CEx-OMQ0011

L (mm) (mm) 25 32 40 12000(1mm) 25 MY-A25L 25 MY-S25A MY-S25B 32 MY-A32L 32 MY-S25A MY-S25B 40 MY-A40L 40 MY-S32A MY-S32B 6-2 CEU2 NPN P PNP 24 6-3 CE1-R 05 5m 10 10m 15 15m 20 20m C A B CD E F G () 25 7-1 AA BB CC DD EE HA KA KB KK 9 45.5 5.5 M5x0.8 9.5 69 30.5 16 M6x1 11 54 6.5 M6x1 12 84 32 15 M8x1.25 14 64 8.5 M8x1.25 12 102 41.5 19 M10x1.5 R S T U V W X Y Z 22 63.5 23.5 22 41

Cylinder with lock

Operation 32 C96N32-PS 17 Rod seal 1 pc 40 Rod seal 1 pc 41 Piston seal 1 pc 42 Large cushion seal 2 pcs 43 Small cushion seal 1 pcs 45 Cylinder tube gasket 2 pcs 40 C96N40-PS 50 C96N50-PS 63 C96N63-PS 80 C96N80-PS 100 C96N100-PS Lock part is replaced as an entire unit. The seal kit for replacement contains the rod seal for the cylinder and lock.

Rotary Table: High Precision Type

35 How to change the auto switch detecting position 35 Auto switch operating angle and hysteresis angle 36 Operating range and hysteresis auto switch 37 Internal construction and component parts 37 Internal construction of rotary table with auto switch 39 MDSUA1/3 auto switch mounting 40 Maintenance and Inspection 40 Maintenance unit How to replace table unit / How to replace rotary unit 41

Rotary Table

Allowable load a b Allowable thrust loadN Allowable momentNm Size Allowable radial load a b Basic type High precision N type 1 31 41 41 0.56 0.84 2 32 45 45 0.82 1.2 3 33 48 48 1.1 1.6 7 54 71 71 1.5 2.2 Unit used as flange mount Rotary table can be mounted from three directions-Two side of axial direction and one side of lateral face.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Crack on the back of the belt 41 - 7.6 How to detach and attach the dust seal band For the internal-check as the maintenance, the method of detaching and attaching the dust seal band is shown as the following. 1. Loosen the fixing bolts of end side of the Band holder. (The picture shows LEFB, but LEFS is same instruction as LEFB.)

LEH_C

/LEHS .20 4.1 . 20 4.2 . 21 4.3 . 22 5.23 5.1 . 23 5.2 . 24 5.3 . 27 . 27 . 29 (1). 31 (2). 32 (3). 33 . 34 5.4 . 36 . 36 . 38 1 - 6.39 7.40 7.1 . 40 7.2 . 41 7.3 . 41 7.4 . 42 7.5 . 44 7.6 . 44 8.45 8.1 . 45 8.2 . 46 8.3 . 50 8.4 . 53 .54 2 - LEH Series / (ISO/IEC)(JIS)1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General

LEC-T1_C

DRV mon 1 Posn 123.45mm Speed MENUESC 41 - 6. 6.1 (1) LECP LECA No. TB Ver1.** TB Ver2.**2 TB Ver.5.11 LECPA PLC LECPLECA , , 1 1 LECPA aLECPLECA 100mm 42 - bLECPLECA 43 - (2) (2-1) LECPLECA INP ON ON INP OFF No.Step No.

SFOD-OMT0009CN

() Step No. mm/s 1 2 2 2 mm mm/s mm/s / mm mm mm 1 ABS 100 200.00 1000 1000 0 6.0 12.0 0.5 2 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 0 3 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 4 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 1 INC 500 800.00 1000 1000 1 0 0 10 2 INC 500 900.00 1000 1000 1 0 0 10 1 3 INC 500 900.00 1000 1000 1 0 0 10 4 INC 500 900.00 1000 1000 1 0 0 10 Step No. 02047 No.41

LECA6_C

CN5I/O . 23 6.1 . 23 6.2 (NPNPNP ) . 23 (1) I/O (NPNPNP ) . 23 (2) I/O . 23 6.3 . 24 6.4 I/O . 27 7. . 28 7.1 . 28 7.2 . 31 7.3 . 33 8. . 34 8.1 . 34 8.2 . 34 8.3 . 35 (1) . 35 (2) (). 35 (3) . 35 8.4 . 36 8.5 . 36 9. (). 37 9.1 . 37 9.2 . 38 10. . 39 10.1 . 39 10.2 I/O . 39 (1) . 39 (2) . 40 (3) . 41 (4) HOLD. 42 (5) . 42 2 - 6 . 42 (7) . 43 11. . 44 11.1 . 44 11.2 (). 45 11.3 I/O . 46 11.4

LECP6_C

CN5I/O .23 6.1 /.23 6.2 /(NPNPNP ).23 (1) I/O (NPNPNP ).23 (2) I/O .23 63 /.24 64 I/O .27 7 .28 71 .28 72 .31 73 .33 8 .34 81 .34 82 .34 83 .35 1 .35 2 (.35 3 .35 84 .36 85 .36 9 .37 91 .37 92 .38 10 .39 101 .39 102 I/O .39 1 .39 2 .40 3 .41 4 HOLD.42 5 .42 2 - 6 .42 7 .43 11 .44 111 [5m ].44 112 [820m].44 113 [5m ].45 114 [820m] .45 115 I/O .46 116 .46 117 .47 12. .48 12.1 .48 12.2 .49 13

LV50-OMQ0004

Width across flats of attachment 3/8 24 mm 1/2 28 mm 3/4 35 mm 1 41 mm Ensure that the piping is tightened to the required torque. The tightening torque for connection threads is shown in the table below.

Programless controller (with stroke study) Step motor (servo 24 VDC)

Operations . 39 8.1 Return to origin . 39 (1) Return to origin operation . 39 (2) How to command the return to origin . 40 8.2 Positioning operation . 41 8.3 Jog operation / inching operation . 42 (1) Jog operation . 42 (2) Inching operation . 42 8.4 Servo ON . 43 8.5 Response time for the controller input signal . 43 9.

High Vacuum L Type Valve

XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0016

EXxx-OMU0020EN

Wiring 41 7.4. Process data 41 7.5. LED indicators 42 7.6. Block diagram 43 8. Digital Output Module EX245-DY1 44 8.1. Parts and description 44 8.2. Specifications 45 8.3. Wiring 46 8.4. Process data 46 8.5. LED indicators 47 8.6. Block diagram 48 -2No.EX##-OMU0020-A 9. End Plate EX245-EA2-1/2 49 9.1. Parts and description 49 9.2. Specifications 50 10. Accessories 51 10.1.

Multistage Ejector

Tightening torque (1) Round head combination screw (M2.5 x 41): 0.3 to 0.36 Nm (4) Hexagon socket head cap screw (M3 x 30): 0.6 to 0.66 Nm Replacement procedure of ZL212-SP01 (Silencer set) Disassembly and Reassembly 1. Remove the four round head combination screws (M2.5 x 53) (1). 2.

CJP2-OM0002K

Part number of auto switchD-A9D-A9V Unitmm B A (When detecting retracted stroke end) H H 1 H 2 3 (When detecting extended stroke end) 5st 10st 15st 20st 25st 30st 35st 40st 4 6 1 6 11 16 21 26 13.0 10.0 20.0 10 1 6 11 16 21 26 31 36 41 16.0 9.5 19.0 16 1 6 11 16 21 26 31 36 41 18.0 12.0 24.0 Part number of auto switchD-M9D-M9VD-M9WD-M9WV Unitmm B A (When detecting retracted stroke end) H

High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

Programless controller Step motor (servo 24 VDC)

(m) (n) 41 No. JXC-OMU0029-A 7.4 Test function The table below shows the difference between normal (f) (e) (c) operation and test function in manual mode. To start the test function, set the position switch (h) to "0" while the power LED (a) (a) is lights up (= Servo ON) in manual mode and the electric actuator stops, and press the set button (g) for 3 seconds.

High Vacuum L Type Valve

As this product has pressure balanced construction, the exhausting direction is free. 8 XL*-OMI0013-B 5.Dimensions 26 41 K J 72 53010 OPERATION INPUT K J V L C B 39 C B 69 XLS-**-P*G (with control power supply) XLS-**-P*G () L G1/2 D XLS-**-** (without control power supply) DIN terminal (D) DIN( D ) XLS-**-** () E D F K2 J L 27010 J M 29010 J K 33 25 G1/2 G1/2 C G C C B B B A A Terminal (

XMA/XYA Series

110 83 96 D G C XYA Series / Straight Valve C B Fd (K Flange) 45 H Fn (KF Flange) A E Unit: mm Model n Fd XYA-25 100.2 79.5 48 1 23.5 40 26 64 XYA-40 130 106 66 2 38 55 41 84 XYA-50 178 119 79 2 53 75 52 95 XYA-63 209 149 100 3 61 87 95 70 118 XYA-80 268 178 117 3 80 114 110 83 142 9 XM-OMP0001-A 5.