High Power Cylinder Series RHC

Auto Switch Mounting Height (mm) Auto switch model D-B5/B64 D-B59W D-G5/K59 D-G5W D-K59W D-G5NTL D-G5BAL D-H7C D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-A3 D-G39 D-K39 D-A44 D-A9 D-M9 D-M9W D-C73C D-C80C Bore size (mm) Hs Hs Hs Hs Hs Hs 20 25 32 40 50 63 80 100 24 24.5 27.5 27 62 72 26.5 27 30 29.5 64.5 74.5 30 30.5 33.5 33 68 78 34.5 35 38 37.5 72.5 82.5 40 40.5 43.5 43 78 88 47 47.5 50.5 50.5

Compact Cylinder

YB-03 YB-05 32, 40 50, 63 6.5 6.5 10 12 18 22 50 60 9 11 80 120 9 Series CVQ Auto Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height 32, 40, 50, 63 D-M9 type/D-M9W type/D-A9 type D-M9V type/D-M9WV type/D-A9V type A W A B Approx.

High Vacuum Angle Valve, XL Series

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

MU

style D-A73C, D-A80C, D-J79C 25, 32 40, 50, 63 22.6 30.5 HS HS HS Auto switch D-A79W, D-F7WV, D-F7V D-F7BAVL 25, 32 40, 50, 63 22 30.5 HS Auto switch D-P5DWL 40, 50, 63 20 HS Auto switch 7-8-20 21 Series MDU With Auto Switch Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height Proper Auto Switch Mounting Position Auto Switch Mounting Height Auto

Clamp Cylinder with Lock Series CLK1

Symbol Auto switch positioning and mounting 40 50 63 2 pcs. 1 pc. "n" pcs. Model A B Same side Same side 8 0 0 D-P7, D-P8 25 25 25 50 + 65(n-2) 50 50 D-P7, D-P8 D-P5 Approx. Hs 45 49 54.5 Approx. Ht 28 28 28 A B 3 4.5 4.5 26 27.5 27.5 D-P5 Approx. Hs 46 50 56 Approx.

Precautions 1

Retaining rings (cotter pins for 40) are included. Rod End Nut (mm) Trunnion Nut (mm) Mounting Nut (mm) H Material: Carbon steel Material: Carbon steel Material: Carbon steel d d B D D C C C D H B H B d Applicable bore size 20 25, 32 40 Applicable bore size 20 25, 32 40 Applicable bore size 20 25, 32 40 B C D d H D d H C B d H B C D Part no. NT-02 NT-03 NT-04 Part no.

CNG

CNS D-H7C D-B5, D-B6, D-B59W CLS HS HS Auto switch Auto switch 12 8.5 CLQ 24.5 16 MLGP A B A B 33 38.2 RLQ MLU Proper Auto Switch Mounting Position Auto Switch Mounting Height ML1C Auto switch model D-C7/C80 D-H7 D-H7W D-H7NF D-H7BAL D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7/C80 D-C73C D-C80C D-B5/B64 DD-B5/B64 D-B59W D-G5NTL D-H7C D-C73C D-C80C D-G5NTL D-B59W -X Bore size (mm) A B A B A B A B

Compact Cylinder

140 160 45 50 55 60 65 70 75 80 85 90 55 60 65 70 75 80 85 90 95 100 110 130 150 C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B80-10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40

CLQ

Hs A Auto switch mounting height (mm) Proper auto switch mounting positions (mm) D-F9 D-F9V D-F9W D-F9WV D-A9V D-F9BAL D-F9V D-F9WV D-A9 D-A9V Bore size (mm) D-F9BAL Bore size (mm) Hs Hs Hs 20 22 22.5 25 B A B A A B 20 25 36 6.5 37 7.5 33 3.5 24.5 27 24 25 32 41 8.5 9.5 38 5.5 42 27 29 26.5 32 40 8 9 43 5 44 40 32.5 30 30.5 40 50 10.5 49 7.5 50 11.5 46 36 36.5 38.5 50 63 48 13.5 49 14.5 45

LJ1H

B A C D Non-standard Motors: The following motors will be mounted when a motor mounted type is specified.

CNG

CNS D-H7C D-B5, D-B6, D-B59W CLS HS HS Auto switch Auto switch 12 8.5 CLQ 24.5 16 MLGP A B A B 33 38.2 RLQ MLU Proper Auto Switch Mounting Position Auto Switch Mounting Height ML1C Auto switch model D-C7/C80 D-H7 D-H7W D-H7NF D-H7BAL D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7/C80 D-C73C D-C80C D-B5/B64 DD-B5/B64 D-B59W D-G5NTL D-H7C D-C73C D-C80C D-G5NTL D-B59W -X Bore size (mm) A B A B A B A B

MTS

0 (15) 25 D-M9, D-M9V 15 (17) 0 0 40 50 (57) 32 47 (49) 10 (17) D-F9W, D-F9WV 15 (17) 0 0 40 50 (57) 32 47 (49) 10 (17) D-A9, D-A9V 0 (15) 0 0 50 50 (61) 38 38 (53) 0 (11) 32 D-M9, D-M9V 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-F9W, D-F9WV 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-A9, D-A9V 0 (15) 0 0 54 54 (64) 48 48 (63) 0 (10) 40 D-M9, D-M9V 10 (17) 0 0 54 59 (66) 48 58 (65) 5 (12)

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

55) 26 56 (63) 0 0 (17) D-A9, D-A9V 0 (15) 0 40 40 (55) 32 32 (47) 0 0 (15) 25 D-M9,D-M9V D-M9W, D-M9WV 40 (42) 0 40 50 (57) 47 72 (74) 15 10 (17) D-A9, D-A9V 0 (15) 0 50 50 (61) 38 38 (53) 0 0 (11) 32 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 50 55 (63) 38 48 (55) 0 5 (13) D-A9, D-A9V 0 (15) 0 54 54 (64) 48 48 (63) 0 0 (10) 40 D-M9, D-M9V D-M9W, D-M9WV 15 (22) 0 54 59 (66) 48 63 (70) 0 5 (12)

51

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) Note 1) BMA3-020 Note 1) BMA3-025 Note 1) BMA3-032 Note 1) BMA3-040 Note 1) BMA3-050 Note 1) BMA3-063 CJ1 Note 2) BMA3-020S Note 2) BMA3-025S Note 2) BMA3-032S Note 2) BMA3-040S Note 2) BMA3-050S Note 2) BMA3-063S D-M9A(V) CJP D-C7/C80 D-C73C/C80C D-H7 D-H7W D-H7NF D-H7BA D-B5/B64 D-B59W D-G5/K59 D-G5W/

Electric Slide Tables

Use bolts that are between the maximum and minimum screw-in depths in length. 47 Electric Slide Table/High Rigidity Type Series LESH Model Selection Specific Product Precautions Side Holder (In-line Motor Type/D Type) [mm] E Servo Motor (24 VDC)/Step Motor (Servo/24 VDC) LES LESH G LE-D-3-1 LE-D-3-2 LE-D-3-3 A B E 20 25 30 F 6.7 8.3 12 D 33 40 49 Part no.

Compact Cylinder with Air Cushion and Lock Series RLQ

Minimum Auto Switch Mounting Stroke (mm) D-A7/A80 D-A73C/A80C D-A7H/A80H D-A79W D-F7V/J79C D-F7WV/F7BAVL D-F7/J79 D-F7W/J79W D-F7BAL/F7NTL D-F79F D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL DNumber of auto switches -X Individual -X 1 pc. 20 20 20 20 2 pcs. 859 Series RLQ Operationg Range (mm) (mm) Auto switch type Bore size Auto switch type Bore size 32 40 50 63 32 40 50 63 D-A9/A9V

MK

52 40 16 8 23 Note 1) Above figure is for D-A73/A80.

CQS

10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL Series CQSK 12 16 5, 10, 15, 20 25, 30 7-4-28 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQSS 12 16 5, 10, 15, 20 25, 30 (1) 7-4-36 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Built-in magnet Rod end male

AC Servo Motor Driver (Network card type ）

H T E d W T D L Max.

SMC

to 25 6 to 25 10/16 15/32 Bore size 610 6 D-C7/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9