High Power Cylinder:

12.5 15 2500 3000 30 1/4 1/4 h=0.7 6 10 1/4, 3/8 20 4 500 0.5 0.1 0.3 10 32 (3/8) 10 1/4, 3/8 8 1000 0 1/4, 3/8 3/8 3/8 3/8 12 16 20 24 1500 2000 2500 3000 1,000 2,000 3,000 Max. speed Vmax (mm/s) Graph 3:40 40 8 10 1/4, 3/8 h=0.7 6 500 30 0.5 40 (3/8) 12 18 24 30 36 1000 1500 2000 2500 3000 3/8 12 3/8 12 3/8 12 3/8 12 3/8 12 0.1 0.3 20 10 Note) Refer to p.4.10-5 for max. absorbed energy

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W 36 46 46 X 11 13 13 Y 15 17.5 17.5 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 VXE210 VXE220 VXE220 VXE230 VXE230 Applications 18 Series VXE21/22/23 For Air Dimensions: Manifold/Base Material: Aluminum Normally closed (N.C.): VXE21/22/23 L2 K K L1 N H F D B (B) C A J A V S Q Approx. 300 U 2 x M W X Approx. 280 32 25 D side Stations

4/5 Port Air Operated Valve Series SYJA3000

SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Description Material AXT632-3 (M3 x 32) VFR3000-26-4 VFR31 VFR3000-26-4 VFR32 AXT632-3 (M3 x 32) VFR3000-26-4 VFR33/34/35 11 NBR Hexagon socket head screw Gasket 12 13 AXT632-3 (M3 x 32) Refer to How to Order Pilot Valve Assembly on page 1252. Refer to How to Order Sub-plate Assembly on page 1253.

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

Stainless Steel 316

(inch) Model KQGE03-00 KQGE07-00 KQGE09-00 KQGE11-00 KQGE13-00 5/32 KQGL03-32 KQGL03-N01S KQGL07-32 KQGL07-N01S KQGL07-N02S KQGL09-N01S KQGL09-N02S KQGL09-N03S KQGL11-N02S KQGL11-N03S KQGL13-N03S KQGL13-N04S 10-32UNF 5/32 1/4 NPT1/8 5/16 10-32UNF 3/8 1/4 NPT1/8 1/2 NPT1/4 NPT1/8 5/16 NPT1/4 NPT3/8 NPT1/4 3/8 NPT3/8 NPT3/8 1/2 NPT1/2 4 Stainless Steel 316 One-touch Fittings Applicable tubing

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

MK

/Flange F9NWV F9NW 3 wire (NPN) F7NWV F79W F7PW Bore size (mm) 20 25 32 40 50 63 Accessories Part No.

Compact Cylinder

Without auto switch Auto switch (mm) E Size Elliptic retaining ring (PAT.) 22 20 24 25 28 32 32 40 Note 1) Cylinder tube width tolerance: 0.2 Note 2) Minimum mounting pitch of auto switch is specified. Refer to back page 3.

CE

Foot style 12 20 32 40 50 63 12 mm For the applicable auto switch model, refer to the table below. Auto switches are shipped together, (but not assembled). S 1 pc. Rod side flange style Cable length 20 mm 3 3 pcs.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 12.7 22.1 12.3 17.3 7 9.6 30.1 28.8 25.1 8 33.8 10-32 UNF 16.5 13.5 26.1 23.1

CE

0 @9 32 to 63 Lead-bronze casted Rod seal Sensor guide NBR !1 #0 RB Carbon steel Gasket Case setting nut 32 to 63 NBR !2 #1 Rolled steel Cushion seal Cushion ring A 40 to 63 NBR !3 #2 J Rolled steel Cushion ring B 40 to 63 Piston gasket NBR #3 !4 Cushion valve Port seal 40 to 63 NBR #4 !5 DPiston nut Rolled steel Joint seal 40 to 63 NBR #5 !

CE

12, 20 y @7@4 @8@0oi@3 @8 !

Compact manifold regulator ARM5 Series

Size 4 6 5/32 1/4 Size 6 8 1/4 5/16 Symbol C4 C6 N3 N7 Symbol C6 C8 N7 N9 Straight type Elbow type Straight type Elbow type V R W X S T Y U One-touch fittings for regulator block One-touch fittings for centralized supply block Fitting size Elbow W Elbow X Elbow Y Straight V Fitting size Elbow S Elbow T Elbow U Straight R 4, 5/32 2.5 6 11 35.5 4, 5/32 6 3 6.5 11 36 6 3 12.5 19 35.5 1/4 6.5

58

4 28 to 30 160 3.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

(Type SYJ34 ) 4 port base mounted (Type SYJ33 ) 0 3 0 3 0 3 Round head combination screw SY100-33-3 (M1.7 x 17, Matt nickel plated) Applicable manifold base Type SS5YJ3-20 Type SS5YJ3-21PManifold base Applicable manifold base Type SS5YJ3-31 Type SS5YJ3-S31 Type SS5YJ3-32 Type SS5YJ3-S32 Type SS5YJ3-32P Applicable manifold base Type SS5YJ3-41 Type SS5YJ3-S41 Type SS5YJ3-46 Type SS5YJ3-S46

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Safety precautions . 3-30 3.10.2 Timing chart . 3-31 3.10.3 Wiring diagrams (LE-series servo motor) . 3-32 3.11 Grounding . 3-36 4.

Rotary Cylinder Series MRQ Size: 32, 40 1

range (mm) 8 7 Linear motion parts 6 Linear motion parts Hysteresis (mm) 2 1 1 8.5(9) 11(11.5) 9 11.5 9 11.5 Proper mounting position A (mm) D-F7 /F7 V/J79/J79C/F7 W/ F7 WV/J79W/F7BAL/F7BAVL Rotary motion parts Rotating angle D-A7/A8 D-F79F 40 32 7 4 29 36.5 36 45.5 Rotary Size Rotary motion parts 55 46 10 7 24.5 (25) 32 (32.5) 31.5 (32) 41 (41.5) 28 27 4 3 25 32.5 32 41.5 32 40 32 40 Operating

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

4 5 3 4 5 40 Mass W (kg) Mass W (kg) 40 MXS 32 2 2 32 1 1 MXQ 25 20 0.5 0.4 0.3 0.5 0.4 0.3 25 20 16 MXF 16 12 12 0.2 0.2 MXW 0.1 0 40 60 80 100 120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) MXJ Graph (19) Stroke: Up to 100 stroke Graph (15) Stroke: Up to 100 stroke MXP 20 20 10 10 MXY 3 4 5 3 4 5 40 Mass W (kg) Mass W (kg) MTS 40 2 2 32