NCA1

, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 Smooth movements even at 0.4 to 2 inch/sec Auto switch mounting available.

NCA1

, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 Smooth movements even at 0.4 to 2 inch/sec Auto switch mounting available.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350-06 AMD450-06 15 2.0 HAA22-14 HAW22-14 AT22C-14 AFF11B-06 IDF15CAM450-06 AMD450-06 22 3.0 HAA37-14 HAW37-14 AT22C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 27 3.5 HAA37-14 HAW37-14 AT37C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 37 5.0 HAW55-20 AT37C-14 AFF37B-14 IDF37C1-3 AM650-14 AMD650-14

Compact manifold regulator ARM5 Series

L1=(14 x n)+36 10 16 14 10 14 Y W Pressure gauge (Accessory) V X 2 x 4.3 L3=50+R+V L4=50+T+X H H L L S S O O M4 thread hole U U C C P P K K 50 SMC 25 S T R L2=(14 x n)+29 29 55 (Max. 58) Note) U IN IN IN 33 15 14 Note) Max. dimension is the size when the knob is unlocked.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

4 6-14-10 11 Series NCM Construction: Single Acting, Spring Return t y q !1 !2 e r !0 w o CJ1 CJP CJ2 CM2 CG1 !

Pin Clamp Cylinders

and port. * The figures below indicate the CKU32-lRAL-X2321. 14.50.1 14.50.1 (29) 27 70 D d Q Q 0 0.05 120 K C SR 87.5 45 15.5 14.5 26 (4) MK 8 to 10 Diamond cut shape (Guide pin dia.: 9.5 or more) 30 MK2T 490.1 5 (6.4) CK1 14 14 590.05 CLK2 (188.5) 2 x 6H7 through +0.012 0 CLKG 5.5 59 4 x 6.6 through 18 CKQ CLKQ Clamp arm position CK CLK CK CLK A Same as the port side B Opposite side of

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

30 25 20 15 10 5 0 0 2 4 6 8 10 12 14 6 5 150 kPa 350 kPa 150 kPa 150 kPa Flow [L/min] Flow [L/min] Flow [L/min] 4 3 350 kPa 350 kPa 2 750 kPa 750 kPa 750 kPa 1 0 0 2 4 6 8 10 12 14 Number of needle rotations Number of needle rotations Number of needle rotations PF2M711(-L) PF2M721(-L) 100 L/min 200 L/min PF2M750(-L) 50 L/min 120 100 80 60 40 20 0 0 2 4 6 8 10 12 14 240 200 160 120 80 40

NCA1

(5") 1.000 3/4-16 1.13 1.500 1.280 .750 5.50 1/2 NPT .63 4.50 .94 .95 2.88 2.75 2.500 1.38 7.75 600 (6") 1.375 1-14 1.63 2.000 1.530 1.000 6.50 3/4 NPT .75 5.00 1.31 1.32 3.13 3.25 3.000 1.63 8.88 800 (8") 1.375 1-14 1.63 2.000 1.530 1.000 8.50 3/4 NPT .75 5.13 1.31 1.32 3.25 4.25 3.000 1.63 9.00 Note: Pivot and cotter pins are included.

AMD

-20-55 to 14-20-57. 14-20-28

AFF

-20-14

AMH

Refer to Flow Characteristics (page 14-20-32) and figure of Max. Air Flow (page 14-20-30).

S Couplers Series KK/KK13

/O.D. mm Model L 5/8 21.4 14 14 36.1 12.7 13.7 4.5 KK3P-50N 1/8 6/9 38.8 18.3 5.4 -60N 18.4 17 39.9 16.5 6.5/10 35.9 21.9 5.9 -65N 14 43.9 13.7 5/8 34.7 17 12.7 4.5 KK4P-50N 6/9 48.4 18.3 5.4 -60N 17 46.7 16.5 1/4 6.5/10 45.1 21.9 5.9 -65N 25.2 8/12 53.2 34.4 7.4 -80N 47.6 55.6 8.5/12.5 38.2 7.8 -85N 19 17.4 19 60.5 34.4 8/12 7.4 KK6P-80N 53.4 1/2 62.8 38.2 8.5/12.5 7.8 -85N 31 24 57.2 20.1

AME

Refer to Flow Characteristics (page 14-20-38) and figure of Max. Air Flow (page 14-20-38).

CRBB-OM00004

Hexagon nut Stainless steel 13 Cross recessed round head screw Stainless steel 14 Magnet lever 5 No. 3.

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Refer to page 14-20-4 for flow rate and page 14-20-4 for the max. flow line graph.

HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

Air Pilot Operated Series NVSA

Subplate BLrna N AXT 335-12.2 '14 Hold Down Bolts 32 x 1 n.')

PC Wiring System Series PCW

Company Bs PLC I/O card Connector pin assignment (pin layout) Company As PLC I/O card Connector pin assignment (pin layout) Change of PLC manufactures (Company A to Company B) + + + + 2F 2E 2D 2C 2B 2A 11 13 15 17 19 1B 1D 1F 21 23 25 27 29 2B 2D 2F 29 28 27 26 25 24 23 22 21 20 + + 19 18 17 16 15 14 13 12 11 10 + + 1F 1E 1D 1C 1B 1A 10 12 14 16 18 1A 1C 1E 20 22 24 26 28 2A 2C 2E General

Power Clamp Cylinder

14 14 17.5 17.5 17.5 L 7.5 7.5 7.5 10.5 10.5 10.5 A A 20 A B C D E F Center Right Left Center Right Left Center type Left type 2 x D1H7 through (9) 300.2 2 x D2 through 300.02 1050.1 For Asia For North America For Europe For France Special 144 65 280.1 150.2 19 L D3 Sectional view A-A (1:1) 63 How to Order Right type CKZT63 A015 C S 47 37 Arm position 54 78 C R L Center Right Left 20 Center