VQ7-6/7-8

3 3 5 3 5 Regulating port B Regulating port P Regulating port A Caution Part No.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

5 !6 Component Parts Component Parts No.

Dual Speed Controller with One-touch Fitting Series ASD

(Refer to pages 15-6-3 to 15-6-5 for details.)

A_HEC-OM-K001

. 5-1 5.1 Start of Operation . 5-1 5.2 Setting of Values . 5-1 5.3 Cautions for Operation Control. 5-2 5.3.1 Indication and Setting when Output Cutoff Alarm Operates . 5-2 5.4 Operation of Controller . 5-3 5.4.1 Details of Operation and Display Panel . 5-3 5.5 How to operate . 5-4 5.5.1 Setting Mode, Level 1 . 5-5 5.5.2 Detail of setting mode level 1. 5-6 5.5.3 Setting Mode, Level 2 . 5-

7ND9071en

Fail Action Fail to Close, Fail to Open 5 Valve Travel 85.2 % 5 Positioner Information 5 Dead Angle (a0) 0.0 % [0..99%] 6 Temperature 24.7 C 6 Units 6 Performance Level A(1)-Aggressive, b(1)-fast, C(1)-Optimum, d(1)-Stable, E-Max. stability, (1) = Capac.

JXCx-OMY0008

Power supply 0V (2) ON IN0 to 5 OFF (2) Input the step data No. to be specified by Word0, bit0-5:IN0-5 SVON E.g.) Specify step data No.1 7010h, bit0: IN0=ON, DRIVE (DRIVE signal is not used) OFF 7010h, bit1-5: IN1-5=OFF (5) Control signals (1) This is the Base step No that will be used.

CXS

stick-slip even at 5 to 50mm/s.

Electric Actuators

5 !4 !3 e u !

Step Motor Driver （ Pulse input type ）

pulse sign 3 NP+ R type 24 VDC 10% 3.3 k 5% NP4 R (0.5W or more) Pulse PP+ 5 5 VDC 5% 390 5% (0.1W or more) 6 PP1) The pulse input circuit of NPN type and PNP PNP open collector input for 1 pulse mode *1) type is the same.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

) 5% F.S. (0 to 50C) 0.5% F.S. 0.5% F.S. 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. 5% F.S. (0 to 50C) (0 to 50C) (0 to 50C) (0 to 50C) Repeatability 1% F .S.

LJ1H

10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting 143

Slider Type Ball Screw Drive/11-LEFS Series

0 15 10 5 0 15 10 5 20 25 30 0 15 10 5 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1500 1000 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] L8 [mm] Z 500 500 500 500 Mep m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 0 15 10 5 20 25 30 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

Title not found

1 5 7 (40) 4.02 l102) 3.07 (78) 0.98 (25) 205 (52) 0 5 5 (14) 0 8 3 (21) Ml2x1.75 ( 1 1 ) \'17) lV22x1.5 (37) 4 5 7 ( 1 1 6 ) 2 7 9 (71) a m (204) 256 (65) 049 (r2 5) 3 1 5 (80) 8 3 9 1213) E 1 5 7 (40) l r 1 6 ) 3 6 2 (92) (30) 205 (52) 0 5 5 (14) 0 8 3 (21J Ml2x1.75 ( 1 1 ) o 6 7 <17) lV26x1.5 '| 57 (40) 4 9 6 (126) 243 \721 (21s) 2 5 6 (6s) 0 5 5 3 1 9 (81) L A 2 t.2241 "Min Stroke = 0

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 90. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P) (B) 2 (

Auto Switch Guide

Put a flat washer (8 x 3.3) through a hexagon socket head screw (with spring washer, M3 x 0.5 x 5 l) and passing through the hole of a switch mounting bracket, then turning it lightly down to a mounting nut of switch. (2 locations) 5.

SZ3000

0 e w t y q o 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center 4(A) (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i Component Parts 2 position single with back pressure check valve Material Note Description No. q w e r t y u i Zinc die-casted Body r u !

Rotary Actuator

LL LL Key dimensions [mm] Size Key dimensions LL 30 3 x 3 x 14 3 50 5 x 5 x 25 5 63 6 x 6 x 30 5 80 6 x 6 x 40 5 100 8 x 7 x 45 5 D215 CRA1 Series Symbol Shaft Pattern Sequencing2 -XA33 to -XA59 Applicable shaft type: X, Z, T, J, K How to Order C RA1 Z X D B J 50 90 M9BW A33 A34 C8 C30 Number of auto switches Magnet Nil 2 pcs. S 1 pc.

SZ3000

0 e w t y q o 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center 4(A) (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i Component Parts 2 position single with back pressure check valve Material Note Description No. q w e r t y u i Body Zinc die-casted r u !

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

How To Order: Valve Port size : Without sub-plate Body ported SYJ3 2 5 LZ 1 M3 3 Base mounted (4 Port) SYJ3 3 5 LZ 3 2 Base mounted (5 Port) (With gasket and screws) 2 SYJ3 4 LZ 3 5 M5 : With sub-plate Manual override Type of actuation : Non-locking push type 1 2 3 4 5 2 Position single solenoid 2 Position double solenoid 3 Position closed center 3 Position exhaust center 3 Position pressure

Compact Manifold Regulator

32 1/4 Symbol C4 C6 N3 N7 Size 6 8 10 1/4 5/16 3/8 Symbol C6 C8 C10 N7 N9 N11 Semi-standard Semi-standard VY1 Description None Oil-free Description None Oil-free Symbol Nil X17 Symbol Nil X17 VBA VBAT AP100 Straight type Straight type Elbow type Elbow type 6.5 X X 12.5 X X Y Y X X Y X X Y Fitting size Fitting size Fitting size Fitting size 5 5 5.5 5 6 4, 5/32 4, 5/32 6 3 11.5 19 19 20 8,