MY1

m2 x g x X M1 Static moment z y Y m1 x g x Y m2 x g x Y m3 x g x Z M2 Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a mass movable by thrust.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Size Foot bracket Mounting screws included in foot bracket 30 CRA1L30-Y-1 M5 x 0.8 x 25 50 CRA1L50-Y-1 M8 x 1.25 x 35 63 CRA1L63-Y-1 M10 x 1.5 x 40 80 CRA1L80-Y-1 M12 x 1.75 x 50 100 CRA1L100-Y-1 M12 x 1.75 x 50 Note 1) The part numbers shown above include mounting screw.

MY1

orientation Ceiling m Wall m Vertical m Note) Static load m Horizontal m M M m x g x X m x g x X m x g x Z M Static moment z y Y m x g x Y m x g x Y m x g x Z M Z m x g x X m x g x Y m x g M Note) m is a mass movable by thrust.

Battery-less

5 r t w q y !6 !

Made to Order

Applicable rod end nut Bore size (mm) I type single knuckle I-12 I-14 I-16 I-18 I-20 I-25 I-30 Y type double knuckle Y-12 Y-14 Y-16 Y-18 Y-20 Y-25 Y-30 I type single knuckle I-12A I-14A I-16A Y type double knuckle Y-12A Y-14A Y-16A 125 140 160 180 200 250 300 NT-12 NT-12 NT-16 NT-18 NT-20 NT-25 NT-30 125 65 100 181 18 CS1 CS2 125 65 105 186 18 140 76 110 198 21 155 83 125 223 23 -X -X 160

Table of Contents

1 y r i e Component Parts Description Material Material Note Note Description No. q w e r t y u No. i o !0 !1 !2 !

CRQ2

8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

Environment

1 y i o !

High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

Stability of suction position,

Stroke 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EU-(T/Y)F1JB10 10 V V V V ZP3EU-(T/Y)F1JB30 30 ZP3EU-(T/Y)F1JB50 50 ZP3EU-(T/Y)F2JB10 10 V V ZP3EU-(T/Y)F2JB30 30 ZP3EU-(T/Y)F2JB50 50 ZP3EU-(T/Y)F3JB10 10 V V V ZP3EU-(T/Y)F3JB30 30 ZP3EU-(T/Y)F3JB50 50 ZP3EU-(T/Y)F4JB10 10 V V ZP3EU-(T/Y)F4JB30 30 ZP3EU-(T/Y)F4JB50 50 ZP3EU-(T/Y)F5JB10 10 V V ZP3EU-(T/Y)F5JB30 30 ZP3EU-(T/Y)F5JB50

C85

1 y q r e i !2 o !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Flange bracket material: Carbon steel 7-6-19 20 Series CQ2 Accessory Bracket Double Knuckle Joint Single Knuckle Joint For I-G012, I-Z015A I-G02, I-G03 For I-G04, I-G05 I-G08, I-G10 For Y-G012, Y-Z015A Y-G02, Y-G03 For Y-G04, Y-G05 Y-G08, Y-G10 ND hole H10 Axis d9 ND hole H10 Axis d9 Material: Carbon steel Material: Cast iron Material: Carbon steel Material: Cast iron NDH10 NX Applicable

O

The expect ed perf orm ance and saf et y assurance w i l l be t he responsi bi l i t y of t he person w ho has det erm i ned t he com pat i bi l i t y of t he syst em .

O

The expect ed perf orm ance and saf et y assurance w i l l be t he responsi bi l i t y of t he person w ho has det erm i ned t he com pat i bi l i t y of t he syst em .

Electric Actuators

Nil T Nil W Motor specification G R Y Matsushita Electric Industrial Co., Ltd.

ITV-E

The expect ed perf orm ance and saf et y assurance w i l l be t he responsi bi l i t y of t he person w ho has det erm i ned t he com pat i bi l i t y of t he syst em .

Table of Contents

Nil T Nil W Motor specification G R Y Matsushita Electric Industrial Co., Ltd.

Electric Actuator/Slider Type

How to Order q w e r t y u i o !

VP300/500/700

) (D, Y) VS N.C.

15

+ A = 100 y, z + A 100 10 y, z + A = 200 y, z + A = 200 y, z + A = 300 y, z + A = 300 1 1 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700 800 Stroke [mm] Stroke [mm] [Graph 6] Allowable load mass by stroke 32 [Graph 5] Allowable load mass by stroke 25 100 100 y, z + A = 0 y, z + A = 0 y, z + A = 50 y, z + A = 50 10 Load mass [kg] Load mass [kg] 10 y, z + A = 100 y, z + A = 100