless steel 304 Stainless steel 304 28 65 x L250 7 Note2) 14 65 x L250 7 Note2) 21 65 x L250 7 Note2) 65 x L500 65 x L750 65 x L1000 65 x L500 65 x L750 65 x L1000 Element size Cover Case O-ring

19 33 440 MHK2-12S 120 12 9 4 9 13 76 Normally open Normally closed L1 MHF MHK2-16S 16 23 6 14.6 20.6 114 L2 L1 MHK2-20S 20 34 10 16 26 237 MHL L2 Series MHK2 MHK2-25S 25 58 14 19 33 443 Series MHKL2 MHK2-12C 12 12 4 9 13 76 MHR MHK2-16C 16 25 6 14.6 20.6 115 MHK MHK2-20C 20 44 10 16 26 237 MHK2-25C 25 73 14 19 33 443 MHS Series MHKL2/Long Stroke Type Made to Order Refer to pages 683 to

Dimensions Foot type: MQMLL 6 25 14 33 42 18.5 2.3 6 9 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke 10, 16, 20, 25 LY LH X X Y Y LX LZ Z 4-LC S + Stroke LS + Stroke ZZ + Stroke LT (mm) Bore size (mm) LS LC LT LH LX LY S Z LZ ZZ Y X 10 5.5 83 2.3 14 33 25 65 19 42 108 9 6 16 5.5 92 2.3 18 42 30 74 21 54 119 9 6 20 6.8 137.5 3.2 25 40 40 97.5 20.5 55 166 20 8 25 6.8 142.5 3.2 28 40 47 102.5

Female connector elbow union: KBL T Connecting thread Weight (g) H (Hex.) 14 Part No.

Z Y X S NN NB NA MM LZ LY LX LT LH LC LA H F D C B A Bore size (mm) 10 16 90 [91] 7 5 46 M8 x 1 9.5 12.5 M4 x 0.7 32 16.5 24 1.6 9 4.5 38 28 8 4 14 12 15 91 [92] 9 6 47 M10 x 1 9.5 12.5 M5 x 0.8 42 25 33 2.3 14 5.5 46 28 8 5 20 18 15 Rod Side Flange Style (F) CVJ5F Rod extended/retracted when energized M5 x 0.8 M5 x 0.8 53.5 [54.5] M5 x 0.8 Manual override 28 [34.5] Width across flats B1

AD Accessory (Option) GD Applicable model HAW2 HAW7 HAW22 HAW37 HAW55 HAW75 HAW110 Screw flange (With companion flange) HAWF-141 HAWF-142 HAWF-200 HAWF-200 Auto drain AD402-04 AD600-06 AD600-10 Model Selection (Flow Capacity l/min (ANR)) JIS Symbol Model HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 50C 2000 6000 12000 12000 12000 18000 1000 70C 100C 180C Inlet air temperature

Ported Type Series 52-SY7000 Dimensions 2-position single L plug connector (L) 52-SY7120-L-02 (-F2) In case with foot bracket 52-SY7120-L-02-(F1) 29.4 20 2 x M4 x 0.7 Threads depth 6.5 (For bracket mounting) 57 24.5 7 46 5.5 19.8 28 38 79.2 Manual override Insulation: Black () 14.7 B 13.6 40 A Insulation: Red (+) 2 x 4.2 (Mounting holes for manifold) 20 2 x 1/4" {A (4), B (2) port} 42 (14

Model (Hexagon width across flats) ASR ASQ (Hexagon width across flats) AS23 1FE-01-04SK 12.7 17.5 9.3 13.1 24.9 4 9.3 26 30.9 AS23 1FE-01-06SK 13.5 22.9 R 1/8 10.9 12 12 14 44.9 26.9 49.9 48 6 11.6 27 36.3 14.2 53 AS23 1FE-01-08SK 18.5 28.2 12.9 16.2 30.9 8 15.2 29 40.8 AS23 1FE-02-04SK 16 21.9 10.9 16.2 30.6 4 10.4 36 39.6 AS23 1FE-02-06SK 17 25.2 18.4 34 6 12.8 37 42.1 R 1/4 14 14 41.2

Fittings & Tubing Air Cylinders Rotary Actuators 57 54 60 120 120 A C 45 14 14 3 x M4 x 0.7 thread depth 8 25 25 M5 x 0.8 M5 x 0.8 13 M5 x 0.8 Finger closing port P.C.D.36 (Mounting thread) Finger closing port Finger opening port M5 x 0.8 Finger opening port 44 14h9 0 -0.043 18 1.5 55.5 +0.02 +0 3 x 4 depth 8 9 2 (A, B, C common view) 28.5 37 12 (60) 10 21 M5 x 0.8 thread depth 5 Vacuum suction

No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 7 8 1 2 3 4 5 6 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 13 14 15 16 9 10 11 12 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 F : 2019 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +

:GR-S-010(10g):GR-L-005(5g) 14 3-3. 2 (MHF2-8D2MHF2-12D20D) 1. 2. 8:12:R 1620:C ABC 3. (8:) (12 ) :GR-S-010(10g):GR-L-005(5g)GR-L-010(10g) 8 2 12 2.5 16 3 20 4 B C C 8 A 12 0.9 16 C MHF2-8D2 20 1.3 MHF2-12D* R MHF2-8D2 8 1.5 12 2 16 2.5 20 3 12 15 3-4. /1 MHF2-8DMHF2-8D1 1 16 2 17 3 18 4 19 5 20 NBR 6 21 NBR 7 8 A 9 B 10 C 11 12 13 14 15 MHF2-8D

No.MH*-OMY0004 180/ // MHY2-10D MHY2-16D MHY2-20D MHY2-25D 1. . 5 1-1. . 5 2. . 6 2-1. . 6 2-2. . 6 2-3. . 7 2-4. . 14 2-5. . 14 2-6. . 14 2-7. . 15 3. . 15 3-1. . 15 3-2. . 16 3-3. . 17 3-4. . 18 3-5. / . 20 2 180 1) (ISO/IEC)(JIS) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC

DWith M3 port 2023 mm x 15 mm x 10 mm 9.5 g Variations Page Page Page 12-8-14 12-8-14 12-8-22 MHC2-6n MHCA2-6n MHCM2-7S Model Cylinder bore 6 6 7 Double acting Action Single acting (Normally open) Single acting (Normally open) 30n to s10n Opening/Closing angle (Both sides) 20 to s7 0.038 Nm (Double acting) Holding moment (at 0.5 MPa) 0.017 Nm 0.024 Nm (Single acting) Repeat ability Maximum

ASD430F ASD530F ASD630F Model 6 8 10, 12 10 12 Metric size 4, 6 8, 10 1/8" 5/32" 3/16" 1/4" 6 6, 8 1/4" 5/16" 3/8" Tubing O.D. 3/16" 1/4" 1/4" 5/16" 3/8" 3/8" Inch size Flow rate l/min (ANR) Controlled flow (Free flow) 500 600 700 1200 1300 175 295 350 75 {N R/min} Effective area (mm2) 7.6 9.1 10.7 18.3 19.8 2.7 4.5 1.1 5.3 Note) Flow rate values are measured at 0.5 MPa and 20C. 15-9-14

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model ASF 1/8" ASD230FM-U10/32-01 12 8.4 12.9 29.4 17.5 5/32" ASD230FM-U10/32-03 13 9.3 10-32 UNF 8 33.8 30.1 29.6 10 11.7 7.8 34.6 25.1 28.8 9.6 3/16" ASD230FM-U10/32-05 35.2 23.3 16.5 14 11.4 1/4" ASD330FM-U10/32-07 32.6 20.7 13.5 15 12 34.6 14 39.6 3/16" ASD330FM-N01-05S 39.5 23.9 16.5 30 11.4 12.7 36.1 32 11.8 10.6 1/4" 27 ASD330FM-N01-07S 42.2 31.1

DWith M3 port 2023 mm x 15 mm x 10 mm 9.5 g Variations Page Page Page 12-8-14 12-8-14 12-8-22 MHC2-6n MHCA2-6n MHCM2-7S Model Cylinder bore 6 6 7 Double acting Action Single acting (Normally open) Single acting (Normally open) 30n to s10n Opening/Closing angle (Both sides) 20 to s7 0.038 Nm (Double acting) Holding moment (at 0.5 MPa) 0.017 Nm 0.024 Nm (Single acting) Repeat ability Maximum

ASV Needle Valve/Flow Characteristics AK ASD230F ASD330F ASD430F ASS 100 200 400 1.5 6 3 07, 08, 09, 10, 11 Effective area (mm2) Flow (l/min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14