CXS

x 2-4.3 through 2 x 2-8 counterbore with depth 4.3 2 x 2-5.5 through 2 x 2-9.5 counterbore with depth 5.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2-M4 x 0.7 with depth 6 15 54 19 70 52 17 8.5 2-M5 x 0.8 42 25 5 10 2.5 20 8 9.5 38 57.5 9 2-M4 x 0.7 with depth 6 20 62 24 84 60 22 11 2-M5 x 0.8 50 29 6 12 4.5 25 10 12 45 67.5

CXS

x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-Rc 1/8 thread depth 5 SS T Bore size (mm) 2 x 2-4.3 through 2 x 2-8 counterbore with depth 4.3 2 x 2-5.5 through 2 x 2-9.5 counterbore with depth 5.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2-M4 x 0.7 with depth 6 15 54 19 70 52 17 8.5 2-M5 x 0.8

3 Port Solenoid Valve Metal Seal Series VZ200 1

5-L(Z)-01 300 (Lead wire length) With light/surge voltage suppressor Applicable cable O.D. 3.5 to 7 Max.10 84 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) Pg7 76 68.2 1 2 M: VZ2 5-M(Z)-01 43 19.5 PE PA 11 8.5 7 With light/surge voltage suppressor 300 2.5 3-Rc 1/8 (Lead wire length) (Pilot EXH) M5 x 0.8 M5 x 0.8 (Pilot EXH) 4-15-6 7 Series VZ200 Manifold Specifications Manifold

MXH

x 1.0 through Bottom hole dia 5.1 6-9.3 counterbore depth 8 Plug for port (Hexagon socket head set screw) 4-M5 x 0.8 x 4l 4-M5 x 0.8 Depth 11 4-M5 x 0.8 depth 8 Guide rail width 12 2-M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9.5 34 6 24.5 63.5 64.5

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) PP TT UU GB TT UU G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) (WW) GB PP XX XX G Centralized piping Centralized piping 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

-1/8 (OUT port) 11 P = 22 11 1.5 4.5 6 32 6 54 ( 19.5) 11 9.5 11 9.5 4-M4 x 0.7 10 24 10 46 When not equipped with bracket, the M3 threads at both ends (4 positions) can be used for other purposes.

New

F D 23 G1/2 Water For Air For Medium R E C C R E A B1 A B1 Vacuum For Oil Construction Dimensions Construction Dimensions 2 x P 1 (IN), 2 (OUT) port 2 x P 1 (IN), 2 (OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N Terminal part Faston connector 250 Series 23 K K 11 9 6.5 J H H J 15 (mm) Conduit Faston type Dimensions Size Port size A B B1 C D E F P H J Q R Q R K N 1 1/8 1/8 1/4

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

tolerance Port size Vacuum port, relief port JIS class 2 +1.0 0 mm M5 x 0.8 M5 x 0.8 11 Clean Room Series Microspeed Cylinder Series 10/11 -CM2X Series 10/11 -CM2X How to Order Clean room series 10 11 Mounting Relieving type Vacuum type B L F G BZ Basic Type Axial foot type Front flange type Rear flange type Boss-cut basic type C(D)M2X L 40 10 150 C73 With auto switch (with built-in magnet

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

5 11 7 P A 4.9 8.5 4.9 3-M5 (M3) 30.2 36.6 ( ) : In case of M3 Dimensions with broken lines stand for a latching, 100VAC, and large capacity spec. type.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

mounting groove (4 locations) 55 Width across flats 10 (4 locations) M5 x 0.8 (Finger closing port) M5 x 0.8 (Finger opening port) 6.5 H 4 x M6 x 1 (Piston rod thread and rack thread) 22.6 2 x M5 x 0.8 Vacuum port 8 0.5 10 11 11 8 8 9 16.5 20.5 11 O S 39 19 K (58) 15 25 19 19 9 4 4 9 25 When open F 13 13 43 4 x M5 x 0.8 through (Thread for mounting attachment) When open G (mm) J 26 50 70

MXH Series Compact Slide

4 25 62 30 30 4 30 62 30 4 30 40 45 72 6 20 20 50 55 25 25 82 6 60 30 92 60 30 6 33 MXH Series Compact Slide Dimensions 10 LT (mm) 11 19 11 LA LB J-M4 x 0.7 Depth 8 3-M5 x 0.8 through Bottom hole dia. 4.3 6-7.5 counter bore depth 4.4 Plug for port (hexagon socket head set screw) 4-M5 x 0.8 x 4l 2-M5 x 0.8 Guide rail width 7 4-M4 x 0.7 Depth 7.5 4-M4 x 0.7 Depth 6 23 5 13 8 18 21.5 46 47

EX510

10 9 8 8 9 10 11 1 + 2 + 3 + 4 + 5 + + 5 + 4 + 3 + 2 + 1 6 6 12 13 14 15 15 14 13 12 10 10 6 + 7 + 8 + 9 + 10 + + 10 + 9 + 8 + 7 + 6 PWR PWR 11 11 COM COM 15 15 11 + 12 + 13 + 14 + 15 + + 15 + 14 + 13 + 12 + 11 5A 5A 0V +24V +24V 0V 2 x M4 Mounting hole Shown with cover removed. 60 1711 Series EX510 Parts Description i w t Output Unit No.

VKF300

) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399 388 L1 L2 5 Series VKF300 Dimensions/Manifolds

JXCx-OMU0026

Procedures to Trial run . 10 3.1 Checking the contents of the package . 10 3.2 Mounting the controller . 11 3.3 Install the setting software and the driver . 11 3.4 Wiring and connection . 11 3.5 Power supply, Start-up of controller setting software, setting date and time, Alarm and error check . 11 (1) Supplying power . 11 (2) Start-up of controller setting software . 12 (3) Setting date

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

+2.2 0 +0.5 +0.1 +0.5 +0.1 +0.5 +0.1 +0.5 +0.1 +0.5 0.2 +0.5 0.2 +0.5 0.2 +0.5 0.3 +2.2 0 +2.2 0 +2.2 0 +2.5 0 MHZ2-10D 5.7 3 M3 x 0.5 M3 x 0.5 M3 x 0.5 11.2 15.2 5.7 9.7 2.5 4 +2.2 0.2 +2.2 0.2 +2.5 0.2 MHZ2-16D 7 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 14.9 20.9 6.6 12.6 11.6 2.1 4 MHZ2-20D 9 5 M5 x 0.8 M5 x 0.8 M5 x 0.8 16.3 26.3 7.2 17.2 14 2.1 4 MHZ2-25D 6 12 M5 x 0.8 M5 x 0.8 M5 x 0.8 19.3

Please contact us for the latest version.sales@ocaire.com SS5YJ3 MFLD SYJ3000. MFLD, BASE MT, SYJ3000 SERIES. VALVE. SS5YJ3 BUILT IN FITTING

Please contact us for the latest version.sales@ocaire.com, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, MJ, SS5YJ3 BASE MT .25960 lb, .25960 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, MJ, SS5YJ3 BASE MT .14536 lb, .14536 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .45194 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, UJ, SS5YJ3 BUILT IN FITTING .43651 lb, .43651 lb