INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Assembly example qResidual pressure relief 3 port solenoid valve VP517Y-5DZ1 1 pc. wAir combination AC30C-03DG 1 pc. eSpacer with bracket Y300T-A1 pc. tPiping adapter *1 *2 rSpacer Y300-A1 pc. tPiping adapter E300-03-A1 pc. q Residual pressure relief 3 port solenoid valve Applicable Combinations/Attachment Part Nos.

VXH

(mm) Port size Weight (g) Max.system pressure (MPa) Note) VXD Water Air Oil 3 1 4 3 8 1 2 2.0 2.3 2.3 2.0 550 550 630 0.35 0.30 0.30 10 0.05 2.0 2.0 1.5 1.6 2.0 2.0 8.5 9.5 9.5 1.9 2.4 2.4 VXZ VXS Note) Weight of grommet type. Add 10 g for conduit type, 30 g for DIN terminal, 60 g for conduit terminal type respectively.

Air cooled Thermo-con (Compact type)

request message to write W End code Address Request to write Numerical data Identification code BCC data Start code Composition of request message to store W End code Address Request to write Identification code BCC data Start code 3-2 HEF002-A6 Communication Format 3.4 Composition of Response Message (from the product to master) Refer to page 3-4 3.5 Explanation of Code for codes 1 to 10

Precision Regulator

Year Month T : 2015 o: January U : 2016 P: February V : 2017 Q: March W : 2018 R: April X : 2019 Z: December -7- 5. Precautions for handling Fluid Warning (1) The operating fluids must be compressed air.

VT325

VO325-00 VQZ VT325-T Specifications VZ Type of actuation Direct operated type 2 position single solenoid VS Air Fluid Operating pressure range 0 to 1.0 MPa 10 to 50C (No freezing. Refer to page 4-18-4.)

IS3000

cycles With indicator light Micro Switch Ratings IS3100 (Gasket piping) IS3000-02 (Rc 1/4 thread) 0 1 0 1 IS3 10 IS3 00 Inductive load (A) Non inductive (A) Non inductive (A) Model Load Load resistance Light load Inductive load Motor load Load resistance Circuit Rated voltage (V) N.C.

NAME

Operation tinre @ntinuous (ShourVday) =1.Syears Clean Air for Clean Room Seruice Clean roorn Comgessed ait C Supa Mist Seoarator q/silem B/Blcrrviq air b partsdebning ODerry pcint: -58'F or less (Atnospheric p(essure), OEfficiency: Less than 100 particles 0.3 microns ol1 larger per cubic foot.

NGIP seies

Series NCJP Dimsaians Notei Includes Mounting Nut. 0.43 No.5-40 UNC 0.56 No.10 32 UNF /6 \1/4") 0 (3!

3M/SMseries

' spaold order Elgctrical Entry//lndicator llght and surge voltage Series NVFSOOO Manifold Manifold Manifold B mount (Barstock Type) Manifold type 10 stations Maximum stations x lf thero sre more than 5 stiations supply both sides of supply (P) porl and exhatlsl bottl sides ol xhaust (R) pod.

Electro-Pneumatic Proportional Valve

or less 3% or less 1MPa 12, 24VDC 0 to 2W 0 to 4W Class B Series PVQ How to Order P V Q 13 5 L 03 M5 Valve type Body materials Symbol A Nil Body Brass C37 Note for PVQ13 for PVQ31, 33 13 31 33 N.C.

Precision Clean Regulator

0 q 9 Valve seat PTFE IRV 10 O-ring Fluororubber u w 11 Diaphragm Fluororubber VEX 12 Gasket Fluororubber SRH 13 Pressure regulator spring Steel wire Pressure regulator screw assembly 14 SRP SRP SRF ITV Dimensions IC ITVH 30.5 Bracket ITVX PVQ 40 A B SMC P K U C S O H L 36 VY1 51 31 30 Panel mounting hole VBA VBAT 40 AP100 8.5 28 20 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 1.6 Port

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

A 24 M5 thread, depth 8 With or without insert depending on base material. 32 A' Coding stud M5 x 10 DIN913-45H 12 2 8 M5 Drive flange face G1/4 DIN/ISO228/1 19.5 5.5 Solenoid valve flange face O-ring 16 x 2 1.5 IP 3 IW 1301 AW The solenoid valve can be attached with 2 mounting bolts.

Direct Operated Solenoid Valve Metal Seal Series VS4
10

Solenoid Specifications 100, 200 VAC, 50/60 Hz; 24 VDC Coil rated voltage How to Calculate the Flow Rate 15 to +10% of rated voltage Allowable voltage fluctuation For obtaining the flow rate, refer to page 31-10.

How to Order

(For type 20 manifold) M 1 SYJ3 2 5 M M3 10 Body ported M 1 SYJ3 4 5 M 10 Base mounted CE-compliant Clean series Port size Nil Q CE-compliant 3 port Nil: Without sub-plate M5: M5 port With sub-plate Note) CE-compliant: For DC only.

Card Motor Series LAT3

Card Motor Series LAT3 RoHS How to Order 1 N 1 D LAT3 10 Sensor resolution Nil Controller mounting Nil 30 m DNote 3) Screw mounting F 1.25 m DIN rail mounting I/O cable lengthNote 2) Stroke Nil 10 20 30 Without cable 10 mm Note 1) Refer to page 3 for detailed specifications of the controller. Note 2) If Without controller has been selected, the I/O cable is also not included.

VXH

(mm) Port size Weight (g) Max.system pressure (MPa) Note) VXD Water Air Oil 3 1 4 3 8 1 2 2.0 2.3 2.3 2.0 550 550 630 0.35 0.30 0.30 8.5 9.5 9.5 10 0.05 2.0 2.0 1.5 1.6 2.0 2.0 1.9 2.4 2.4 VXZ VXS Note) Weight of grommet type. Add 10 g for conduit type, 30 g for DIN terminal, 60 g for conduit terminal type respectively.

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 10 (1), Output Specification/Temperature Sensor: L2 (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: None), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 10 (1), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 10 (1), Output Specification/Temperature Sensor: LT (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 10 (1), Output Specification/Temperature Sensor: LT (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: Instantaneous Flow: gal/min; Accumulated Flow: gal; Temperature: °C, Bracket