MHZ

(Internal passage) Changing from Coaxial to Single Tubing Branch Tee, Different Diameter Tee, Branch Y, Male Run Tee Changing to single tubing is possible by using a branch Y or branch tee fitting.In this case particularly, single tube fittings and tube for 3.2 will be necessary.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

: VQZ2 2(R)Y -N3T, N7T, M5T Indicator light 87 MAX.10 300 (Lead wire length) 83 Applicable cord O.D.

MY2

g x Y m1 x g m2 x g Vertical mounting Mounting orientation Ceiling m2 Wall m3 Vertical m4 Horizontal m1 Note) Static load m M3 m1 x g x X m2 x g x X m4 x g x Z M1 Static moment M1 m1 x g x Y m2 x g x Y m3 x g x Z M2 z y Y Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a weight movable by thrust.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

M1 m1 x g x X m2 x g x X m4 x g x Z M1 Static moment z y Y m1 x g x Y m2 x g x Y m3 x g x Z M2 Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a mass movable by thrust.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

WA WB View E NN F GB GC GA Mounting nut Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Piping port 2 x M5 x 0.8 Cover surface D LY LB LH LT LZ LX LT S + Stroke H NA A NB Y X Y X 4 x LC Mounting hole LS + Stroke Z + Stroke WW C B 0 0.3 B 0 0.3 Drawing of view E (mm) Z S WW WB WA NB NA NN MM H GB GA F D C B A Y X 91.5 92.5 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 LT 14 14 LH 5.5 5.5 LC

High Vacuum Angle Valve

Construction/Operation Auto switch (Option) Heater (Option) Pilot port (Pressurize to close) P-2 q Bonnet assembly (Maintenance parts)1 (Including w, e, y, u, i, o) Magnet (Option) Pilot port (Pressurize to open) P-1 r Exterior seal (Maintenance part)1 i Bellows holder (Material: Stainless steel 304) u Bellows assembly (Maintenance parts)1 (Including y, i) Bellows (Material: Stainless steel

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Calculate the load factor for each direction. x = Xc/Lx, y = Yc/Ly, z = Zc/Lz 5. Confirm the total of x, y and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Y m x g m x g Vertical mounting Mounting orientation Ceiling m Wall m Vertical m Note) Horizontal m Static load m M m x g x X m x g x X m x g x Z M Static moment M m x g x Y m x g x Y m x g x Z M z y Y Z m x g x X m x g x Y M m x g Note) m is a mass movable by thrust.

Thermo-chiller

/Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

WA WB View E NN F GB GC GA Mounting nut Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Piping port 2 x M5 x 0.8 Cover surface D LY LB LH LT LZ LX LT S + Stroke H NA A NB Y X Y X 4 x LC Mounting hole LS + Stroke Z + Stroke WW C B 0 0.3 B 0 0.3 Drawing of view (E) (mm) Z S WW WB WA NB NA NN MM H GB GA F D C B A Y X 91.5 92.5 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 LT 14 14 LH 5.5 5.5 LC

HRS100/150

Description Size 1 Valve Rc1/2 2 Valve Rc3/4 3 Y-strainer (#40) (Accessory) Rc3/4 4 Flow meter Prepare a flow meter with an appropriate flow range. 5 Valve (Part of thermo-chiller) Rc1/4 6 Y-strainer (#40) Rc1/2 7 Pressure gauge 0 to 1 MPa 8 Y-strainer (#40) or filter Rc3/4 Cable Specifications Power supply and signal cable should be prepared by user.

MXW Series Long Stroke Slide Table

Y 5.5 Operating port M5 ~0.8 24 84 Operation direction B (Plug: M-5P) Operation direction B A 7 6.5 13 10 10 13 A 14.8 30 7 24 A 15.8 Z Cross section AA (scale 50%) (N-1) x H G H 6 depth 4.5 5H9 +0.03 N-M4 x 0.7 thread depth 8 0 Bottom through hole 3.3 5H9 +0.03depth 4.5 0 F E Model J N H G F E Z MXW8-25 64 3 32 47 48 55 157 MXW8-50 71 4 30 46 76 53 182 Note) Adjuster bolt Y shown in the

C76

9 @0 q w e r t y u i o !

C76

9 @0 q w e r t y u i o !

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

1 Data (Piston part) @3 y i e w y @3 i @3 y y i CXSWL1015 CXSW6 CXSW10 CXSW25, 32 Component Parts Note Nickel plated Note Hard anodized Hard chrome plated Hard chrome plated Description Material Special steel Synthetic resin Synthetic resin Polyurethane Chromium steel Aluminum alloy NBR NBR NBR NBR No. q w e r t y u i o !

240

Time [s] LEC SS-T T1 T2 T3 T4 T1 = V/a1 [s] T3 = V/a2 [s] LEC Y T2: Constant speed time can be found from the following equation.

Multi-Axis Step Motor Controller

4 r t y u i !5 !6 No.

energy saving effect

Description Size 1 Valve Rc1/2 2 Valve Rc1 3 Y-strainer (#40) (Accessory) Rc1 4 Flow meter Prepare a flow meter with an appropriate flow range. 5 Valve (Part of thermo-chiller) Rc3/4 6 Y-strainer (#40) Rc1/2 7 Pressure gauge 0 to 1.0 MPa 8 Y-strainer (#40) Rc1 Cable Specifications Power supply and signal cable should be prepared by user.

Electric Actuator with Integrated Guide

Tact time Moving distance: _mm t = Tact time: _s s = Cycle time: _s Time t s z x Example) Projection distance x: _mm y: _mm z: _mm Work piece moment y Environment General, Clean room, Mist environment, Dusty environment 94 98 Series LTF Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

110 140 76 56 3.5 110 170.5 I-16 Y-16 120 155 83 63 3.5 125 193.5 I-18, I-20 Y-18, Y-20 135 160 88 71 3.5 160 245.5 I-25 Y-25 160 195 106 80 3.5 175 266.5 I-30 Y-30 175 210 115 6-9-19 20 Series CDS1 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-A3/G3/K3 D-A5/A6 Applicable cable O.D. 6.8 to 9.6 ~ = Auto